JPS55122342U - - Google Patents
Info
- Publication number
- JPS55122342U JPS55122342U JP2084579U JP2084579U JPS55122342U JP S55122342 U JPS55122342 U JP S55122342U JP 2084579 U JP2084579 U JP 2084579U JP 2084579 U JP2084579 U JP 2084579U JP S55122342 U JPS55122342 U JP S55122342U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2084579U JPS6031259Y2 (ja) | 1979-02-20 | 1979-02-20 | 半導体熱処理用電気炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2084579U JPS6031259Y2 (ja) | 1979-02-20 | 1979-02-20 | 半導体熱処理用電気炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55122342U true JPS55122342U (enExample) | 1980-08-30 |
| JPS6031259Y2 JPS6031259Y2 (ja) | 1985-09-18 |
Family
ID=28852595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2084579U Expired JPS6031259Y2 (ja) | 1979-02-20 | 1979-02-20 | 半導体熱処理用電気炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6031259Y2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5128515A (en) * | 1990-05-21 | 1992-07-07 | Tokyo Electron Sagami Limited | Heating apparatus |
-
1979
- 1979-02-20 JP JP2084579U patent/JPS6031259Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6031259Y2 (ja) | 1985-09-18 |