JPS6069624A - 振動減衰機能をもつ小形偏向器 - Google Patents
振動減衰機能をもつ小形偏向器Info
- Publication number
- JPS6069624A JPS6069624A JP59167267A JP16726784A JPS6069624A JP S6069624 A JPS6069624 A JP S6069624A JP 59167267 A JP59167267 A JP 59167267A JP 16726784 A JP16726784 A JP 16726784A JP S6069624 A JPS6069624 A JP S6069624A
- Authority
- JP
- Japan
- Prior art keywords
- finger
- voltage
- deflector
- fingers
- image signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000013016 damping Methods 0.000 title description 7
- 230000004044 response Effects 0.000 claims description 9
- 238000010408 sweeping Methods 0.000 claims description 2
- 238000005452 bending Methods 0.000 description 10
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 230000003993 interaction Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000002050 diffraction method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000003534 oscillatory effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Facsimile Scanning Arrangements (AREA)
- Mechanical Optical Scanning Systems (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US523983 | 1983-08-16 | ||
| US06/523,983 US4561023A (en) | 1983-08-16 | 1983-08-16 | Dampening system for micro-deflector scanning beam modulator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6069624A true JPS6069624A (ja) | 1985-04-20 |
| JPH057689B2 JPH057689B2 (OSRAM) | 1993-01-29 |
Family
ID=24087252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59167267A Granted JPS6069624A (ja) | 1983-08-16 | 1984-08-09 | 振動減衰機能をもつ小形偏向器 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4561023A (OSRAM) |
| EP (1) | EP0134681B1 (OSRAM) |
| JP (1) | JPS6069624A (OSRAM) |
| DE (1) | DE3467818D1 (OSRAM) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3636985A1 (de) * | 1985-11-12 | 1987-05-14 | Xerox Corp | Kombinierte holografische abtastscheibe und bildelementtaktgeber |
| US5166944A (en) * | 1991-06-07 | 1992-11-24 | Advanced Laser Technologies, Inc. | Laser beam scanning apparatus and method |
| US5153644A (en) * | 1991-08-19 | 1992-10-06 | Xerox Corporation | Dual mode correction of image distortion in a xerographic printing apparatus |
| US6073846A (en) * | 1994-08-17 | 2000-06-13 | Metrologic Instruments, Inc. | Holographic laser scanning system and process and apparatus and method |
| EP1081529A3 (en) * | 1999-08-30 | 2002-05-29 | PSC Scanning, Inc. | Reflective dither spring |
| CN104749118B (zh) * | 2015-03-25 | 2018-06-19 | 深圳市贝沃德克生物技术研究院有限公司 | 变量干预式生物标志物浓度检测方法及装置 |
| CN104777136B (zh) * | 2015-03-25 | 2018-06-19 | 深圳市贝沃德克生物技术研究院有限公司 | 基于表面等离子共振技术的生物标志物检测方法与系统 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3544201A (en) * | 1968-01-02 | 1970-12-01 | Gen Telephone & Elect | Optical beam deflector |
| FR2224828A1 (OSRAM) * | 1973-04-09 | 1974-10-31 | Thomson Brandt | |
| US4368489A (en) * | 1978-07-17 | 1983-01-11 | Agfa-Gevaert Ag | Galvanometer-type tilting-mirror scanning system and circuit therefor |
| US4385798A (en) * | 1980-09-16 | 1983-05-31 | Yevick George J | Piezoelectric light beam deflector |
| US4397521A (en) * | 1980-09-29 | 1983-08-09 | Xerox Corporation | Double pass optical system for raster scanners |
| US4441126A (en) * | 1982-05-06 | 1984-04-03 | Sperry Corporation | Adaptive corrector of facet errors in mirror scanning systems |
| US4450458A (en) * | 1982-07-02 | 1984-05-22 | Xerox Corporation | Multi-function reproduction apparatus |
| US4454547A (en) * | 1982-07-02 | 1984-06-12 | Xerox Corporation | Raster output scanner having a full width electro-mechanical modulator |
-
1983
- 1983-08-16 US US06/523,983 patent/US4561023A/en not_active Expired - Fee Related
-
1984
- 1984-07-25 EP EP84305055A patent/EP0134681B1/en not_active Expired
- 1984-07-25 DE DE8484305055T patent/DE3467818D1/de not_active Expired
- 1984-08-09 JP JP59167267A patent/JPS6069624A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| US4561023A (en) | 1985-12-24 |
| JPH057689B2 (OSRAM) | 1993-01-29 |
| EP0134681B1 (en) | 1987-11-25 |
| EP0134681A1 (en) | 1985-03-20 |
| DE3467818D1 (en) | 1988-01-07 |
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