JPS6045427U - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPS6045427U
JPS6045427U JP13783483U JP13783483U JPS6045427U JP S6045427 U JPS6045427 U JP S6045427U JP 13783483 U JP13783483 U JP 13783483U JP 13783483 U JP13783483 U JP 13783483U JP S6045427 U JPS6045427 U JP S6045427U
Authority
JP
Japan
Prior art keywords
refrigerant
semiconductor manufacturing
shroud
manufacturing equipment
consumption amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13783483U
Other languages
English (en)
Japanese (ja)
Other versions
JPH019151Y2 (enExample
Inventor
寺崎　政男
別府　忠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13783483U priority Critical patent/JPS6045427U/ja
Publication of JPS6045427U publication Critical patent/JPS6045427U/ja
Application granted granted Critical
Publication of JPH019151Y2 publication Critical patent/JPH019151Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP13783483U 1983-09-07 1983-09-07 半導体製造装置 Granted JPS6045427U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13783483U JPS6045427U (ja) 1983-09-07 1983-09-07 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13783483U JPS6045427U (ja) 1983-09-07 1983-09-07 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS6045427U true JPS6045427U (ja) 1985-03-30
JPH019151Y2 JPH019151Y2 (enExample) 1989-03-13

Family

ID=30309463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13783483U Granted JPS6045427U (ja) 1983-09-07 1983-09-07 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS6045427U (enExample)

Also Published As

Publication number Publication date
JPH019151Y2 (enExample) 1989-03-13

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