JPS6064559U - 放電トリガ− - Google Patents

放電トリガ−

Info

Publication number
JPS6064559U
JPS6064559U JP15708283U JP15708283U JPS6064559U JP S6064559 U JPS6064559 U JP S6064559U JP 15708283 U JP15708283 U JP 15708283U JP 15708283 U JP15708283 U JP 15708283U JP S6064559 U JPS6064559 U JP S6064559U
Authority
JP
Japan
Prior art keywords
rod
shaped electrode
vacuum container
discharge trigger
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15708283U
Other languages
English (en)
Japanese (ja)
Other versions
JPH035081Y2 (enrdf_load_stackoverflow
Inventor
信行 高橋
杉本　▲りゅう▼二
細川　直吉
Original Assignee
日電アネルバ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日電アネルバ株式会社 filed Critical 日電アネルバ株式会社
Priority to JP15708283U priority Critical patent/JPS6064559U/ja
Publication of JPS6064559U publication Critical patent/JPS6064559U/ja
Application granted granted Critical
Publication of JPH035081Y2 publication Critical patent/JPH035081Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP15708283U 1983-10-11 1983-10-11 放電トリガ− Granted JPS6064559U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15708283U JPS6064559U (ja) 1983-10-11 1983-10-11 放電トリガ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15708283U JPS6064559U (ja) 1983-10-11 1983-10-11 放電トリガ−

Publications (2)

Publication Number Publication Date
JPS6064559U true JPS6064559U (ja) 1985-05-08
JPH035081Y2 JPH035081Y2 (enrdf_load_stackoverflow) 1991-02-08

Family

ID=30346430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15708283U Granted JPS6064559U (ja) 1983-10-11 1983-10-11 放電トリガ−

Country Status (1)

Country Link
JP (1) JPS6064559U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6374550B1 (ja) 2017-02-27 2018-08-15 日立オートモティブシステムズ株式会社 圧力センサ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539993A (en) * 1976-07-15 1978-01-28 Toshiba Corp Ion producing device
JPS58157084A (ja) * 1982-03-15 1983-09-19 松下電工株式会社 調光制御回路
JPS58157083A (ja) * 1982-03-15 1983-09-19 松下電工株式会社 非常灯回路

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539993A (en) * 1976-07-15 1978-01-28 Toshiba Corp Ion producing device
JPS58157084A (ja) * 1982-03-15 1983-09-19 松下電工株式会社 調光制御回路
JPS58157083A (ja) * 1982-03-15 1983-09-19 松下電工株式会社 非常灯回路

Also Published As

Publication number Publication date
JPH035081Y2 (enrdf_load_stackoverflow) 1991-02-08

Similar Documents

Publication Publication Date Title
JPS6064559U (ja) 放電トリガ−
JPS6064560U (ja) 放電トリガ−
JPS6049152U (ja) スパッタ装置
JPH079335Y2 (ja) 放電トリガ−
JPS6039266U (ja) イオンレ−ザ管
JPS6073180U (ja) 真空封止電極
JPS60534U (ja) ペニング真空計
JPS5835649Y2 (ja) トリガ電極装置
JPS6050450U (ja) 真空バルブ
JPS6064561U (ja) 放電トリガ−
JPS617567U (ja) スパツタ用タ−ゲツト
JPS5951061U (ja) 高周波イオン・プレ−テイング装置
JPS59192199U (ja) 音響変換器
JPS58182251U (ja) マグネトロン
JPS58144750U (ja) イオン打込機のイオン源部
JPS59173965U (ja) マグネトロン装置
JPS5854700U (ja) 電磁型発音体
JPS6114448U (ja) 磁気近接スイツチ
JPS60113949U (ja) マグネトロン
JPS57144000A (en) Acoustic transducer
JPS59152555U (ja) イオン源装置
JPS5924234U (ja) 電磁チヤツク
JPS5967834U (ja) 近接スイツチ
JPS6138737U (ja) 開閉器
JPS58154554U (ja) 高周波イオン源