JPS60256290A - パタ−ン検査装置 - Google Patents
パタ−ン検査装置Info
- Publication number
- JPS60256290A JPS60256290A JP59112642A JP11264284A JPS60256290A JP S60256290 A JPS60256290 A JP S60256290A JP 59112642 A JP59112642 A JP 59112642A JP 11264284 A JP11264284 A JP 11264284A JP S60256290 A JPS60256290 A JP S60256290A
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- pattern
- normal direction
- value
- sequentially
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007689 inspection Methods 0.000 claims description 25
- 238000001514 detection method Methods 0.000 claims description 9
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 238000003708 edge detection Methods 0.000 claims description 6
- 239000000284 extract Substances 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 21
- 238000012360 testing method Methods 0.000 description 5
- 230000007261 regionalization Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000002522 swelling effect Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Image Processing (AREA)
- Character Discrimination (AREA)
- Closed-Circuit Television Systems (AREA)
- Image Analysis (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59112642A JPS60256290A (ja) | 1984-06-01 | 1984-06-01 | パタ−ン検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59112642A JPS60256290A (ja) | 1984-06-01 | 1984-06-01 | パタ−ン検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60256290A true JPS60256290A (ja) | 1985-12-17 |
| JPH0363876B2 JPH0363876B2 (enrdf_load_stackoverflow) | 1991-10-02 |
Family
ID=14591837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59112642A Granted JPS60256290A (ja) | 1984-06-01 | 1984-06-01 | パタ−ン検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60256290A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004500565A (ja) * | 2000-02-03 | 2004-01-08 | アプライド マテリアルズ インコーポレイテッド | 直線の欠陥検出 |
-
1984
- 1984-06-01 JP JP59112642A patent/JPS60256290A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004500565A (ja) * | 2000-02-03 | 2004-01-08 | アプライド マテリアルズ インコーポレイテッド | 直線の欠陥検出 |
| JP4943616B2 (ja) * | 2000-02-03 | 2012-05-30 | アプライド マテリアルズ インコーポレイテッド | 直線の欠陥検出 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0363876B2 (enrdf_load_stackoverflow) | 1991-10-02 |
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