JPS6037881B2 - パタ−ン欠陥検査装置 - Google Patents

パタ−ン欠陥検査装置

Info

Publication number
JPS6037881B2
JPS6037881B2 JP50017292A JP1729275A JPS6037881B2 JP S6037881 B2 JPS6037881 B2 JP S6037881B2 JP 50017292 A JP50017292 A JP 50017292A JP 1729275 A JP1729275 A JP 1729275A JP S6037881 B2 JPS6037881 B2 JP S6037881B2
Authority
JP
Japan
Prior art keywords
light
component
inspected
photodetector
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50017292A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5192646A (enrdf_load_stackoverflow
Inventor
雅人 中島
泰男 古川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50017292A priority Critical patent/JPS6037881B2/ja
Publication of JPS5192646A publication Critical patent/JPS5192646A/ja
Publication of JPS6037881B2 publication Critical patent/JPS6037881B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP50017292A 1975-02-10 1975-02-10 パタ−ン欠陥検査装置 Expired JPS6037881B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50017292A JPS6037881B2 (ja) 1975-02-10 1975-02-10 パタ−ン欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50017292A JPS6037881B2 (ja) 1975-02-10 1975-02-10 パタ−ン欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS5192646A JPS5192646A (enrdf_load_stackoverflow) 1976-08-13
JPS6037881B2 true JPS6037881B2 (ja) 1985-08-29

Family

ID=11939905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50017292A Expired JPS6037881B2 (ja) 1975-02-10 1975-02-10 パタ−ン欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS6037881B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5338344U (enrdf_load_stackoverflow) * 1976-09-08 1978-04-04

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5324298Y2 (enrdf_load_stackoverflow) * 1972-04-24 1978-06-22

Also Published As

Publication number Publication date
JPS5192646A (enrdf_load_stackoverflow) 1976-08-13

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