JPS6055480A - パタ−ン位置認識方法 - Google Patents
パタ−ン位置認識方法Info
- Publication number
- JPS6055480A JPS6055480A JP58163175A JP16317583A JPS6055480A JP S6055480 A JPS6055480 A JP S6055480A JP 58163175 A JP58163175 A JP 58163175A JP 16317583 A JP16317583 A JP 16317583A JP S6055480 A JPS6055480 A JP S6055480A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- recognition
- substrate
- mark
- conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 9
- 239000000758 substrate Substances 0.000 claims abstract description 21
- 239000004020 conductor Substances 0.000 claims abstract description 12
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 7
- 238000007493 shaping process Methods 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 238000003909 pattern recognition Methods 0.000 abstract description 6
- 230000005540 biological transmission Effects 0.000 abstract 1
- 238000005286 illumination Methods 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000012567 pattern recognition method Methods 0.000 description 2
- 230000008676 import Effects 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Landscapes
- Image Processing (AREA)
- Wire Bonding (AREA)
- Die Bonding (AREA)
- Image Analysis (AREA)
- Image Input (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58163175A JPS6055480A (ja) | 1983-09-07 | 1983-09-07 | パタ−ン位置認識方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58163175A JPS6055480A (ja) | 1983-09-07 | 1983-09-07 | パタ−ン位置認識方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6055480A true JPS6055480A (ja) | 1985-03-30 |
| JPH0347550B2 JPH0347550B2 (enrdf_load_stackoverflow) | 1991-07-19 |
Family
ID=15768666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58163175A Granted JPS6055480A (ja) | 1983-09-07 | 1983-09-07 | パタ−ン位置認識方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6055480A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01246115A (ja) * | 1988-03-26 | 1989-10-02 | Semiconductor Energy Lab Co Ltd | 炭素または炭素を主成分とする被膜を形成する方法 |
| JPH01276730A (ja) * | 1988-04-28 | 1989-11-07 | Matsushita Electric Ind Co Ltd | 基板認識方法及びその装置 |
| US5094878A (en) * | 1989-06-21 | 1992-03-10 | Nippon Soken, Inc. | Process for forming diamond film |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56155802A (en) * | 1980-05-06 | 1981-12-02 | Fujitsu Ltd | Recognition device |
-
1983
- 1983-09-07 JP JP58163175A patent/JPS6055480A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56155802A (en) * | 1980-05-06 | 1981-12-02 | Fujitsu Ltd | Recognition device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01246115A (ja) * | 1988-03-26 | 1989-10-02 | Semiconductor Energy Lab Co Ltd | 炭素または炭素を主成分とする被膜を形成する方法 |
| JPH01276730A (ja) * | 1988-04-28 | 1989-11-07 | Matsushita Electric Ind Co Ltd | 基板認識方法及びその装置 |
| US5094878A (en) * | 1989-06-21 | 1992-03-10 | Nippon Soken, Inc. | Process for forming diamond film |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0347550B2 (enrdf_load_stackoverflow) | 1991-07-19 |
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