JPS6060519A - 光学式変位検出装置 - Google Patents

光学式変位検出装置

Info

Publication number
JPS6060519A
JPS6060519A JP16898583A JP16898583A JPS6060519A JP S6060519 A JPS6060519 A JP S6060519A JP 16898583 A JP16898583 A JP 16898583A JP 16898583 A JP16898583 A JP 16898583A JP S6060519 A JPS6060519 A JP S6060519A
Authority
JP
Japan
Prior art keywords
optical path
diffraction grating
light
optical
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16898583A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0360045B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Mizutani
寛 水谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP16898583A priority Critical patent/JPS6060519A/ja
Publication of JPS6060519A publication Critical patent/JPS6060519A/ja
Publication of JPH0360045B2 publication Critical patent/JPH0360045B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP16898583A 1983-09-13 1983-09-13 光学式変位検出装置 Granted JPS6060519A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16898583A JPS6060519A (ja) 1983-09-13 1983-09-13 光学式変位検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16898583A JPS6060519A (ja) 1983-09-13 1983-09-13 光学式変位検出装置

Publications (2)

Publication Number Publication Date
JPS6060519A true JPS6060519A (ja) 1985-04-08
JPH0360045B2 JPH0360045B2 (enrdf_load_stackoverflow) 1991-09-12

Family

ID=15878211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16898583A Granted JPS6060519A (ja) 1983-09-13 1983-09-13 光学式変位検出装置

Country Status (1)

Country Link
JP (1) JPS6060519A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63170710U (enrdf_load_stackoverflow) * 1987-04-27 1988-11-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63170710U (enrdf_load_stackoverflow) * 1987-04-27 1988-11-07

Also Published As

Publication number Publication date
JPH0360045B2 (enrdf_load_stackoverflow) 1991-09-12

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees