JPS6051643B2 - 工作片表面変形の検出方法および装置 - Google Patents
工作片表面変形の検出方法および装置Info
- Publication number
- JPS6051643B2 JPS6051643B2 JP55059877A JP5987780A JPS6051643B2 JP S6051643 B2 JPS6051643 B2 JP S6051643B2 JP 55059877 A JP55059877 A JP 55059877A JP 5987780 A JP5987780 A JP 5987780A JP S6051643 B2 JPS6051643 B2 JP S6051643B2
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- light
- detecting
- laser beam
- wavelengths
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title claims description 10
- 230000003287 optical effect Effects 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 7
- 238000005259 measurement Methods 0.000 claims description 2
- 230000001902 propagating effect Effects 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000001228 spectrum Methods 0.000 claims 1
- 230000001419 dependent effect Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000009659 non-destructive testing Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2918384A DE2918384C2 (de) | 1979-05-08 | 1979-05-08 | Verfahren zum optischen Empfang von Ultraschallwellen |
| DE2918384.4 | 1979-05-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55151206A JPS55151206A (en) | 1980-11-25 |
| JPS6051643B2 true JPS6051643B2 (ja) | 1985-11-15 |
Family
ID=6070143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55059877A Expired JPS6051643B2 (ja) | 1979-05-08 | 1980-05-06 | 工作片表面変形の検出方法および装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4275963A (cg-RX-API-DMAC10.html) |
| JP (1) | JPS6051643B2 (cg-RX-API-DMAC10.html) |
| DE (1) | DE2918384C2 (cg-RX-API-DMAC10.html) |
| FR (1) | FR2456321A1 (cg-RX-API-DMAC10.html) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4841140A (en) * | 1987-11-09 | 1989-06-20 | Honeywell Inc. | Real-time color comparator |
| US5394752A (en) * | 1993-03-16 | 1995-03-07 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Method for determing shear direction using liquid crystal coatings |
| CA2122782C (en) * | 1994-05-03 | 1999-07-27 | Wojtek J. Bock | Apparatus for measuring an ambient physical parameter applied to a highly birefringent sensing fiber and method |
| US5546187A (en) * | 1995-03-15 | 1996-08-13 | Hughes Aircraft Company | Self-referencing laser-based ultrasonic wave receiver |
| US5814730A (en) * | 1996-06-10 | 1998-09-29 | Institute Of Paper Science And Technology And Georgia Institute Of Technology | Material characteristic testing method and apparatus using interferometry to detect ultrasonic signals in a web |
| US6628408B1 (en) | 1999-04-15 | 2003-09-30 | Kimberly-Clark Worldwide, Inc. | Amplitude measurement for an ultrasonic horn |
| US6534768B1 (en) | 2000-10-30 | 2003-03-18 | Euro-Oeltique, S.A. | Hemispherical detector |
| CN105043525A (zh) * | 2015-04-30 | 2015-11-11 | 杭州电子科技大学 | 一种基于激光散斑行为的振动信息检测方法 |
| CN105043524B (zh) * | 2015-04-30 | 2018-11-02 | 杭州电子科技大学 | 一种基于激光散斑离焦成像的振动检测方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3145252A (en) * | 1961-02-21 | 1964-08-18 | Bell Telephone Labor Inc | Polychromatic interferometry |
| US3804521A (en) * | 1972-02-22 | 1974-04-16 | Itek Corp | Optical device for measuring surface roughness |
| GB1497072A (en) * | 1974-04-23 | 1978-01-05 | Rca Corp | Visualization and measurement of ultrasonic waves |
| DE2457253C2 (de) * | 1974-12-04 | 1982-09-02 | Krautkrämer, GmbH, 5000 Köln | Optisches interferometrisches Verfahren und Vorrichtung zur berührungslosen Messung der durch Ultraschallwellen verursachten Oberflächenauslenkung eines Prüflings |
| FR2345701A1 (fr) * | 1976-03-23 | 1977-10-21 | Cem Comp Electro Mec | Procede et dispositif pour mesurer des deplacements ou vibrations d'une surface |
| DE2709686C2 (de) * | 1977-03-05 | 1982-09-09 | Krautkrämer, GmbH, 5000 Köln | Optisches interferometrisches Verfahren zur berührungslosen Messung der durch Ultraschallwellen verursachten Oberflächenauslenkung eines Prüflings |
| US4145140A (en) * | 1977-06-15 | 1979-03-20 | Hitoshi Fujii | Measurement of surface roughness |
-
1979
- 1979-05-08 DE DE2918384A patent/DE2918384C2/de not_active Expired
-
1980
- 1980-02-21 US US06/123,377 patent/US4275963A/en not_active Expired - Lifetime
- 1980-05-06 FR FR8010101A patent/FR2456321A1/fr active Granted
- 1980-05-06 JP JP55059877A patent/JPS6051643B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| US4275963A (en) | 1981-06-30 |
| DE2918384C2 (de) | 1984-03-22 |
| DE2918384A1 (de) | 1980-11-13 |
| FR2456321A1 (fr) | 1980-12-05 |
| JPS55151206A (en) | 1980-11-25 |
| FR2456321B1 (cg-RX-API-DMAC10.html) | 1985-01-04 |
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