JPS6040684A - Laser working head - Google Patents

Laser working head

Info

Publication number
JPS6040684A
JPS6040684A JP58149938A JP14993883A JPS6040684A JP S6040684 A JPS6040684 A JP S6040684A JP 58149938 A JP58149938 A JP 58149938A JP 14993883 A JP14993883 A JP 14993883A JP S6040684 A JPS6040684 A JP S6040684A
Authority
JP
Japan
Prior art keywords
nozzle
gas
laser
lens
processing head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58149938A
Other languages
Japanese (ja)
Other versions
JPS6258835B2 (en
Inventor
Yoshihide Kanehara
好秀 金原
Kazuo Sakurai
一男 桜井
Hiroaki Matsuno
松野　博朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP58149938A priority Critical patent/JPS6040684A/en
Publication of JPS6040684A publication Critical patent/JPS6040684A/en
Publication of JPS6258835B2 publication Critical patent/JPS6258835B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462—Nozzles; Features related to nozzles
    • B23K26/1464—Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • B23K26/1476—Features inside the nozzle for feeding the fluid stream through the nozzle

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To prevent deformation of a lens owing to the pressure of working gases and to enable stable working by forming a nozzle which injects coaxially the working gases and laser light into the double construction consisting of an inside nozzle and an outside nozzle and maintaining the inside nozzle under low pressure. CONSTITUTION:Laser light 2 is condensed by a lens 3 provided in a working head 1. Working gases 7a, 7b are injected coaxially with the light 2 from the nozzle toward a work 6. Said nozzle is formed into the double construction consisting of an inside nozzle 4a and an outside nozzle 4b. The working gas 7a of low pressure is injected from said nozzle 4a and the gas 7b of high pressure from the nozzle 4b. The stable laser working is accomplished by the above-mentioned device without deformation of the lens 3 by the gas 7a of low pressure.

Description

【発明の詳細な説明】 〔発明の技術分野〕 この発明は、レーザ加工性能全向上させる様にしたレー
ザ加工ヘッドに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a laser processing head that completely improves laser processing performance.

〔従来の技術〕[Conventional technology]

従来この種のレーザ加工ヘッドとしては、第１図に示す
ものがあった。第１図は従来のレーザ加工ヘッドを示す
縦断面図である。図において、■は加工ヘッド、２はレ
ーザ光、３はレンズ、４は加工ヘッドエの先端部のノズ
ル、５は加ニガスジエツト、６は被加工物、７は加工ガ
ス、８は加工ガスボンベ、９は加ニガスフのレギュレー
タ、１０は加ニガスフの電磁弁、１１は被加工物６の飛
散物でろるスパッタ、１２は被加工物６の溶融物で必る
ドロスを示している。A conventional laser processing head of this type is one shown in FIG. FIG. 1 is a longitudinal sectional view showing a conventional laser processing head. In the figure, ■ is the processing head, 2 is the laser beam, 3 is the lens, 4 is the nozzle at the tip of the processing head, 5 is the gas jet, 6 is the workpiece, 7 is the processing gas, 8 is the processing gas cylinder, and 9 is the processing gas cylinder. 10 is a Kanigasuf electromagnetic valve, 11 is spatter caused by flying objects from the workpiece 6, and 12 is dross caused by melted material from the workpiece 6.

上記した様な構成を有する従来のレーザ加工ヘッドでは
、例えば酸素、窒素、空気等の加ニガスフが、加工ガス
ボンベ８よりレギュレータ９及び電磁弁１０を介し、第
１図の矢印方向から加工ヘッド１の内部へ供給される。In the conventional laser processing head having the above-mentioned configuration, a gas such as oxygen, nitrogen, or air is supplied to the processing head 1 from the processing gas cylinder 8 through the regulator 9 and the electromagnetic valve 10 from the direction of the arrow in FIG. Supplied internally.

この加ニガスフは、レーザ光２と共に同軸方向に加工ヘ
ッド１の先端部のノズル４より、加ニガスジエツト５と
なって被加工物６上に噴射される。この時、レンズ３に
は、第２図に矢印で示す様な下方向よりの加ニガスフに
よる圧力が加えられるが、レンズ３に加わる圧力が、約
５〜１０　Ｋｑ／−以上の強い圧力となると、レンズ３
は、第２図の点線に示す様に変形してレンズ３の焦点位
置がずれ、良好なレーザ加工ができなくなったり、また
、ついにはレンズ３が破損したりするなどの欠点がめっ
た。This carnivorous gas jet 5 is injected onto a workpiece 6 from a nozzle 4 at the tip of the processing head 1 coaxially with the laser beam 2. At this time, pressure is applied to the lens 3 from the downward direction as shown by the arrow in FIG. , lens 3
The lens 3 is often deformed as shown by the dotted line in FIG. 2, causing the focal position of the lens 3 to shift, making it impossible to perform good laser processing, and eventually causing the lens 3 to be damaged.

〔＠明の概要〕[@Overview of Ming]

この発明は、上記の様な従来のものの欠点を改善する目
的でなされたもので、レーザ光をレンズにより集光し、
加工ガスを前記レーザ光と共に同軸的に噴射するノズル
を有するレーザ加工ヘッドにおいて、前記ノズルを内１
１１１１ノズルと外ｔ１１１ノズルの２重構造に形成し
、前記内１８１１ノズルからは低圧力の加工ガスを前記
レーザ光と共に同軸的に噴射し、前記外側ノズルからは
高圧力の加工ガスを噴射する様にして成る構成を有し、
レンズの変形や破損を防止し、常に安定した高性能なレ
ーザ加工を行うことができるレーザ加工ヘッドを提供す
るものである。This invention was made for the purpose of improving the drawbacks of the conventional ones as described above, and focuses the laser beam with a lens.
In a laser processing head having a nozzle that injects processing gas coaxially with the laser beam, one of the nozzles is
It is formed in a double structure of a 1111 nozzle and an outer T111 nozzle, and the inner 1811 nozzle injects low-pressure processing gas coaxially with the laser beam, and the outer nozzle injects high-pressure processing gas. It has a configuration consisting of
The object of the present invention is to provide a laser processing head that prevents lens deformation and damage and can always perform stable and high-performance laser processing.

〔発明の実施例〕[Embodiments of the invention]

以下、この発明の実施例を図について説明する。 Embodiments of the present invention will be described below with reference to the drawings.

第３図はこの発明の一実施例であるレーザ加工ヘッドを
示す縦断面図で、第１図と同一部分は同一符号を用いて
表示してあり、その詳細な説明は省略する。図において
、４ａは加工ヘッド１の先端部の内側ノズル、４ｂは加
工ヘッド１の先端部の外側ノズルでらり、各内側ノズＪ
ｖ４ａと外側ノズル４ｂとは２重構造に形成される。７
ａは低圧力の加工ガス、７ｂは高圧力の加工ガス、ｉ３
　”　ｌ　９　ａｌｌｏａはそれぞれ低圧力の加ニガス
フａ側の加工ガスボンベ、レギュレータ、電磁弁である
。また、８　ｂ　、　９　ｂ　、　１０ｂはそれぞれ高
圧力の加ニガスフｂ側の加工ガスボンベ、レギュレータ
、電磁弁である。FIG. 3 is a longitudinal cross-sectional view showing a laser processing head according to an embodiment of the present invention, in which the same parts as in FIG. 1 are designated by the same reference numerals, and detailed explanation thereof will be omitted. In the figure, 4a is the inner nozzle at the tip of the processing head 1, 4b is the outer nozzle at the tip of the processing head 1, and each inner nozzle J
v4a and the outer nozzle 4b are formed in a double structure. 7
a is a low pressure processing gas, 7b is a high pressure processing gas, i3
9 alloa are processing gas cylinders, regulators, and solenoid valves on the low-pressure gas pipe a side, respectively. 8 b, 9 b, and 10b are processing gas cylinders, regulators, and solenoid valves on the high-pressure gas pipe b side, respectively. It is.

上記した様な構成を有するこの発明の一実施例でめるレ
ーザ加工ヘッドでは、約１〜２　Ｋｑ／ｃＪの低圧力の
加ニガスフａ及び約５〜２０〜／　ｔａの高圧力の加ニ
ガスフｂは、それぞれ第３図に矢印で示す方向よシ加エ
ヘッド１に供給される。低圧力の加ニガスフａは、加工
ヘッド１の内部のレーザ光２と共に同軸方向に加工ヘッ
ド１の先端部の内側ノズル４ａより被加工物６上に噴射
される。また、高圧力の加ニガスフｂは、加工ヘッド１
の内部へは供給されることなく、内側ノズル４ａと２重
構造を形成する外０１１１ノズル４ｂより直接に、加ニ
ガスジエツト５となって被加工物６上に噴射される。と
の場合、高圧力の加ニガスフｂは、加工ヘッド１の内部
空間には加えられない構造とされているので、レンズ３
には不要な高圧力の加ニガスフｂは加えられず、このた
め、レンズ３が変形することや破損することを防止でき
る。低圧力の加ニガスフ８には、加工ヘッド１の内部の
レンズ３を汚損しない様に清浄な加工ガス（例えば酸素
。In the laser processing head according to an embodiment of the present invention having the above-mentioned configuration, a gas cylinder a with a low pressure of about 1 to 2 Kq/cJ and a gas cylinder b with a high pressure of about 5 to 20 Kq/cJ are used. are supplied to the cutting head 1 in the directions indicated by arrows in FIG. 3, respectively. The low-pressure gas inlet gas a is injected onto the workpiece 6 from an inner nozzle 4a at the tip of the processing head 1 coaxially with the laser beam 2 inside the processing head 1. In addition, the high-pressure gas puff b is placed on the processing head 1
The gas is not supplied to the interior of the workpiece 6, but is directly injected onto the workpiece 6 as a gas jet 5 from the outer nozzle 4b forming a double structure with the inner nozzle 4a. In this case, the structure is such that the high-pressure gas cylinder b cannot be applied to the internal space of the processing head 1, so the lens 3
An unnecessary high-pressure gas puff b is not applied to the lens 3, thereby preventing the lens 3 from being deformed or damaged. A clean processing gas (for example, oxygen) is used in the low-pressure gas puff 8 so as not to contaminate the lens 3 inside the processing head 1.

窒素、空気等）を使用し、また、高圧力の加ニガスフｂ
には、高圧力を有する最適な加ニガスジエツト５を形成
するため、多量の加工ガスを必要とするが、清浄な加工
ガスである必要はないために安価な加工ガスの使用が可
能となる。これにより、特に集光特性の良いシングルモ
ードの大出力レーザ光によって厚い金属板等を切断する
場合、その切断幅は狭くなるが、強力な加ニガスジエツ
ト５を形成できるために、金属板に対する切断能力の低
下することがない。(nitrogen, air, etc.) and high-pressure gas
In order to form an optimum gas jet 5 having a high pressure, a large amount of processing gas is required, but since it does not need to be a clean processing gas, it is possible to use an inexpensive processing gas. As a result, when cutting a thick metal plate etc. with a single mode high power laser beam with particularly good focusing characteristics, the cutting width becomes narrow, but since a strong gas jet 5 can be formed, it is possible to cut the metal plate. No deterioration.

ここで、現実に炭酸ガスレーザを実例として見るに、上
記した従来例のものにおいては、レンズ３には約１〜５
　ｈ／ａｌの圧力しか加えられないため、レーザ出力約
２ＫＷにおいて、鉄板では約９朋、ステンレス板では約
３．５門程度の厚さの板までしか切断することができな
かった。これに対し、この発明のものにおいては、同じ
レーザ出力で、鉄板では約２０■、ステンレス板では約
６間程度の厚さの板まで十分に切断することができ、そ
の切断能力を飛躍的に上昇させ得ることが実証されてい
る。Here, looking at a carbon dioxide laser as an actual example, in the conventional example mentioned above, the lens 3 has approximately 1 to 5
Since only a pressure of h/al can be applied, at a laser output of about 2 KW, it was possible to cut only about 9 mm thick for iron plates and about 3.5 mm thick for stainless steel plates. On the other hand, with the device of this invention, with the same laser output, it is possible to sufficiently cut plates approximately 20 mm thick for iron plates and approximately 6 mm thick for stainless steel plates, dramatically increasing the cutting ability. It has been demonstrated that it can be increased.

第４図はこの発明の他の実施例であるレーザ加工ヘッド
の先端部のノズル部分を示す拡大縦断面図である。図に
示す様なレーザ加工ヘッドでは、内側ノズル４ａは、そ
の先端部を流線形状となし、かつ外側ノズル４ｂより少
しばかり、約１〜１０Ｕ程度突出させる様にした構成を
有する。この様にすると、加ニガスジエツト５の絞られ
る位置とレーザ光２の焦点位置Ａとを同一にすることが
でき、このため、被加工物６に対する切断能力を一ノ台
向上させることができる。FIG. 4 is an enlarged longitudinal sectional view showing a nozzle portion at the tip of a laser processing head according to another embodiment of the present invention. In the laser processing head as shown in the figure, the inner nozzle 4a has a streamlined tip and is configured to protrude slightly from the outer nozzle 4b by about 1 to 10 U. In this way, the position where the gas jet 5 is narrowed and the focal position A of the laser beam 2 can be made the same, and therefore the cutting ability for the workpiece 6 can be improved by one degree.

〔発明の効果〕〔Effect of the invention〕

この発８Ａは以上説明した様に、レーザ加工ヘッドにお
いて、ノズルを内側ヘッドと外側ノズルの２重構造に形
成し、前記内ｊＨｌｌノズルからは低圧力の加工ガスを
レーザ光と共に同軸的に噴射し、前記外側ノズルからは
高圧力の加工ガスを噴射する様に構成したので、加工ヘ
ッドの内部に設けられるレンズが、加工ガスの圧力によ
って変形したり破損したりすることを有効的に防止し、
常時安定した極めた高性能なレーザ加工を行うことがで
きるレーザ加工ヘッドが得られるという優れた効果を奏
するものでｂる。As explained above, in this generation 8A, the nozzle in the laser processing head is formed into a double structure of an inner head and an outer nozzle, and low pressure processing gas is coaxially injected with the laser beam from the inner nozzle. Since the outer nozzle is configured to inject high-pressure processing gas, the lens provided inside the processing head is effectively prevented from being deformed or damaged by the pressure of the processing gas,
This has the excellent effect of providing a laser processing head that can perform stable and extremely high-performance laser processing at all times.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来のレーザ加工ヘッドを示す縦断面図、第２
図は、第１図のレーザ加工ヘッドの使用態様におけるレ
ンズ部分を示す説明図、第３図はこの発明の一実施例で
あるレーザ加工ヘッドを示す縦断面図、第４図はこの発
明の他の実施例であるレーザ加工ヘッドの先端部のノズ
ル部分を示す拡大縦断面図である。 図において、１・・・加工ヘッド、２・・・レーザ光、
３・・・レンズ、４・・・ノズル、４ａ・・・内側ノズ
ル、４ｂ・・・外側ノズル、５・・・加ニガスジエツト
、６・・・被加工物、７・・・加工ガス、７ａ・−低圧
力の加工ガス、７ｂ・・・高圧力の加工ガス、８，８ａ
、８ｂ。 ・・−加工カスボンベ、９．９ａ、９ｂ・・・レギュレ
ータ、１０　＋　１０ａ　、　ｉｏｂ　＋＋電磁弁、１
１−Ｘバッタ、１２・・・ドロスである。 なお、各図中、同一符号は同一、又は相当部分を示す。 代理人　大岩増雄 第　１　図 第２図 第３図 第　４　図Figure 1 is a vertical cross-sectional view showing a conventional laser processing head, Figure 2
The figures are explanatory diagrams showing the lens portion in the usage mode of the laser processing head shown in Fig. 1, Fig. 3 is a vertical sectional view showing the laser processing head which is an embodiment of the present invention, and Fig. 4 is an explanatory view showing the lens portion in the usage mode of the laser processing head shown in Fig. 1. FIG. 2 is an enlarged vertical cross-sectional view showing a nozzle portion at the tip of a laser processing head according to an embodiment of the present invention. In the figure, 1...processing head, 2...laser light,
3...Lens, 4...Nozzle, 4a...Inner nozzle, 4b...Outer nozzle, 5...Cannibal gas jet, 6...Workpiece, 7...Processing gas, 7a... -Low pressure processing gas, 7b...High pressure processing gas, 8, 8a
, 8b. ...-processed waste cylinder, 9.9a, 9b...regulator, 10 + 10a, iob ++ solenoid valve, 1
1-X grasshopper, 12...dross. In each figure, the same reference numerals indicate the same or equivalent parts. Agent Masuo Oiwa Figure 1 Figure 2 Figure 3 Figure 4

Claims (1)

【特許請求の範囲】[Claims] （１）　レーザ光をレンズにより集光し、加工ガスを前
記レーザ光と共に同軸的に噴射するノズルを有するレー
ザ加工ヘッドにおいて、前記ノズルを内０１１１ノズル
と外側ノズルの２重構造に形成し、前記内側ノズルから
は低圧力の加工ガスを前記レーザ光と共に同軸的に噴射
し、前記外側ノズルからは高圧力の加工ガスを幀射する
様にして成ることを特徴とするレーザ加工ヘッド。 ■　前記内側ノズルは、その先端部を流線形状となし、
かつ前記外側ノズルより少し突出させる様にしたことを
特徴とする特許請求の範囲第１項記載のレーザ加工ヘッ
ド。(1) In a laser processing head having a nozzle that condenses laser light with a lens and injects processing gas coaxially with the laser light, the nozzle is formed into a double structure of an inner 0111 nozzle and an outer nozzle, and the A laser processing head characterized in that a low-pressure processing gas is ejected from the inner nozzle coaxially with the laser beam, and a high-pressure processing gas is ejected from the outer nozzle. ■ The inner nozzle has a streamlined tip;
2. The laser processing head according to claim 1, wherein the laser processing head is configured to project slightly from the outer nozzle.
JP58149938A 1983-08-17 1983-08-17 Laser working head Granted JPS6040684A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58149938A JPS6040684A (en) 1983-08-17 1983-08-17 Laser working head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58149938A JPS6040684A (en) 1983-08-17 1983-08-17 Laser working head

Publications (2)

Publication Number Publication Date
JPS6040684A true JPS6040684A (en) 1985-03-04
JPS6258835B2 JPS6258835B2 (en) 1987-12-08

Family

ID=15485842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58149938A Granted JPS6040684A (en) 1983-08-17 1983-08-17 Laser working head

Country Status (1)

Country Link
JP (1) JPS6040684A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007061861A (en) * 2005-08-31 2007-03-15 Shibuya Kogyo Co Ltd Laser machining apparatus
JP2011526211A (en) * 2008-06-28 2011-10-06 トルンプフ ヴェルクツォイクマシーネン ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフト Method for eccentrically orienting a laser cutting beam with respect to the nozzle axis, method for inclined cutting, corresponding laser processing head and laser processing machine
CN108406111A (en) * 2018-03-08 2018-08-17 北京工业大学 A kind of optical-fiber laser double-layer coaxial protection welding tip

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5711689U (en) * 1980-06-25 1982-01-21

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5524576A (en) * 1978-08-11 1980-02-21 Furukawa Kinzoku Kogyo Kk Vacuum keeper for vacuum filter for use of sludge dehydration

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5711689U (en) * 1980-06-25 1982-01-21

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007061861A (en) * 2005-08-31 2007-03-15 Shibuya Kogyo Co Ltd Laser machining apparatus
JP4720380B2 (en) * 2005-08-31 2011-07-13 澁谷工業株式会社 Laser processing equipment
JP2011526211A (en) * 2008-06-28 2011-10-06 トルンプフ ヴェルクツォイクマシーネン ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフト Method for eccentrically orienting a laser cutting beam with respect to the nozzle axis, method for inclined cutting, corresponding laser processing head and laser processing machine
CN108406111A (en) * 2018-03-08 2018-08-17 北京工业大学 A kind of optical-fiber laser double-layer coaxial protection welding tip

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JPS6258835B2 (en) 1987-12-08

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