JPS6053042U - 表面分析装置用試料ステ−ジ - Google Patents

表面分析装置用試料ステ−ジ

Info

Publication number
JPS6053042U
JPS6053042U JP14660083U JP14660083U JPS6053042U JP S6053042 U JPS6053042 U JP S6053042U JP 14660083 U JP14660083 U JP 14660083U JP 14660083 U JP14660083 U JP 14660083U JP S6053042 U JPS6053042 U JP S6053042U
Authority
JP
Japan
Prior art keywords
axis
sample stage
axis rotation
around
transmission system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14660083U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0226050Y2 (enExample
Inventor
勲 加藤
畑尾　美良
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP14660083U priority Critical patent/JPS6053042U/ja
Publication of JPS6053042U publication Critical patent/JPS6053042U/ja
Application granted granted Critical
Publication of JPH0226050Y2 publication Critical patent/JPH0226050Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP14660083U 1983-09-20 1983-09-20 表面分析装置用試料ステ−ジ Granted JPS6053042U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14660083U JPS6053042U (ja) 1983-09-20 1983-09-20 表面分析装置用試料ステ−ジ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14660083U JPS6053042U (ja) 1983-09-20 1983-09-20 表面分析装置用試料ステ−ジ

Publications (2)

Publication Number Publication Date
JPS6053042U true JPS6053042U (ja) 1985-04-13
JPH0226050Y2 JPH0226050Y2 (enExample) 1990-07-17

Family

ID=30326269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14660083U Granted JPS6053042U (ja) 1983-09-20 1983-09-20 表面分析装置用試料ステ−ジ

Country Status (1)

Country Link
JP (1) JPS6053042U (enExample)

Also Published As

Publication number Publication date
JPH0226050Y2 (enExample) 1990-07-17

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