JPS6027121A - 光ｃｖｄ装置 - Google Patents

光ｃｖｄ装置

Info

Publication number
JPS6027121A
JPS6027121A JP58134899A JP13489983A JPS6027121A JP S6027121 A JPS6027121 A JP S6027121A JP 58134899 A JP58134899 A JP 58134899A JP 13489983 A JP13489983 A JP 13489983A JP S6027121 A JPS6027121 A JP S6027121A
Authority
JP
Japan
Prior art keywords
light
reactive gas
less
substrate
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58134899A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0463536B2 (en:Method
Inventor
Shunpei Yamazaki
舜平 山崎
Mamoru Tashiro
田代　衛
Minoru Miyazaki
稔 宮崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP58134899A priority Critical patent/JPS6027121A/ja
Publication of JPS6027121A publication Critical patent/JPS6027121A/ja
Publication of JPH0463536B2 publication Critical patent/JPH0463536B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/3411—
    • H10P14/24—
    • H10P14/3442—
    • H10P14/3444—

Landscapes

  • Photovoltaic Devices (AREA)
JP58134899A 1983-07-22 1983-07-22 光ｃｖｄ装置 Granted JPS6027121A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58134899A JPS6027121A (ja) 1983-07-22 1983-07-22 光ｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58134899A JPS6027121A (ja) 1983-07-22 1983-07-22 光ｃｖｄ装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP16670992A Division JPH05190473A (ja) 1992-06-03 1992-06-03 光ｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS6027121A true JPS6027121A (ja) 1985-02-12
JPH0463536B2 JPH0463536B2 (en:Method) 1992-10-12

Family

ID=15139121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58134899A Granted JPS6027121A (ja) 1983-07-22 1983-07-22 光ｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPS6027121A (en:Method)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6216512A (ja) * 1985-07-15 1987-01-24 Mitsui Toatsu Chem Inc 半導体薄膜の製法
JPS6369976A (ja) * 1986-09-09 1988-03-30 Semiconductor Energy Lab Co Ltd 光ｃｖｄ装置
JPS63155682A (ja) * 1986-12-18 1988-06-28 Sanyo Electric Co Ltd 光起電力装置
JPS63146901U (en:Method) * 1987-03-18 1988-09-28

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5143718U (en:Method) * 1974-09-27 1976-03-31
JPS56124229A (en) * 1980-03-05 1981-09-29 Matsushita Electric Ind Co Ltd Manufacture of thin film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5143718U (en:Method) * 1974-09-27 1976-03-31
JPS56124229A (en) * 1980-03-05 1981-09-29 Matsushita Electric Ind Co Ltd Manufacture of thin film

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6216512A (ja) * 1985-07-15 1987-01-24 Mitsui Toatsu Chem Inc 半導体薄膜の製法
JPS6369976A (ja) * 1986-09-09 1988-03-30 Semiconductor Energy Lab Co Ltd 光ｃｖｄ装置
JPS63155682A (ja) * 1986-12-18 1988-06-28 Sanyo Electric Co Ltd 光起電力装置
JPS63146901U (en:Method) * 1987-03-18 1988-09-28

Also Published As

Publication number Publication date
JPH0463536B2 (en:Method) 1992-10-12

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