JPS6042732U - 半導体材料の水切乾燥装置 - Google Patents

半導体材料の水切乾燥装置

Info

Publication number
JPS6042732U
JPS6042732U JP13477583U JP13477583U JPS6042732U JP S6042732 U JPS6042732 U JP S6042732U JP 13477583 U JP13477583 U JP 13477583U JP 13477583 U JP13477583 U JP 13477583U JP S6042732 U JPS6042732 U JP S6042732U
Authority
JP
Japan
Prior art keywords
rotor
blades
utility
drying device
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13477583U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6233316Y2 (enEXAMPLES
Inventor
相合　征一郎
Original Assignee
黒谷　巌
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 黒谷　巌 filed Critical 黒谷　巌
Priority to JP13477583U priority Critical patent/JPS6042732U/ja
Publication of JPS6042732U publication Critical patent/JPS6042732U/ja
Application granted granted Critical
Publication of JPS6233316Y2 publication Critical patent/JPS6233316Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP13477583U 1983-08-31 1983-08-31 半導体材料の水切乾燥装置 Granted JPS6042732U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13477583U JPS6042732U (ja) 1983-08-31 1983-08-31 半導体材料の水切乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13477583U JPS6042732U (ja) 1983-08-31 1983-08-31 半導体材料の水切乾燥装置

Publications (2)

Publication Number Publication Date
JPS6042732U true JPS6042732U (ja) 1985-03-26
JPS6233316Y2 JPS6233316Y2 (enEXAMPLES) 1987-08-26

Family

ID=30303580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13477583U Granted JPS6042732U (ja) 1983-08-31 1983-08-31 半導体材料の水切乾燥装置

Country Status (1)

Country Link
JP (1) JPS6042732U (enEXAMPLES)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007085630A (ja) * 2005-09-21 2007-04-05 Kida Seiko Kk 表面処理済みワークの乾燥装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007085630A (ja) * 2005-09-21 2007-04-05 Kida Seiko Kk 表面処理済みワークの乾燥装置

Also Published As

Publication number Publication date
JPS6233316Y2 (enEXAMPLES) 1987-08-26

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