JPS6046200B2 - 固体の表面の電解エツチング - Google Patents

固体の表面の電解エツチング

Info

Publication number
JPS6046200B2
JPS6046200B2 JP47101673A JP10167372A JPS6046200B2 JP S6046200 B2 JPS6046200 B2 JP S6046200B2 JP 47101673 A JP47101673 A JP 47101673A JP 10167372 A JP10167372 A JP 10167372A JP S6046200 B2 JPS6046200 B2 JP S6046200B2
Authority
JP
Japan
Prior art keywords
solid
anode
electrolyte
cathode
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47101673A
Other languages
English (en)
Japanese (ja)
Other versions
JPS4847577A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
イリ・デイフイゼク
ウオルフガング・フアウル
ベルテル・カステニング
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Kernforschungsanlage Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungsanlage Juelich GmbH filed Critical Kernforschungsanlage Juelich GmbH
Publication of JPS4847577A publication Critical patent/JPS4847577A/ja
Publication of JPS6046200B2 publication Critical patent/JPS6046200B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/07—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process being removed electrolytically
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/14—Etching locally

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electrolytic Production Of Metals (AREA)
  • ing And Chemical Polishing (AREA)
JP47101673A 1971-10-12 1972-10-12 固体の表面の電解エツチング Expired JPS6046200B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19712150748 DE2150748C3 (de) 1971-10-12 1971-10-12 Verfahren und Vorrichtung zur elektrochemischen Bearbeitung der Oberflächen von festen Körpern
DE2150748.2 1971-10-12

Publications (2)

Publication Number Publication Date
JPS4847577A JPS4847577A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-07-06
JPS6046200B2 true JPS6046200B2 (ja) 1985-10-15

Family

ID=5822106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47101673A Expired JPS6046200B2 (ja) 1971-10-12 1972-10-12 固体の表面の電解エツチング

Country Status (4)

Country Link
JP (1) JPS6046200B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2150748C3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2161911B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1407425A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5024735A (en) * 1989-02-15 1991-06-18 Kadija Igor V Method and apparatus for manufacturing interconnects with fine lines and spacing

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4516866Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1965-09-28 1970-07-11

Also Published As

Publication number Publication date
FR2161911B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-08-20
DE2150748B2 (de) 1978-11-16
FR2161911A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-07-13
DE2150748A1 (de) 1973-04-19
JPS4847577A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-07-06
GB1407425A (en) 1975-09-24
DE2150748C3 (de) 1979-07-19

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Legal Events

Date Code Title Description
A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 19820803