JPS6070815A - 縦振動型圧電振動子 - Google Patents
縦振動型圧電振動子Info
- Publication number
- JPS6070815A JPS6070815A JP17883683A JP17883683A JPS6070815A JP S6070815 A JPS6070815 A JP S6070815A JP 17883683 A JP17883683 A JP 17883683A JP 17883683 A JP17883683 A JP 17883683A JP S6070815 A JPS6070815 A JP S6070815A
- Authority
- JP
- Japan
- Prior art keywords
- main vibration
- vibration part
- width
- main
- main vibrating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001259 photo etching Methods 0.000 claims description 2
- 238000005530 etching Methods 0.000 abstract description 11
- 239000013078 crystal Substances 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 230000003247 decreasing effect Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000003517 fume Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/0595—Holders or supports the holder support and resonator being formed in one body
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17883683A JPS6070815A (ja) | 1983-09-27 | 1983-09-27 | 縦振動型圧電振動子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17883683A JPS6070815A (ja) | 1983-09-27 | 1983-09-27 | 縦振動型圧電振動子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6070815A true JPS6070815A (ja) | 1985-04-22 |
JPH0351131B2 JPH0351131B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-08-05 |
Family
ID=16055510
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17883683A Granted JPS6070815A (ja) | 1983-09-27 | 1983-09-27 | 縦振動型圧電振動子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6070815A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60189308A (ja) * | 1984-03-09 | 1985-09-26 | Kinseki Kk | 長辺縦振動子 |
JPH02132912A (ja) * | 1988-11-14 | 1990-05-22 | Seiko Electronic Components Ltd | 縦水晶振動子 |
JPH03158015A (ja) * | 1989-11-15 | 1991-07-08 | Seiko Electronic Components Ltd | 縦水晶振動子 |
US9354419B2 (en) | 2010-12-20 | 2016-05-31 | Samsung Electronics Co., Ltd. | Adjustment device, lens barrel, and optical apparatus |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5176089A (ja) * | 1974-12-26 | 1976-07-01 | Suwa Seikosha Kk | Tateshindogataatsudenshindoshi |
JPS57138212A (en) * | 1981-01-15 | 1982-08-26 | Asulab Sa | Microminiature piezoelectric resonator |
-
1983
- 1983-09-27 JP JP17883683A patent/JPS6070815A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5176089A (ja) * | 1974-12-26 | 1976-07-01 | Suwa Seikosha Kk | Tateshindogataatsudenshindoshi |
JPS57138212A (en) * | 1981-01-15 | 1982-08-26 | Asulab Sa | Microminiature piezoelectric resonator |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60189308A (ja) * | 1984-03-09 | 1985-09-26 | Kinseki Kk | 長辺縦振動子 |
JPH02132912A (ja) * | 1988-11-14 | 1990-05-22 | Seiko Electronic Components Ltd | 縦水晶振動子 |
JPH03158015A (ja) * | 1989-11-15 | 1991-07-08 | Seiko Electronic Components Ltd | 縦水晶振動子 |
US9354419B2 (en) | 2010-12-20 | 2016-05-31 | Samsung Electronics Co., Ltd. | Adjustment device, lens barrel, and optical apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPH0351131B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-08-05 |