JPS6056329A - 電極の製作法 - Google Patents

電極の製作法

Info

Publication number
JPS6056329A
JPS6056329A JP58164435A JP16443583A JPS6056329A JP S6056329 A JPS6056329 A JP S6056329A JP 58164435 A JP58164435 A JP 58164435A JP 16443583 A JP16443583 A JP 16443583A JP S6056329 A JPS6056329 A JP S6056329A
Authority
JP
Japan
Prior art keywords
electrode
etching
metal plate
electrodes
adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58164435A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0148605B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Miyama
博 深山
Yoshikazu Kawachi
義和 河内
Kaoru Tomii
冨井　薫
Jun Nishida
準 西田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58164435A priority Critical patent/JPS6056329A/ja
Publication of JPS6056329A publication Critical patent/JPS6056329A/ja
Publication of JPH0148605B2 publication Critical patent/JPH0148605B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
    • H01J9/148—Manufacture of electrodes or electrode systems of non-emitting electrodes of electron emission flat panels, e.g. gate electrodes, focusing electrodes or anode electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
JP58164435A 1983-09-06 1983-09-06 電極の製作法 Granted JPS6056329A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58164435A JPS6056329A (ja) 1983-09-06 1983-09-06 電極の製作法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58164435A JPS6056329A (ja) 1983-09-06 1983-09-06 電極の製作法

Publications (2)

Publication Number Publication Date
JPS6056329A true JPS6056329A (ja) 1985-04-01
JPH0148605B2 JPH0148605B2 (enrdf_load_stackoverflow) 1989-10-19

Family

ID=15793104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58164435A Granted JPS6056329A (ja) 1983-09-06 1983-09-06 電極の製作法

Country Status (1)

Country Link
JP (1) JPS6056329A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100616661B1 (ko) 2005-01-13 2006-08-28 삼성전기주식회사 전자선 리소그래피를 이용한 표면탄성파 소자의 전극 패턴형성 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100616661B1 (ko) 2005-01-13 2006-08-28 삼성전기주식회사 전자선 리소그래피를 이용한 표면탄성파 소자의 전극 패턴형성 방법

Also Published As

Publication number Publication date
JPH0148605B2 (enrdf_load_stackoverflow) 1989-10-19

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