JPS60251798A - Piezoelectric vibrator - Google Patents
Piezoelectric vibratorInfo
- Publication number
- JPS60251798A JPS60251798A JP10897284A JP10897284A JPS60251798A JP S60251798 A JPS60251798 A JP S60251798A JP 10897284 A JP10897284 A JP 10897284A JP 10897284 A JP10897284 A JP 10897284A JP S60251798 A JPS60251798 A JP S60251798A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- piezoelectric plate
- electrode
- small hole
- ultrasonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000149 penetrating effect Effects 0.000 claims abstract 3
- 239000000523 sample Substances 0.000 claims description 18
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract description 8
- 230000010287 polarization Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000002604 ultrasonography Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
Abstract
Description
【発明の詳細な説明】 本発明は超音波探触子用の圧電振動子に関する。[Detailed description of the invention] The present invention relates to a piezoelectric vibrator for an ultrasonic probe.
一般に、超音波を利用し被検体の異常箇所及びその状態
を検出する装置として探傷装置を含む超音波診断装置が
知られている。そして、この診断装置（・こは、通常被
検体に接して超音波の送受波部となる超音波探触子が配
備されている。この超音波探触子は電気信号を超音波信
号に変換して被検体※こ放射し、その反射波を再び電気
信号に変換するもので、良好な変換効率を得るため、こ
れらの変換素子として通常電気−機械結合係数が比較的
大きな圧電材を用いた圧電振動子が使用される。2. Description of the Related Art Generally, an ultrasonic diagnostic apparatus including a flaw detector is known as a device that uses ultrasonic waves to detect an abnormal location and its condition in a subject. This diagnostic equipment (this is usually equipped with an ultrasound probe that comes into contact with the subject and serves as the transmitter/receiver of ultrasound waves. This ultrasound probe converts electrical signals into ultrasound signals. The device emits the signal from the object* and converts the reflected wave back into an electrical signal.In order to obtain good conversion efficiency, piezoelectric materials with a relatively large electro-mechanical coupling coefficient are usually used as these conversion elements. A piezoelectric vibrator is used.
第１図（ａ）は電気−機械結合係数が大きな圧電材とし
て圧電セラミックスを使用した超音波探触子用のリート
線を除去した圧電振動子の平面図であり、第１図（ｂ）
は同図（ａ）のＸ −Ｘ’断面図である。即ち、この圧
電振動子は、例えば円板形状に加工された圧電板１の表
裏両生面に前記圧電板１を励振して厚み振動による超音
波を発生させるための電極２・３を形成し、裏面に形成
された電極３の一部から側面を介して圧電板１の表面に
通称折り返し電極４と呼ばれる電極を施して、第１図（
ｃ）の断面図に示したように圧電板１の表面即ち同一主
面から前記電極２・３と接続する一対のリード線５・６
を導出したものである。そして、前記リード線５・６の
導出面ではない裏面の電極３側をアース電位の共通電極
として、このアース電位の電極面に音響整合層を貼付し
たり、又エポキシ樹脂などで薄いコーティングを施し、
この裏面を被検体に対する超音波送受波面として探触子
となすものである。尚、圧電板１の同一面から一対のり
一ト線５・６を導出したが、この理由は裏面が超音波放
射面となることに加え、例えば圧電板１の両面からリー
ド線５・６を、それぞれ導出した場合には探触子を製作
する際、放射面に対し上述した音響整合層及びコーティ
ングの作業に前記リード線５もしくは６が障害となるた
めである。このため、この種の圧電振動子においてはほ
とんどの場合上記の如く圧電板１の表面には放射面から
折り返し電極４が形成される。Figure 1(a) is a plan view of a piezoelectric vibrator with the Riet wire removed for an ultrasonic probe that uses piezoelectric ceramics as a piezoelectric material with a large electro-mechanical coupling coefficient, and Figure 1(b)
is a sectional view taken along line X-X' in FIG. That is, in this piezoelectric vibrator, electrodes 2 and 3 are formed on both the front and back surfaces of a piezoelectric plate 1 processed into a disk shape, for example, for exciting the piezoelectric plate 1 and generating ultrasonic waves due to thickness vibration. An electrode commonly called a folded electrode 4 is applied to the surface of the piezoelectric plate 1 from a part of the electrode 3 formed on the back surface through the side surface, as shown in FIG.
As shown in the cross-sectional view of c), a pair of lead wires 5 and 6 are connected to the electrodes 2 and 3 from the surface of the piezoelectric plate 1, that is, from the same main surface.
is derived. Then, the electrode 3 side on the back side, which is not the lead-out surface of the lead wires 5 and 6, is used as a common electrode at ground potential, and an acoustic matching layer is pasted on the electrode surface at ground potential, or a thin coating is applied with epoxy resin or the like. ,
This back surface serves as a probe as an ultrasonic wave transmitting/receiving surface for the subject. The pair of lead wires 5 and 6 were derived from the same side of the piezoelectric plate 1, but the reason for this is that the back side serves as the ultrasonic radiation surface, and for example, the lead wires 5 and 6 are drawn from both sides of the piezoelectric plate 1. This is because if the lead wires 5 or 6 are led out, the lead wires 5 or 6 will become an obstacle to the work of applying the above-described acoustic matching layer and coating to the radiation surface when manufacturing the probe. For this reason, in this type of piezoelectric vibrator, in most cases, the electrode 4 is formed on the surface of the piezoelectric plate 1 from the radiation surface as described above.
ところで、圧電板１として上記圧電セラミックス等の多
結晶体からなる強誘電体を使用する場合には、例えば電
極形成後、分極処理を施し正常な圧電作用を呈するよう
にしなければならない。このため、上記の如く、折り返
し電極４が形成された圧電振動子においては、この折り
返し電極４近傍部にて分極の乱れが発生し易くなる。そ
して、この分極の乱れは同一の分極電圧の印加条件下で
は圧電板１の厚みｔが大きい程発生し易い。又、この圧
電振動子は厚み振動姿態であるため、その発生周波数は
圧電板１の厚みｔに逆比例する。従って、発生周波数を
低くするには圧電板１の厚みｔを大きくしなければなら
ない。このため、この場合には大きな分極電圧を圧電板
１に印加しなければならないので、折り返し電極４とこ
れとは異なる極性の表面の電極２との間にて分極電圧の
リークが発生し易くなる。このため、両者電極２と４と
の電極間リークを防止すべく、両者間のギャップＷを大
きくする必要がある。By the way, when a ferroelectric material made of polycrystalline material such as the piezoelectric ceramics described above is used as the piezoelectric plate 1, it is necessary to perform a polarization treatment after forming the electrodes so as to exhibit a normal piezoelectric effect. Therefore, as described above, in the piezoelectric vibrator in which the folded electrode 4 is formed, disturbance of polarization tends to occur in the vicinity of the folded electrode 4. Under the same polarization voltage application conditions, the larger the thickness t of the piezoelectric plate 1, the more likely this polarization disturbance occurs. Furthermore, since this piezoelectric vibrator has a thickness vibration mode, its generated frequency is inversely proportional to the thickness t of the piezoelectric plate 1. Therefore, in order to lower the generated frequency, the thickness t of the piezoelectric plate 1 must be increased. Therefore, in this case, a large polarization voltage must be applied to the piezoelectric plate 1, which tends to cause leakage of polarization voltage between the folded electrode 4 and the electrode 2 on the surface of a different polarity. . Therefore, in order to prevent leakage between the electrodes 2 and 4, it is necessary to increase the gap W between the electrodes 2 and 4.
しかし、このように両者電極間のギャップＷを大きくす
ることは、圧電板１の厚み振動を励起するには本来不必
要な折り返し電極４を形成することに加えて、圧電板１
に対して折り返し電極部分即ち正常な厚み振動を励起し
ない部分の占有面積を大きくし、圧電板１の有効振動面
積を小さくすることになる。尚、このことは、例えば圧
電板１を極力小さくしようとした場合においても同様、
折り返し電極部分の圧電板１に対する占有面積が大きく
なるので圧電板１の有効振動面積比を小さくする。However, increasing the gap W between the two electrodes in this way not only creates folded electrodes 4 that are unnecessary in order to excite the thickness vibration of the piezoelectric plate 1, but also causes the piezoelectric plate 1 to
In contrast, the area occupied by the folded electrode portion, that is, the portion that does not excite normal thickness vibration, is increased, and the effective vibration area of the piezoelectric plate 1 is reduced. This also applies, for example, when trying to make the piezoelectric plate 1 as small as possible.
Since the area occupied by the folded electrode portion with respect to the piezoelectric plate 1 becomes large, the effective vibration area ratio of the piezoelectric plate 1 is reduced.
そして、このように厚み振動を励起しない部分の圧電板
１に対する占有面積が大きくなることは、この圧電振動
子を使用した超音波探触子から放射される超音波の音場
に非対称な不整部分を生じせしめることになる。The fact that the area occupied by the piezoelectric plate 1 of the portion that does not excite thickness vibrations increases in this way is due to an asymmetrical irregularity in the sound field of the ultrasonic waves emitted from the ultrasonic probe using this piezoelectric vibrator. This will give rise to
従って、この場合には、この超音波探触子から放射され
る超音波ビームの対称性等を劣下させ、その結果として
超音波音場から得られる情報の品質劣下を招く原因とな
る。Therefore, in this case, the symmetry etc. of the ultrasonic beam emitted from this ultrasonic probe deteriorates, resulting in a deterioration in the quality of information obtained from the ultrasonic sound field.
本発明は、上記事情に鑑みてなされたもので、超音波音
場に非対称な不整部分が発生しにくく、超音波のビーム
特性が良好で品質の高い情報が得られる超音波探触子用
の圧電振動子を提供することを目的とし、その特徴とす
るところは圧電板に前記圧電板を貫通する小孔を設は前
記小孔を通して他方の而Ｑこ形成された電極を一方の面
側に引き出した点にある。The present invention has been made in view of the above circumstances, and is an ultrasonic probe for use in which asymmetrical irregularities are less likely to occur in the ultrasonic sound field, the beam characteristics of the ultrasonic waves are good, and high quality information can be obtained. The purpose of the present invention is to provide a piezoelectric vibrator, and its feature is that a piezoelectric plate is provided with a small hole that penetrates the piezoelectric plate, and an electrode formed on the other side is passed through the small hole on one side of the piezoelectric plate. It's in the point you brought it out.
以下、本発明の一実施例を第２図により説明する。An embodiment of the present invention will be described below with reference to FIG.
第２図（ａ）は本発明の超音波探触子用のリード線を除
去した圧電振動子の平面図であり、同図（ｂ）は同図（
ａ）のＹ −Ｙ’断面図である。この圧電振動子は圧電
材として前述したような電気−機械結合係数が比較的大
きな圧電セラミックスを使用し、これを円板形状に加工
して圧電板７としたものである。FIG. 2(a) is a plan view of a piezoelectric vibrator for an ultrasonic probe of the present invention from which lead wires have been removed, and FIG.
It is a YY' sectional view of a). This piezoelectric vibrator uses piezoelectric ceramics having a relatively large electro-mechanical coupling coefficient as described above as the piezoelectric material, and processes this into a disk shape to form the piezoelectric plate 7.
この圧電板７の表面Ｑこは前記圧電板７と同心円状の小
円となる中央部を除く全面に表面電極８が形成され、そ
の表面には中心部を除く全面に裏面電極９が形成されて
、圧電板７の中心部に前記圧電板７を貫通し、この圧電
板板面に比し極めて小さな小孔１０が設けられているも
のである。そして、第２図（ｃ）の断面図に示したよう
に、前記小孔１０を通して裏面電極９を、例えば導電性
接着剤１１ヲこよりリード線１２と接続して表面側に引
き出し、前記表面電極８に前記同様導電性接着剤１１に
より接続リート線１３を施して、前記圧電板７を励起す
る一対のリード線を形成するものである。On the surface Q of this piezoelectric plate 7, a front electrode 8 is formed on the entire surface except for the central part which forms a small circle concentric with the piezoelectric plate 7, and a back electrode 9 is formed on the entire surface except for the central part. A small hole 10 is provided in the center of the piezoelectric plate 7, passing through the piezoelectric plate 7 and being extremely small compared to the surface of the piezoelectric plate. Then, as shown in the cross-sectional view of FIG. 2(c), the back electrode 9 is connected to the lead wire 12 through the conductive adhesive 11 through the small hole 10 and pulled out to the front side, and the front electrode Connecting lead wires 13 are applied to 8 using conductive adhesive 11 in the same manner as described above to form a pair of lead wires for exciting the piezoelectric plate 7.
従って、上記構成の圧電振動子は小孔１０を通して裏面
電極９から一方のリード線１２を導出したので、従来の
ように折り返し電極を形成する必要がない。又、これに
加えて、前記圧電板７に分極電圧を印加する際、分極電
圧のリークを防止するため、圧電板７にギャップを設け
る必要もない。更に、前記小孔１０を通してリード線１
２を表面側に引き出すことは、超音波探触子を製作する
際の音響整合層の貼付及びコーティング作業の障害とな
らないばかりでなく、圧電板７の厚み振動を励起しない
部分は前記小孔部のみとなる。従って、この小孔１０を
小さくすればする程、小孔部の圧電板７に対する占有面
積は小さくなり、この圧電板７の有効振動面積を大きく
する。このため、この小孔１０を裏面電極９から表面側
に引き出せる程度に小さくすることにより、これより放
射される超音波の音場に不整部分を極力少なくできる。Therefore, in the piezoelectric vibrator having the above structure, one lead wire 12 is led out from the back electrode 9 through the small hole 10, so there is no need to form a folded electrode as in the conventional case. In addition, when applying a polarization voltage to the piezoelectric plate 7, there is no need to provide a gap in the piezoelectric plate 7 in order to prevent leakage of the polarization voltage. Furthermore, the lead wire 1 is passed through the small hole 10.
2 toward the surface side not only does not interfere with the attachment and coating work of the acoustic matching layer when manufacturing an ultrasonic probe, but also the portion of the piezoelectric plate 7 that does not excite thickness vibration is the small hole portion. Only. Therefore, the smaller the small hole 10 is, the smaller the area occupied by the small hole with respect to the piezoelectric plate 7 is, and the larger the effective vibration area of the piezoelectric plate 7 is. Therefore, by making the small hole 10 small enough to be pulled out from the back electrode 9 toward the front surface, it is possible to minimize irregularities in the sound field of the ultrasonic waves radiated from the small hole 10.
従って、この圧電振動子を使用した超音波探触子は超音
波ビームの対称性が優れたものとなり、その結果、超音
波音場から得られる情報の品質を向上できる。Therefore, the ultrasonic probe using this piezoelectric vibrator has excellent symmetry of the ultrasonic beam, and as a result, the quality of information obtained from the ultrasonic sound field can be improved.
又、との実施例においては、小孔１０を圧電板７の中心
部に設けたので、表面及び裏面の電極８・９は、その中
心に対して対称性を有する。このため、超音波探触子と
して、これより放射される超音波ビームも対称性を有す
ることになり、みだれが小さく良好な超音波音場を得る
ことができる。Furthermore, in the embodiment described in and above, since the small hole 10 is provided in the center of the piezoelectric plate 7, the electrodes 8 and 9 on the front and back surfaces have symmetry with respect to the center. Therefore, the ultrasonic beam emitted from the ultrasonic probe also has symmetry, and a good ultrasonic sound field with small droop can be obtained.
ちなみに、本発明者が、この圧電振動子を例４えば発生
周波数５ＭＨ２，直径１３咽の圧電板に直径０．５ ｒ
＋Ｉ＋ｉの小孔を設けて裏面電極８からリード線を引き
出した圧電振動子として、図示しない音響整合層等を付
加して超音波探触子を製作し実験したところこの超音波
探触子の放射面の近傍でも水中の音場は対称性を示し、
また感度も通常のものと全く変わらないことが確認され
た。By the way, the present inventor has installed this piezoelectric vibrator, for example, on a piezoelectric plate with a generation frequency of 5 MH2 and a diameter of 13 mm and a diameter of 0.5 r.
An ultrasonic probe was fabricated as a piezoelectric vibrator with a small hole of +I+i and a lead wire pulled out from the back electrode 8, and an acoustic matching layer (not shown) was added, and an experiment was conducted. The underwater sound field shows symmetry even near the surface,
It was also confirmed that the sensitivity was no different from normal ones.
尚、上記実験例の説明にあっては、圧電板７の中心部に
小孔１０を設は導電性接着剤を介して裏面電極９からリ
ード線１２を引き出したが、例えばこの小孔１０にスル
ーホール電極を施し、これよりリード線１２を引き出し
うろことはいうまでもない。In the explanation of the above experimental example, a small hole 10 was provided in the center of the piezoelectric plate 7 and the lead wire 12 was drawn out from the back electrode 9 via a conductive adhesive. Needless to say, a through-hole electrode is provided from which the lead wire 12 is drawn out.
又圧電板７を円板形状の圧電セラミックス材として説明
したが、本発明は圧電板の材料及び形状に左右されるこ
となく、その主旨を逸脱しない範囲内で適宜適用できる
ものである。Furthermore, although the piezoelectric plate 7 has been described as a disk-shaped piezoelectric ceramic material, the present invention is not influenced by the material and shape of the piezoelectric plate, and can be applied as appropriate within the scope of the invention.
以上説明したよう※こ、本発明は圧電板に前記圧電板を
實通ずる小孔を設け、前記小孔を通して他方の面に形成
された電極を一方の面側に引き出したので、超音波音場
に不整部分が発生しくこくく超音波のビーム特性が良好
で、品質の高し・情報力；得られる超音波探触子用の圧
電振動子を提供できる。As explained above, the present invention provides a piezoelectric plate with a small hole that passes through the piezoelectric plate, and the electrode formed on the other surface is drawn out to one surface through the small hole, so that the ultrasonic sound field It is possible to provide a piezoelectric vibrator for an ultrasonic probe that has good ultrasonic beam characteristics without the occurrence of irregularities, and has high quality and information power.
第１図（ａ）は従来の超音波探触子用の圧電振動子のリ
ート部を除く平面図、同図（ｂ）は同図（ａ）のＸ−Ｘ
′断面図、同図（Ｃ）は圧電振動子の断面図である。
第２図（ａ）は本発明の超音波探触子用の圧電振動子の
リート部を除く平面図、同図（ｂ）は同図（ａ）のＹ−
Ｙ’断面図、同図（Ｃ）は圧電振動子の断面図である。
１・圧電板、２・３・・・電極、４・折り返し電極、５
・６・・リード線、７ 圧電板、８ ・表面電極、９
裏面電極、】Ｏ・小孔、１１・・・導電性接着剤、１２
・１３ リート線。
第１図（ａ）
第２図（ａ）
第２図（ｂ）
第２図 （Ｃ）Figure 1 (a) is a plan view of a conventional piezoelectric transducer for an ultrasonic probe, excluding the leet part, and Figure 1 (b) is a plane view taken along the line X-X in Figure 1 (a).
'Cross-sectional view, the same figure (C) is a cross-sectional view of the piezoelectric vibrator. FIG. 2(a) is a plan view of the piezoelectric vibrator for an ultrasonic probe of the present invention excluding the leet part, and FIG.
Y' cross-sectional view, and FIG. 3(C) is a cross-sectional view of the piezoelectric vibrator. 1. Piezoelectric plate, 2.3... Electrode, 4. Folded electrode, 5
・6... Lead wire, 7 Piezoelectric plate, 8 ・Surface electrode, 9
Back electrode, ]O/small hole, 11... conductive adhesive, 12
・13 Riet line. Figure 1 (a) Figure 2 (a) Figure 2 (b) Figure 2 (C)
Claims (1)
る小孔を設け、前記小孔を通して他方の主面に形成され
た電極を一方の主面側に引き出したことを特徴とする超
音波探触子用圧電振動子。A piezoelectric plate having electrodes formed on both sides thereof is provided with a small hole penetrating the piezoelectric plate, and the electrode formed on the other main surface is drawn out to one main surface side through the small hole. Piezoelectric vibrator for sonic probe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10897284A JPS60251798A (en) | 1984-05-29 | 1984-05-29 | Piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10897284A JPS60251798A (en) | 1984-05-29 | 1984-05-29 | Piezoelectric vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60251798A true JPS60251798A (en) | 1985-12-12 |
| JPH0323040B2 JPH0323040B2 (en) | 1991-03-28 |
Family
ID=14498316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10897284A Granted JPS60251798A (en) | 1984-05-29 | 1984-05-29 | Piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60251798A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6359499U (en) * | 1986-10-06 | 1988-04-20 | ||
| JPH0564292A (en) * | 1991-08-30 | 1993-03-12 | Shimadzu Corp | Ultrasonic oscillator |
| JP2009027284A (en) * | 2007-07-17 | 2009-02-05 | Nippon Ceramic Co Ltd | Piezoelectric ceramic element assembly |
| JP2009206789A (en) * | 2008-02-27 | 2009-09-10 | Terumo Corp | Ultrasound probe and its manufacturing method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4974179U (en) * | 1972-10-17 | 1974-06-27 |
-
1984
- 1984-05-29 JP JP10897284A patent/JPS60251798A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4974179U (en) * | 1972-10-17 | 1974-06-27 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6359499U (en) * | 1986-10-06 | 1988-04-20 | ||
| JPH0564292A (en) * | 1991-08-30 | 1993-03-12 | Shimadzu Corp | Ultrasonic oscillator |
| JP2009027284A (en) * | 2007-07-17 | 2009-02-05 | Nippon Ceramic Co Ltd | Piezoelectric ceramic element assembly |
| JP2009206789A (en) * | 2008-02-27 | 2009-09-10 | Terumo Corp | Ultrasound probe and its manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0323040B2 (en) | 1991-03-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |