JPH0360045B2 - - Google Patents

Info

Publication number
JPH0360045B2
JPH0360045B2 JP16898583A JP16898583A JPH0360045B2 JP H0360045 B2 JPH0360045 B2 JP H0360045B2 JP 16898583 A JP16898583 A JP 16898583A JP 16898583 A JP16898583 A JP 16898583A JP H0360045 B2 JPH0360045 B2 JP H0360045B2
Authority
JP
Japan
Prior art keywords
optical path
diffraction grating
light source
light
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16898583A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6060519A (ja
Inventor
Hiroshi Mizutani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP16898583A priority Critical patent/JPS6060519A/ja
Publication of JPS6060519A publication Critical patent/JPS6060519A/ja
Publication of JPH0360045B2 publication Critical patent/JPH0360045B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP16898583A 1983-09-13 1983-09-13 光学式変位検出装置 Granted JPS6060519A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16898583A JPS6060519A (ja) 1983-09-13 1983-09-13 光学式変位検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16898583A JPS6060519A (ja) 1983-09-13 1983-09-13 光学式変位検出装置

Publications (2)

Publication Number Publication Date
JPS6060519A JPS6060519A (ja) 1985-04-08
JPH0360045B2 true JPH0360045B2 (enrdf_load_stackoverflow) 1991-09-12

Family

ID=15878211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16898583A Granted JPS6060519A (ja) 1983-09-13 1983-09-13 光学式変位検出装置

Country Status (1)

Country Link
JP (1) JPS6060519A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63170710U (enrdf_load_stackoverflow) * 1987-04-27 1988-11-07

Also Published As

Publication number Publication date
JPS6060519A (ja) 1985-04-08

Similar Documents

Publication Publication Date Title
US5517307A (en) Probe measurement apparatus using a curved grating displacement interferometer
US9074865B2 (en) Contour and surface texture measuring instrument and contour and surface texture measuring method
US4173442A (en) Apparatus and method for determination of wavelength
US4969744A (en) Optical angle-measuring device
US7002137B2 (en) Reference point talbot encoder
KR20110139674A (ko) 변위 검출 장치
US4427296A (en) Electro-optical measuring system
JPH06229781A (ja) 変位測定装置
US3554646A (en) Optical distance gage
US20020134927A1 (en) Optical encoder
JP2004144581A (ja) 変位検出装置
US4678337A (en) Laser based gaging system and method of using same
JPH0652170B2 (ja) 光結像式非接触位置測定装置
US3734623A (en) Interferometer utilizing a tunable laser or similar frequency variable wave energy generator
JP2625917B2 (ja) リニアエンコーダ
JPH0360045B2 (enrdf_load_stackoverflow)
JPH0781884B2 (ja) 光学式変位測定装置
US4339198A (en) Geodetic instrument
US6970255B1 (en) Encoder measurement based on layer thickness
JP4404184B2 (ja) 変位検出装置
CN107560555A (zh) 激光干涉游标卡尺
CN108931190B (zh) 位移检测装置
JPH047803B2 (enrdf_load_stackoverflow)
JPH044974Y2 (enrdf_load_stackoverflow)
JPH0230723Y2 (enrdf_load_stackoverflow)

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees