JPS605503Y2 - 透過型走査電子顕微鏡 - Google Patents

透過型走査電子顕微鏡

Info

Publication number
JPS605503Y2
JPS605503Y2 JP3972280U JP3972280U JPS605503Y2 JP S605503 Y2 JPS605503 Y2 JP S605503Y2 JP 3972280 U JP3972280 U JP 3972280U JP 3972280 U JP3972280 U JP 3972280U JP S605503 Y2 JPS605503 Y2 JP S605503Y2
Authority
JP
Japan
Prior art keywords
deflection
current
electron beam
coil
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3972280U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56141357U (enExample
Inventor
善博 新井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP3972280U priority Critical patent/JPS605503Y2/ja
Publication of JPS56141357U publication Critical patent/JPS56141357U/ja
Application granted granted Critical
Publication of JPS605503Y2 publication Critical patent/JPS605503Y2/ja
Expired legal-status Critical Current

Links

JP3972280U 1980-03-26 1980-03-26 透過型走査電子顕微鏡 Expired JPS605503Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3972280U JPS605503Y2 (ja) 1980-03-26 1980-03-26 透過型走査電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3972280U JPS605503Y2 (ja) 1980-03-26 1980-03-26 透過型走査電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS56141357U JPS56141357U (enExample) 1981-10-26
JPS605503Y2 true JPS605503Y2 (ja) 1985-02-20

Family

ID=29635165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3972280U Expired JPS605503Y2 (ja) 1980-03-26 1980-03-26 透過型走査電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS605503Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5941854U (ja) * 1982-09-01 1984-03-17 日本電子株式会社 走査透過電子顕微鏡
JPS59157942A (ja) * 1983-02-25 1984-09-07 Jeol Ltd 電子顕微鏡

Also Published As

Publication number Publication date
JPS56141357U (enExample) 1981-10-26

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