JPS60534U - ペニング真空計 - Google Patents

ペニング真空計

Info

Publication number
JPS60534U
JPS60534U JP9312983U JP9312983U JPS60534U JP S60534 U JPS60534 U JP S60534U JP 9312983 U JP9312983 U JP 9312983U JP 9312983 U JP9312983 U JP 9312983U JP S60534 U JPS60534 U JP S60534U
Authority
JP
Japan
Prior art keywords
tubular member
vacuum gauge
penning vacuum
attached
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9312983U
Other languages
English (en)
Other versions
JPH0134107Y2 (ja
Inventor
光士 東
清水　昌男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP9312983U priority Critical patent/JPS60534U/ja
Publication of JPS60534U publication Critical patent/JPS60534U/ja
Application granted granted Critical
Publication of JPH0134107Y2 publication Critical patent/JPH0134107Y2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図、第２図及び第３図は従来装置を説明するための
図、第４図は本考案の一実施例を示す構成略図、第５図
は第４図の一実施例のｃ−ｃ’断面図、第６図、第７図
は第４図の一実施例装置の要部の概略図である。 １：陰極、４．５＝磁石、６．９：Ｏリング、７゜１０
＝ビス、８二接続管、１１：蓋体、１２：絶縁体、１３
．１８：陽極、１４：直流高圧電源、１５：電流計、１
６：真空室、１７：円筒電極。 第２図 第５図

Claims (1)

    【実用新案登録請求の範囲】
  1. 磁束を透過させる材質からなる管状部材と、該管状部材
    の外側に取り付けられ管状部材の管内を横切る磁界を発
    生させる磁石と、管状部材の一方の開放端を塞ぐ蓋体に
    絶縁を保って取り付けられ、前記管状部材内の磁界中に
    挿入されるリング状陽極とを備え、前記管状部材の内側
    を非磁性元素より成る物質で覆うようにしたことを特徴
    とするペニング真空計。
JP9312983U 1983-06-17 1983-06-17 ペニング真空計 Granted JPS60534U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9312983U JPS60534U (ja) 1983-06-17 1983-06-17 ペニング真空計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9312983U JPS60534U (ja) 1983-06-17 1983-06-17 ペニング真空計

Publications (2)

Publication Number Publication Date
JPS60534U true JPS60534U (ja) 1985-01-05
JPH0134107Y2 JPH0134107Y2 (ja) 1989-10-17

Family

ID=30223766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9312983U Granted JPS60534U (ja) 1983-06-17 1983-06-17 ペニング真空計

Country Status (1)

Country Link
JP (1) JPS60534U (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003003433A1 (en) * 2001-06-28 2003-01-09 Tokyo Electron Limited Chamber sensor port, chamber, and electron beam processor
JP2008304361A (ja) * 2007-06-08 2008-12-18 Ulvac Japan Ltd 冷陰極電離真空計
JP2009128276A (ja) * 2007-11-27 2009-06-11 Shinku Jikkenshitsu:Kk 電離真空装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5233901U (ja) * 1975-08-29 1977-03-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5233901U (ja) * 1975-08-29 1977-03-10

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003003433A1 (en) * 2001-06-28 2003-01-09 Tokyo Electron Limited Chamber sensor port, chamber, and electron beam processor
JP2008304361A (ja) * 2007-06-08 2008-12-18 Ulvac Japan Ltd 冷陰極電離真空計
JP2009128276A (ja) * 2007-11-27 2009-06-11 Shinku Jikkenshitsu:Kk 電離真空装置

Also Published As

Publication number Publication date
JPH0134107Y2 (ja) 1989-10-17

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