JPS607483Y2 - 電子ビ−ム露光装置 - Google Patents

電子ビ−ム露光装置

Info

Publication number
JPS607483Y2
JPS607483Y2 JP1976040218U JP4021876U JPS607483Y2 JP S607483 Y2 JPS607483 Y2 JP S607483Y2 JP 1976040218 U JP1976040218 U JP 1976040218U JP 4021876 U JP4021876 U JP 4021876U JP S607483 Y2 JPS607483 Y2 JP S607483Y2
Authority
JP
Japan
Prior art keywords
electron beam
detector
sample stage
measured point
half mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976040218U
Other languages
English (en)
Japanese (ja)
Other versions
JPS52131964U (enExample
Inventor
洋 安田
憲一 川島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1976040218U priority Critical patent/JPS607483Y2/ja
Publication of JPS52131964U publication Critical patent/JPS52131964U/ja
Application granted granted Critical
Publication of JPS607483Y2 publication Critical patent/JPS607483Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1976040218U 1976-03-31 1976-03-31 電子ビ−ム露光装置 Expired JPS607483Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976040218U JPS607483Y2 (ja) 1976-03-31 1976-03-31 電子ビ−ム露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976040218U JPS607483Y2 (ja) 1976-03-31 1976-03-31 電子ビ−ム露光装置

Publications (2)

Publication Number Publication Date
JPS52131964U JPS52131964U (enExample) 1977-10-06
JPS607483Y2 true JPS607483Y2 (ja) 1985-03-13

Family

ID=28499372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976040218U Expired JPS607483Y2 (ja) 1976-03-31 1976-03-31 電子ビ−ム露光装置

Country Status (1)

Country Link
JP (1) JPS607483Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5036289Y2 (enExample) * 1971-03-19 1975-10-22

Also Published As

Publication number Publication date
JPS52131964U (enExample) 1977-10-06

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