JPS59206189A - Laser beam cutting device - Google Patents

Laser beam cutting device

Info

Publication number
JPS59206189A
JPS59206189A JP58080128A JP8012883A JPS59206189A JP S59206189 A JPS59206189 A JP S59206189A JP 58080128 A JP58080128 A JP 58080128A JP 8012883 A JP8012883 A JP 8012883A JP S59206189 A JPS59206189 A JP S59206189A
Authority
JP
Japan
Prior art keywords
cutting
laser beam
laser
workpiece
sharp angled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58080128A
Other languages
Japanese (ja)
Inventor
Ken Ishikawa
憲 石川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP58080128A priority Critical patent/JPS59206189A/en
Publication of JPS59206189A publication Critical patent/JPS59206189A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles
    • B23K26/1464Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • B23K26/1476Features inside the nozzle for feeding the fluid stream through the nozzle

Abstract

PURPOSE:To enable cutting of a metallic material in a thickness direction with excellent dimensional accuracy of cutting in the case of cutting the thick metallic plate by a laser beam to a shape having a sharp angle by cooling the metallic plate from the rear side in the stage of cutting the sharp angled part. CONSTITUTION:A thick metallic plate 31 to be worked is connected on rollers 33 to an X-Y table 30 moved in X- and Y directions by the command from a pattern control part 35. The laser light 22 from an oscillator 21 is converged by a condenser lens 24 and is irradiated together with auxiliary cutting gas 28 such as O2 or N2 onto the plate 31 then the plate is cut to a target shape when the table 30 moves. If a sharp angled part exists in the shape to be cut in this case, a cooling liquid 38 is ejected in a form of mist from a nozzle 42 by high pressure gas 37 to cool the sharp angled cutting part from the rear in the stage of cutting said sharp angled part, by which the self-combustion effect of the sharp angled part by the laser light is eliminated and the uniformly cut surface is formed in the thickness direction. The cutting with high dimensional accuracy is thus accomplished.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明はレーザ切断装置に関する。[Detailed description of the invention] [Technical field of invention] The present invention relates to a laser cutting device.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

従来レーザビームを集光照射するとともに酸素ガスを吹
き付けて鋼板を切断するととが実用化されている。この
加工において問題となる事項として切断形状が第1図の
ように例えば三角形(TA)を板材(W)から切シぬく
に当って(1)→(2)→(3)→(4)のようにレー
ザビームを走査すると一度切断した(1)→(2)の線
と2度目に変わる(3)→(4)の線の切断において、
第2図に示すように鋭角に変わる点(5)に近すいたと
きに切断される鋭角内側領域(D)の裏面に近い部分が
表面のレーザビーム切断用走査形状に忠実に切断されな
いで欠損部分(6)が形成される。
Conventionally, it has been put into practical use to cut a steel plate by condensing a laser beam and spraying oxygen gas. A problem in this processing is that the cutting shape is (1) → (2) → (3) → (4) when cutting a triangle (TA) from a plate material (W), as shown in Figure 1. When the laser beam is scanned, the line (1) → (2) is cut once, and the line (3) → (4) is cut a second time.
As shown in Figure 2, the part close to the back surface of the acute angle inner region (D) that is cut when approaching the point (5) that changes to an acute angle is not cut faithfully to the scanning shape for laser beam cutting on the front surface and is damaged. Part (6) is formed.

このととはレーザ集光ビームの焦点深度の浅いときに生
じ易く、レーザビームが十分到達しない深い部分で、レ
ーザビームのエネルギーが大きいときに発生し易い。第
2図に示すように、特に厚物の切断面において、レーザ
光制御可能な切断領域(9)と制御できない領域0(1
1が発生する。とのため厚い板を精度よく切断する場合
、特にθの値が小さな角度の加工には(4)→(3)、
(1)→(2)、(3)→(2)の方向に走査するなど
して鋭角の切断終端部ができないようにし、欠損部の生
じないような工夫をとらすことが必要である。とのよう
に板厚の増大につれて、表面から裏面まで垂直に切断す
るととけ技術的に困難な切断形状につきあたることもあ
り実用上切断条件の設定には吹き付はガスの種類を変え
酸素からg素などに切り換えたりあるいは、レーザのパ
ワーを低下させたりして工夫をこらしている。しかしな
がら、切断形状に応じて切断方向を規定して加工順序の
プログラムを作ることは非能率的であったり、また形状
を一筆貫き式に加工を続けることができない場合もあり
、このような場合には加工能率が低下する。ガスの種類
を変えても、装置が複雑化し、必ずしも満足か切断結果
は得られない。
This phenomenon tends to occur when the depth of focus of the focused laser beam is shallow, and it tends to occur when the energy of the laser beam is large in a deep part where the laser beam does not reach sufficiently. As shown in Figure 2, especially on the cutting surface of thick materials, there is a cutting area (9) that can be controlled by the laser beam and an area 0 (1) that cannot be controlled by the laser beam.
1 occurs. Therefore, when cutting thick plates with high precision, especially when machining angles where the value of θ is small, (4) → (3),
It is necessary to scan in the directions (1) -> (2) and (3) -> (2) to prevent the formation of sharp cutting ends and to take measures to prevent the formation of missing parts. As the plate thickness increases, cutting perpendicularly from the front surface to the back surface may result in a technically difficult cutting shape, so in practice, setting the cutting conditions requires changing the type of gas for spraying, from oxygen to g. Efforts are being made to reduce the power of the laser. However, creating a machining order program by specifying the cutting direction according to the cutting shape is inefficient, and there are also cases where it is not possible to continue machining the shape in one stroke. machining efficiency decreases. Even if the type of gas is changed, the equipment becomes complicated and the cutting results are not always satisfactory.

また従来加工物の表面からレーザビーム照射点の周囲に
冷却媒体を吹きつけて表面を冷却したり、またときには
吹き付はガスを吹き付は前に加熱して加工するなどの工
夫がされているが、これらはレーザビームが容μに直接
切断面に達することのできる表面部に近い部分壕での切
断精度を向上したりまたは少ないレーザビームで加工速
度を向上しようとするものであり、板厚がレーザビーム
の原点深度に対して厚くなった場合に下部の欠損を生ず
ることの防止には直接効果は不十分な手段である。特に
表面から冷却用の液体を吹きつけるとレーザビームの集
光部の散乱をきたすから加ニスビードの低下ともなり実
用化にはいくつかの難点がある。
Conventionally, methods have been used to cool the surface by spraying a cooling medium around the laser beam irradiation point from the surface of the workpiece, and sometimes by heating gas before spraying. However, these methods aim to improve the cutting accuracy in the trenches near the surface where the laser beam can directly reach the cutting surface, or to improve the machining speed with fewer laser beams. A direct effect is an insufficient means to prevent the occurrence of a defect in the lower part when the depth of the laser beam becomes thick relative to the origin depth of the laser beam. In particular, if a cooling liquid is sprayed from the surface, the laser beam will be scattered at the condensing part, resulting in a decrease in the varnish bead, and there are several difficulties in putting it into practical use.

〔発明の目的〕[Purpose of the invention]

本発明は切断形状による切断線幅の不均一性を解消する
ことのできる装置を提供することを目的とする。
SUMMARY OF THE INVENTION An object of the present invention is to provide an apparatus that can eliminate non-uniformity in cutting line width due to cutting shape.

〔発明の概要〕[Summary of the invention]

切断過程において被加工物の裏面に対し特に切断部の鋭
角部分に当る部分を集中的に冷却するように構成したも
のである。
In the cutting process, the back surface of the workpiece is specifically cooled intensively at the acute angle portion of the cut portion.

〔発明の実施例〕[Embodiments of the invention]

本発明?その実施例を示す図面に基いて説明する。第3
図において、Q】)はYAGレーザ発振器、 CO。
Invention? The embodiment will be explained based on the drawings. Third
In the figure, Q】) is a YAG laser oscillator, CO.

レーザ発振器その他から選ばれるレーザ発振器で、放出
される加工用のレーザ光(24は反射鏡Q31を介し、
集光レンズC24)を内股したノズル(ハ)に導かれる
ようになっている。(イ)は切断用の補助ガスである酸
素ガス、窒素ガス等の供給源で、供給管罰によりノズル
(ハ)内に上記補助ガスを供給している。供給管勾の中
途部には電磁バルブ(ハ)が設けられ、レーザ発振器Q
υの発振制御装置C!(ト)の制御信号に同期して開閉
するようになっている。(至)はXYテーブルで、上部
になるXテーブルもしくはYテーブル側にこのテーブル
より突出して被加工物(31)を保持する把持体C3B
が取り付けられている。被加工物el)は上記ノズル(
5)に対面する位置において、上記XYテーブル(7)
の走査によりローラ(ハ)上を滑動するようにたってい
る。(財)はXYテーブル(至)を走査させる駆動源で
パターン制御部(3句の指令に基いてXYテーブル(至
)へ駆動信号を出力している。パターン制御部(至)は
上記発振制御装f(21に遅延回路軸を介して接続され
ている。一方、被加工物c31)の裏面側にはとの裏面
を冷却する装置が設けられている。この冷却する装置は
高圧ガス源(37)と、高圧ガスを導入し冷却液(至)
を霧状にする機構を備えたタンク09と、タンク(至)
内に導入されている噴射管(40,冷却液(至)に浸漬
されている吸い上げ管0υおよびタンクC3翅に接続し
上記裏面に向けて設けられる噴射具(4のとで構成され
ている。噴射管曲の中途部には電磁バルブ(4りが設け
られている。この電磁バルブ(4渇はパターン制御部例
によシ開閉制御されるようになっている。
Laser oscillator A laser oscillator selected from other laser oscillators emits processing laser light (24 is transmitted through a reflecting mirror Q31,
It is designed to be guided to a nozzle (c) which has a condensing lens C24) inside. (A) is a supply source of oxygen gas, nitrogen gas, etc., which are auxiliary gases for cutting, and the auxiliary gases are supplied into the nozzle (C) through a supply pipe. A solenoid valve (c) is installed in the middle of the supply pipe, and a laser oscillator Q
υ oscillation control device C! It is designed to open and close in synchronization with the control signal (g). (To) is an XY table, and a gripping body C3B that protrudes from this table on the X table or Y table side that is the upper part and holds the workpiece (31)
is installed. The workpiece el) is passed through the above nozzle (
5), the above-mentioned XY table (7)
It stands as if sliding on the roller (c) by scanning. (Foundation) is a drive source that scans the XY table (to) and outputs a drive signal to the XY table (to) based on the pattern control section (three commands). On the other hand, a device for cooling the back surface of the workpiece c31 is provided on the back side of the workpiece f (21).This cooling device is connected to the high pressure gas source ( 37) and coolant (to) by introducing high pressure gas.
Tank 09 equipped with a mechanism to atomize water, and tank (to)
It consists of an injection pipe (40) introduced into the tank, a suction pipe (0υ) immersed in the cooling liquid, and an injection tool (4) connected to the wing of the tank C3 and provided facing the back side. A solenoid valve (4) is provided in the middle of the curve of the injection pipe. The solenoid valve (4) is controlled to open and close by means of a pattern control section.

上記の構成において、発振制御装置−からの指令でレー
ザ光(イ)が放出され、同時にノズル(ハ)内に補助ガ
スが導入されそれぞれ被加工物C31)の切断箇所に向
けて照射および噴射が行われる。また、遅延回路(イ)
の作用により被加工物CDに穴を穿設後、パターン制御
部(至)が作動して駆動源(34)に制御信号が送られ
る。これによfi、 XYテーブル(至)が制御信号に
基いて駆動される。XYテーブル■の駆動で所望のパタ
ーン切断が行われる過程で、被加工物01)の裏面側に
冷却液の霧状物が噴射され被加工物01)を冷却する。
In the above configuration, the laser beam (A) is emitted in response to a command from the oscillation control device, and at the same time, auxiliary gas is introduced into the nozzle (C), and irradiation and injection are performed toward the cutting location of the workpiece C31). It will be done. Also, the delay circuit (a)
After drilling a hole in the workpiece CD by the action of , the pattern control section (to) is activated and a control signal is sent to the drive source (34). As a result, fi, the XY table (to) is driven based on the control signal. In the process of cutting a desired pattern by driving the XY table (2), a mist of cooling liquid is sprayed onto the back side of the workpiece 01) to cool the workpiece 01).

なお、この冷却では上記パターンの鋭角部すなわち第1
図における区域(D)に近ずく切断線(3)→(4)上
の点15)に相当する部分の手前位置(8)から電磁バ
ルブ(49を開にして冷却液(至)の錫状物の噴射で冷
却するようにすることが好ましい。
In addition, in this cooling, the acute angle part of the above pattern, that is, the first
Open the electromagnetic valve (49) from the position (8) in front of the part corresponding to the point 15) on the cutting line (3) → (4) near the area (D) in the figure. Preferably, the cooling is performed by jetting material.

上記裏面側への冷却により、特に鋭角部での自己燃焼作
用がなくなり、正確にすることが可能になった0 女お、冷却は上記霧状物以外に直接水その他の冷却液を
ふきかけたり、あるいは冷気を噴射して行ってもよい。
Cooling on the back side eliminates the self-combustion effect, especially at sharp corners, making it possible to be more precise. Alternatively, cold air may be injected.

〔発明の効果〕〔Effect of the invention〕

切断部の熱容量の小さい鋭角部を過熱しないように冷却
して切断する構成にしたので、−笹書きの切断走査が可
能となシ、能率低下を招かず、また、切断線幅もパター
ン形状に関係なく均一にでき、正確な加工を実現するこ
とができた。
Since the cutting section is configured to cool and cut so as not to overheat the acute angle part with a small heat capacity, it is possible to cut and scan the bamboo strips without causing a decrease in efficiency, and the cutting line width can also be adjusted to the pattern shape. We were able to achieve uniform and accurate machining regardless of the problem.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は切断走査を示す説明図、第2図は従来の切断方
式における切断部の一部を示す断面図、第3図は本発明
の一実施例を示す構成図である。 01)・・・レーザ発振器    ff14)・・・集
光レンズ(ハ)・・・ノ ズル      00)・・
・XYテーブルC341・・・パターン制御部   (
支)・・・高圧ガス源c37)・・・冷却液    G
傷・・・噴射具代理人 弁理士  則 近 憲 佑 (ほか1名)
FIG. 1 is an explanatory diagram showing cutting scanning, FIG. 2 is a sectional view showing a part of a cutting section in a conventional cutting method, and FIG. 3 is a configuration diagram showing an embodiment of the present invention. 01)...Laser oscillator ff14)...Condensing lens (c)...Nozzle 00)...
・XY table C341...pattern control section (
Support)...High pressure gas source c37)...Cooling liquid G
Injuries: Agent for propellant, patent attorney Noriyuki Chika (and one other person)

Claims (2)

【特許請求の範囲】[Claims] (1)レーザ発振器から放出されだレーザ光を被加工物
の切断部に集束して照射する装置と上記レーザ光の照射
に伴なって上記切断部に補助ガスを供給する装置と上記
レーザ光と上記被加工物とを所望形状に応じて相対的に
走査させる装置とを備えるレーザ切断装置において、上
記相対的に走査する過程で上記被加工物の裏面側を冷却
する装置を付加したことを特徴とするレーザ切断装置。
(1) A device that focuses and irradiates laser light emitted from a laser oscillator onto the cutting portion of the workpiece, a device that supplies auxiliary gas to the cutting portion in conjunction with the irradiation of the laser beam, and the laser beam. A laser cutting device comprising a device for scanning the workpiece relative to the workpiece according to a desired shape, further comprising a device for cooling the back side of the workpiece during the relative scanning process. Laser cutting equipment.
(2)冷却する装置は切断部加工形状の鋭角部を集中的
に冷却するように制御されることを特徴とする特許請求
の範囲第1項記載のレーザ切断装置。
(2) The laser cutting device according to claim 1, wherein the cooling device is controlled so as to intensively cool the acute angle portion of the processed shape of the cut portion.
JP58080128A 1983-05-10 1983-05-10 Laser beam cutting device Pending JPS59206189A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58080128A JPS59206189A (en) 1983-05-10 1983-05-10 Laser beam cutting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58080128A JPS59206189A (en) 1983-05-10 1983-05-10 Laser beam cutting device

Publications (1)

Publication Number Publication Date
JPS59206189A true JPS59206189A (en) 1984-11-21

Family

ID=13709577

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58080128A Pending JPS59206189A (en) 1983-05-10 1983-05-10 Laser beam cutting device

Country Status (1)

Country Link
JP (1) JPS59206189A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2743318A1 (en) * 1996-01-04 1997-07-11 Litech Sarl LASER CUTTING METHOD AND DEVICE
US5968382A (en) * 1995-07-14 1999-10-19 Hitachi, Ltd. Laser cleavage cutting method and system
WO2003028941A1 (en) * 2001-10-03 2003-04-10 Scaggs Michael J Method and apparatus for assisting laser material processing
WO2003028943A1 (en) * 2001-10-03 2003-04-10 Lambda Physik Application Center, L.L.C. Method and apparatus for fine liquid spray assisted laser material processing
US7893386B2 (en) * 2003-11-14 2011-02-22 Hewlett-Packard Development Company, L.P. Laser micromachining and methods of same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5823590A (en) * 1981-08-01 1983-02-12 アマダ エンジニアリング アンド サ−ビス カンパニ− インコ−ポレ−テツド Laser processing method and processing head device used for said method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5823590A (en) * 1981-08-01 1983-02-12 アマダ エンジニアリング アンド サ−ビス カンパニ− インコ−ポレ−テツド Laser processing method and processing head device used for said method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5968382A (en) * 1995-07-14 1999-10-19 Hitachi, Ltd. Laser cleavage cutting method and system
FR2743318A1 (en) * 1996-01-04 1997-07-11 Litech Sarl LASER CUTTING METHOD AND DEVICE
WO1997025178A1 (en) * 1996-01-04 1997-07-17 Litech S.A.R.L. Laser cutting method and device
WO2003028941A1 (en) * 2001-10-03 2003-04-10 Scaggs Michael J Method and apparatus for assisting laser material processing
WO2003028943A1 (en) * 2001-10-03 2003-04-10 Lambda Physik Application Center, L.L.C. Method and apparatus for fine liquid spray assisted laser material processing
US7893386B2 (en) * 2003-11-14 2011-02-22 Hewlett-Packard Development Company, L.P. Laser micromachining and methods of same

Similar Documents

Publication Publication Date Title
US6316743B1 (en) Laser piercing method, laser processing nozzle, and laser cutting apparatus
US5767479A (en) Laser beam machining apparatus and corresponding method which employs a laser beam to pretreat and machine a workpiece
US4377735A (en) Laser working treatment process capable of controlling the form of heated portion of a steel material
JPS61123493A (en) Laser working device
CN111889895A (en) Jet-assisted multi-pulse-width laser ingot stripping method
CN108500468A (en) A kind of method of curved profile laser deburring
JP5873978B2 (en) Laser processing method and nozzle manufacturing method
JPS59206189A (en) Laser beam cutting device
JPH06285662A (en) Device and method for laser beam machining
JPH0947888A (en) Laser piercing method and device therefor
JP2002273588A (en) Laser cutting processing method
JPH0251963B2 (en)
WO1990014195A1 (en) Cut-machining method by laser beam
JPH04344887A (en) Laser beam machining method
GB2099349A (en) Laser working process
JP2875626B2 (en) Laser piercing method
JP2005118849A (en) Laser beam machining device
JPH08118053A (en) Workpiece cutting process
JP2618730B2 (en) Laser processing method and laser processing apparatus
JP2000317659A (en) Method and device for cutting by laser beam, and cutting method for graphite block when demolishing waste nuclear reactor
JP4186403B2 (en) Laser cutting method
JP2003251482A (en) Laser beam machining method and device
WO2003018276A1 (en) Method of processing brittle material and processing device
JP3394334B2 (en) Thick plate cutting device by laser heating
JP3526935B2 (en) Laser marking method and laser processing apparatus used for the method