JPS604679Y2 - 自動研摩機 - Google Patents
自動研摩機Info
- Publication number
- JPS604679Y2 JPS604679Y2 JP1438479U JP1438479U JPS604679Y2 JP S604679 Y2 JPS604679 Y2 JP S604679Y2 JP 1438479 U JP1438479 U JP 1438479U JP 1438479 U JP1438479 U JP 1438479U JP S604679 Y2 JPS604679 Y2 JP S604679Y2
- Authority
- JP
- Japan
- Prior art keywords
- polished
- brush
- rotary plate
- substrate
- thrust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 title claims description 6
- 239000000463 material Substances 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 14
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1438479U JPS604679Y2 (ja) | 1979-02-06 | 1979-02-06 | 自動研摩機 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1438479U JPS604679Y2 (ja) | 1979-02-06 | 1979-02-06 | 自動研摩機 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55115753U JPS55115753U (enExample) | 1980-08-15 |
| JPS604679Y2 true JPS604679Y2 (ja) | 1985-02-12 |
Family
ID=28834196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1438479U Expired JPS604679Y2 (ja) | 1979-02-06 | 1979-02-06 | 自動研摩機 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS604679Y2 (enExample) |
-
1979
- 1979-02-06 JP JP1438479U patent/JPS604679Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55115753U (enExample) | 1980-08-15 |
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