JPS604679Y2 - 自動研摩機 - Google Patents

自動研摩機

Info

Publication number
JPS604679Y2
JPS604679Y2 JP1438479U JP1438479U JPS604679Y2 JP S604679 Y2 JPS604679 Y2 JP S604679Y2 JP 1438479 U JP1438479 U JP 1438479U JP 1438479 U JP1438479 U JP 1438479U JP S604679 Y2 JPS604679 Y2 JP S604679Y2
Authority
JP
Japan
Prior art keywords
polished
brush
rotary plate
substrate
thrust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1438479U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55115753U (Direct
Inventor
将光 田島
Original Assignee
ト−バン工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ト−バン工業株式会社 filed Critical ト−バン工業株式会社
Priority to JP1438479U priority Critical patent/JPS604679Y2/ja
Publication of JPS55115753U publication Critical patent/JPS55115753U/ja
Application granted granted Critical
Publication of JPS604679Y2 publication Critical patent/JPS604679Y2/ja
Expired legal-status Critical Current

Links

JP1438479U 1979-02-06 1979-02-06 自動研摩機 Expired JPS604679Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1438479U JPS604679Y2 (ja) 1979-02-06 1979-02-06 自動研摩機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1438479U JPS604679Y2 (ja) 1979-02-06 1979-02-06 自動研摩機

Publications (2)

Publication Number Publication Date
JPS55115753U JPS55115753U (Direct) 1980-08-15
JPS604679Y2 true JPS604679Y2 (ja) 1985-02-12

Family

ID=28834196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1438479U Expired JPS604679Y2 (ja) 1979-02-06 1979-02-06 自動研摩機

Country Status (1)

Country Link
JP (1) JPS604679Y2 (Direct)

Also Published As

Publication number Publication date
JPS55115753U (Direct) 1980-08-15

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