JPS6031259Y2 - 半導体熱処理用電気炉 - Google Patents

半導体熱処理用電気炉

Info

Publication number
JPS6031259Y2
JPS6031259Y2 JP2084579U JP2084579U JPS6031259Y2 JP S6031259 Y2 JPS6031259 Y2 JP S6031259Y2 JP 2084579 U JP2084579 U JP 2084579U JP 2084579 U JP2084579 U JP 2084579U JP S6031259 Y2 JPS6031259 Y2 JP S6031259Y2
Authority
JP
Japan
Prior art keywords
furnace
electric furnace
pedestal
metal pipe
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2084579U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55122342U (enExample
Inventor
晴男 平出
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP2084579U priority Critical patent/JPS6031259Y2/ja
Publication of JPS55122342U publication Critical patent/JPS55122342U/ja
Application granted granted Critical
Publication of JPS6031259Y2 publication Critical patent/JPS6031259Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
JP2084579U 1979-02-20 1979-02-20 半導体熱処理用電気炉 Expired JPS6031259Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2084579U JPS6031259Y2 (ja) 1979-02-20 1979-02-20 半導体熱処理用電気炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2084579U JPS6031259Y2 (ja) 1979-02-20 1979-02-20 半導体熱処理用電気炉

Publications (2)

Publication Number Publication Date
JPS55122342U JPS55122342U (enExample) 1980-08-30
JPS6031259Y2 true JPS6031259Y2 (ja) 1985-09-18

Family

ID=28852595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2084579U Expired JPS6031259Y2 (ja) 1979-02-20 1979-02-20 半導体熱処理用電気炉

Country Status (1)

Country Link
JP (1) JPS6031259Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5128515A (en) * 1990-05-21 1992-07-07 Tokyo Electron Sagami Limited Heating apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5128515A (en) * 1990-05-21 1992-07-07 Tokyo Electron Sagami Limited Heating apparatus

Also Published As

Publication number Publication date
JPS55122342U (enExample) 1980-08-30

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