JPS6041726Y2 - 半導体集積回路装置 - Google Patents

半導体集積回路装置

Info

Publication number
JPS6041726Y2
JPS6041726Y2 JP14635876U JP14635876U JPS6041726Y2 JP S6041726 Y2 JPS6041726 Y2 JP S6041726Y2 JP 14635876 U JP14635876 U JP 14635876U JP 14635876 U JP14635876 U JP 14635876U JP S6041726 Y2 JPS6041726 Y2 JP S6041726Y2
Authority
JP
Japan
Prior art keywords
integrated circuit
semiconductor integrated
circuit device
metal
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14635876U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5366074U (enrdf_load_stackoverflow
Inventor
純一 石井
義英 杉浦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14635876U priority Critical patent/JPS6041726Y2/ja
Publication of JPS5366074U publication Critical patent/JPS5366074U/ja
Application granted granted Critical
Publication of JPS6041726Y2 publication Critical patent/JPS6041726Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP14635876U 1976-10-29 1976-10-29 半導体集積回路装置 Expired JPS6041726Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14635876U JPS6041726Y2 (ja) 1976-10-29 1976-10-29 半導体集積回路装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14635876U JPS6041726Y2 (ja) 1976-10-29 1976-10-29 半導体集積回路装置

Publications (2)

Publication Number Publication Date
JPS5366074U JPS5366074U (enrdf_load_stackoverflow) 1978-06-03
JPS6041726Y2 true JPS6041726Y2 (ja) 1985-12-19

Family

ID=28754856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14635876U Expired JPS6041726Y2 (ja) 1976-10-29 1976-10-29 半導体集積回路装置

Country Status (1)

Country Link
JP (1) JPS6041726Y2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0666366B2 (ja) * 1981-06-24 1994-08-24 株式会社日立製作所 半導体集積回路装置の製造方法
JPS617640A (ja) * 1984-06-22 1986-01-14 Toshiba Corp 実装集積回路装置の特性試験装置
JPH0622256B2 (ja) * 1988-06-24 1994-03-23 株式会社日立製作所 半導体集積回路装置の製造方法

Also Published As

Publication number Publication date
JPS5366074U (enrdf_load_stackoverflow) 1978-06-03

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