JPS6060504A - パタ−ン検査方法 - Google Patents

パタ−ン検査方法

Info

Publication number
JPS6060504A
JPS6060504A JP58167616A JP16761683A JPS6060504A JP S6060504 A JPS6060504 A JP S6060504A JP 58167616 A JP58167616 A JP 58167616A JP 16761683 A JP16761683 A JP 16761683A JP S6060504 A JPS6060504 A JP S6060504A
Authority
JP
Japan
Prior art keywords
pattern
data
pattern data
inspected
checked
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58167616A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0469322B2 (https=
Inventor
Hideaki Doi
秀明 土井
Keiichi Okamoto
啓一 岡本
Mitsuzo Nakahata
仲畑　光蔵
Yukio Matsuyama
松山　幸雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58167616A priority Critical patent/JPS6060504A/ja
Publication of JPS6060504A publication Critical patent/JPS6060504A/ja
Publication of JPH0469322B2 publication Critical patent/JPH0469322B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP58167616A 1983-09-13 1983-09-13 パタ−ン検査方法 Granted JPS6060504A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58167616A JPS6060504A (ja) 1983-09-13 1983-09-13 パタ−ン検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58167616A JPS6060504A (ja) 1983-09-13 1983-09-13 パタ−ン検査方法

Publications (2)

Publication Number Publication Date
JPS6060504A true JPS6060504A (ja) 1985-04-08
JPH0469322B2 JPH0469322B2 (https=) 1992-11-05

Family

ID=15853083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58167616A Granted JPS6060504A (ja) 1983-09-13 1983-09-13 パタ−ン検査方法

Country Status (1)

Country Link
JP (1) JPS6060504A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62126791A (ja) * 1985-11-27 1987-06-09 Asutemu Eng:Kk 物体の良否判定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62126791A (ja) * 1985-11-27 1987-06-09 Asutemu Eng:Kk 物体の良否判定装置

Also Published As

Publication number Publication date
JPH0469322B2 (https=) 1992-11-05

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