JPS52131964U - - Google Patents
Info
- Publication number
- JPS52131964U JPS52131964U JP4021876U JP4021876U JPS52131964U JP S52131964 U JPS52131964 U JP S52131964U JP 4021876 U JP4021876 U JP 4021876U JP 4021876 U JP4021876 U JP 4021876U JP S52131964 U JPS52131964 U JP S52131964U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976040218U JPS607483Y2 (ja) | 1976-03-31 | 1976-03-31 | 電子ビ−ム露光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976040218U JPS607483Y2 (ja) | 1976-03-31 | 1976-03-31 | 電子ビ−ム露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52131964U true JPS52131964U (enExample) | 1977-10-06 |
| JPS607483Y2 JPS607483Y2 (ja) | 1985-03-13 |
Family
ID=28499372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976040218U Expired JPS607483Y2 (ja) | 1976-03-31 | 1976-03-31 | 電子ビ−ム露光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS607483Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4714769U (enExample) * | 1971-03-19 | 1972-10-20 |
-
1976
- 1976-03-31 JP JP1976040218U patent/JPS607483Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4714769U (enExample) * | 1971-03-19 | 1972-10-20 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS607483Y2 (ja) | 1985-03-13 |