JPS5991796A - Ultrasonic wave probe - Google Patents

Ultrasonic wave probe

Info

Publication number
JPS5991796A
JPS5991796A JP57202650A JP20265082A JPS5991796A JP S5991796 A JPS5991796 A JP S5991796A JP 57202650 A JP57202650 A JP 57202650A JP 20265082 A JP20265082 A JP 20265082A JP S5991796 A JPS5991796 A JP S5991796A
Authority
JP
Japan
Prior art keywords
ultrasonic wave
oscillator
ultrasonic
electric load
series
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57202650A
Other languages
Japanese (ja)
Other versions
JPH0129355B2 (en
Inventor
Shiyuuzou Wakou
修三 和高
Fumio Takeda
武田 文雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP57202650A priority Critical patent/JPS5991796A/en
Publication of JPS5991796A publication Critical patent/JPS5991796A/en
Publication of JPH0129355B2 publication Critical patent/JPH0129355B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

PURPOSE:To improve the resolution and the side lobe level by arraying plural ultrasonic wave oscillators to be superposed and facing sound radiating surfaces to make the direction of an electric field impressed to the oscillators irregular and electricaly loading in series with each oscillator. CONSTITUTION:The plural ultrasonic wave oscillators 1 are by facing the sound radiating surfaces 2. Leads are connected as is in Figure and changed along the electric field direction Barker series. In the ultrasonic wave probe, when the ultrasonic wave oscillator 1 having a large electromechanical coupling coefficient is used, a voltage generated by the excited ultrasonic wave from the oscillator 1 propagated in the oscillator 1 excites again the ultrasonic wave. The electric load 7 is provided in series to each oscillator 1. Since said generated voltage depends on the electric load 7, the effect of the ultrasonic wave excited again is controlled by adjusting the electric load 7. That is, the waveform of the ultrasonic wave transmitted into the body to be inspected is optimized while observing the change in the resolution and side lobe by adjusting the electric load 7 and controlling the effect of the ultrasonic wave excited again.

Description

【発明の詳細な説明】 この発明は、パルス圧縮技術を適用した非破壊検査や医
療診断に用いられる超音波探触子に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ultrasonic probe that applies pulse compression technology and is used for non-destructive testing and medical diagnosis.

従来のこの樵の超音波探触子は2例えば、第1図に示す
ように構成されていた。(1)は超音波振動子であり、
音響放射面(2)を対向させ複数個積重ねである。(3
)は超音波振動子(1)間を電気的に絶縁するだめの絶
縁膜であり厚さは波長に比べ十分薄い。
The conventional ultrasonic probe of this woodcutter was constructed as shown in FIG. 1, for example. (1) is an ultrasonic vibrator,
A plurality of them are stacked with their acoustic radiation surfaces (2) facing each other. (3
) is an insulating film for electrically insulating between the ultrasonic transducers (1), and its thickness is sufficiently thin compared to the wavelength.

(4)はリード線であシ1例えば第1図に示すように結
線し、各超音波振動子(1)に印加される電界方向が、
i、+、−1.1の疑似不規則信号の1つであるBar
ker系列に沿って変わるようにしである。
(4) is a lead wire connected to the wire 1 as shown in FIG. 1, and the direction of the electric field applied to each ultrasonic transducer (1) is
Bar, one of the pseudo-irregular signals of i, +, -1.1
It is arranged so that it changes along the ker series.

(5)はバッキング材であJ、(6)は音響インピーダ
ンス変成層である。
(5) is the backing material J, and (6) is the acoustic impedance modified layer.

さて、パルス圧縮技術を適用した検査では、被検材内へ
送波される超音波は2例えば、第2図に示すような波形
であることが賛求される。
Now, in an inspection to which pulse compression technology is applied, it is recommended that the ultrasonic waves transmitted into the material to be inspected have a waveform as shown in FIG. 2, for example.

第2図は、正弦波を、上記Barker系列で変調した
波形であシ、振幅一定9位相が0.πで変調されている
FIG. 2 shows a waveform in which a sine wave is modulated by the Barker sequence described above, and the amplitude is constant and the phase is 0. It is modulated by π.

従来のこの種の超音波探触子において、電気音響相互作
用が弱い場合、すなわち、電気機械結合係数が小さい超
音波振動子(1)を用いた場合には。
In a conventional ultrasonic probe of this type, when the electroacoustic interaction is weak, that is, when an ultrasonic transducer (1) with a small electromechanical coupling coefficient is used.

各超音波振動子(1)は厚さが半波長となる共振周波数
の超音波を強く励振し、丑だ、各超音波振動子に印加す
る電界方向を第1図に示すようにBarker系列に沿
って変わるようにしているから、被検材内へ送波される
超音波の波形は第2図に示すものとなる。
Each ultrasonic transducer (1) strongly excites ultrasonic waves with a resonant frequency whose thickness is half a wavelength, and the direction of the electric field applied to each ultrasonic transducer is arranged in the Barker series as shown in Figure 1. The waveform of the ultrasonic waves transmitted into the specimen material is as shown in FIG.

しかし、電気機械結合係数が大きい超音波振動子(1)
を用いた場合、超音波振動子(1)よシ励振された超音
波は、超音波振動子(1)内を伝ばんするとき。
However, an ultrasonic transducer (1) with a large electromechanical coupling coefficient
When using the ultrasonic transducer (1), the ultrasonic waves excited by the ultrasonic transducer (1) propagate within the ultrasonic transducer (1).

電圧を発生し2発生された電圧は再度超音波を励振する
。すなわち、電気音響相互作用が大きい場合、従来のこ
の種の超音波探触子では、上述の過程より励振された超
音波による影響のため、被検材内へ送波される超音波の
波形は第2図に示したものからずれ、このため2分解能
の劣化やサイドローブレベルが大きくなるなどの欠点が
あった。
A voltage is generated, and the generated voltage excites ultrasonic waves again. In other words, when the electroacoustic interaction is large, in conventional ultrasonic probes of this type, the waveform of the ultrasonic waves transmitted into the specimen material becomes It deviates from that shown in FIG. 2, and as a result, there are drawbacks such as deterioration of two resolution and increase in sidelobe level.

この発明は、このような欠点を改善するため。This invention aims to improve these drawbacks.

複数個の超音波振動子(1)を、音響放射面(2)どう
しを対向させ積重ねて配列し、各超音波振動子(1)に
印加する電界方向を不規則にするとともに、上記電界の
振幅および位相を、各超音波振動子(1)に直列に設け
た電気負荷によシ調整できるようにしたものであシ、以
下第2図に示す一実施例を用いて詳細に説明する。
A plurality of ultrasonic transducers (1) are stacked and arranged with their acoustic radiation surfaces (2) facing each other, and the direction of the electric field applied to each ultrasonic transducer (1) is irregular, and the electric field is The amplitude and phase can be adjusted by an electric load provided in series with each ultrasonic transducer (1), and will be described in detail below using an example shown in FIG. 2.

第2図は、この発明に係る超音波探触子の一実施例であ
る、(11は超音波振動子であり、音響放射面(2)を
対向させ複数個積重ねている。(3)は従来と同様の絶
縁膜である。(4)はリード線であシ、第1図と同様に
結線し、電界方向13arkθr系列にそって変えてい
る。(5)は従来と同様のバッキング材。
FIG. 2 shows an embodiment of the ultrasonic probe according to the present invention. (11 is an ultrasonic transducer, and a plurality of ultrasonic transducers are stacked with their acoustic radiation surfaces (2) facing each other. (3) is The insulating film is the same as the conventional one. (4) is a lead wire, connected in the same way as in FIG. 1, and the electric field direction is changed along the 13arkθr series. (5) is the same backing material as the conventional one.

(6)は従来と同様の音響インピーダンス変成層である
。(7)は各超音波振動子(1)ごとに直列に設けた電
気負荷であり、調整不能となるようにしである。
(6) is an acoustic impedance transformation layer similar to the conventional one. (7) is an electrical load provided in series for each ultrasonic transducer (1), and is designed to be unadjustable.

この発明に係る超音波探触子において、電気機械結合係
数が大きい超音波振動子(1)を用いた場合。
In the ultrasonic probe according to the present invention, when an ultrasonic transducer (1) having a large electromechanical coupling coefficient is used.

従来と同様に、超音波振動子(1)によp励振された超
音波が超音波振動子(1)内を伝ばんするとき、電圧が
発生する。発生した電圧は再度超音波を励振する。しか
し、この発明に係る超音波探触子では。
As in the conventional case, when the ultrasonic wave excited by the ultrasonic transducer (1) propagates inside the ultrasonic transducer (1), a voltage is generated. The generated voltage excites the ultrasonic waves again. However, in the ultrasonic probe according to the present invention.

従来と異なシ、各超音波振動子(1)ごとに直列に電気
負荷(7)を設けている。上記過程により発生する電圧
は、電気負荷(7)に依存するため、この発明に係る超
音波探触子では、従来と異なシ、再度励振される超音波
の影響を電気負荷(7)を調整することにより制御でき
る。すなわち、この発明に係る超音波探触子では、電気
負荷(7)を調整し、再励振される超音波の影響を制御
することにより、被検材内へ送波される超音波の波形を
2分解能、サイドローブ等の変化をみながら最適なもの
とすることができる利点がある。
Unlike the conventional method, an electric load (7) is provided in series with each ultrasonic transducer (1). Since the voltage generated by the above process depends on the electric load (7), in the ultrasonic probe according to the present invention, the electric load (7) is adjusted to compensate for the influence of the re-excited ultrasonic waves, which is different from the conventional one. It can be controlled by That is, in the ultrasonic probe according to the present invention, by adjusting the electric load (7) and controlling the influence of the re-excited ultrasonic waves, the waveform of the ultrasonic waves transmitted into the specimen material can be changed. There is an advantage in that it can be optimized while checking changes in resolution, side lobes, etc.

なお2以上は第2図に示す一実施例の場合について説明
したが、この発明はこれに限らず、電気負荷(7)は更
に並列に設けてもよい。
Note that, although the above description has been made regarding the case of the embodiment shown in FIG. 2, the present invention is not limited to this, and the electric loads (7) may be further provided in parallel.

また、超音波振動子(1)に印加する電界方向は。Also, the direction of the electric field applied to the ultrasonic transducer (1) is:

他のBarlcer系列やM系列などの疑似不規則信号
に沿って変えてもよい。
It may also be changed along with other pseudo-irregular signals such as Barlcer sequences and M sequences.

以上のように、この発明に係る超音波探触子では、複数
個の超音波振動子(1)を、音響放射面(2)どうしを
対向させ積重ねて配列し、各超音波振動子(1)に印加
する電界方向を不規則にするとともに。
As described above, in the ultrasonic probe according to the present invention, a plurality of ultrasonic transducers (1) are stacked and arranged with their acoustic radiation surfaces (2) facing each other, and each ultrasonic transducer (1 ) and make the direction of the electric field applied irregular.

各超音波振動子(1)ごとに直列に電気負荷(7)を設
けることにより、電気機械結合係数の大きい超音波振動
子(1)を用いても、従来に比べ分解能やサイドローブ
レベルを改善できる利点がある。
By providing an electrical load (7) in series with each ultrasonic transducer (1), resolution and sidelobe levels are improved compared to conventional ones even when using an ultrasonic transducer (1) with a large electromechanical coupling coefficient. There are advantages that can be achieved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の超音波探触子を示す図、第2図は超音波
の波形を示す図、第3図はこの発明に係る超音波探触子
の一実施例を示す図である。 図中、(1)は超音波振動子、(2)は音響放射面、(
3)は絶縁膜、(4)はリード線、(5)はノくツキン
グ材、(6)は音響インピーダンス変成層、(7)は電
気負荷である。 なお2図中、同一あるいは相当部分には同一符号を付し
て示しである。 代理人 葛野信−
FIG. 1 is a diagram showing a conventional ultrasound probe, FIG. 2 is a diagram showing ultrasound waveforms, and FIG. 3 is a diagram showing an embodiment of the ultrasound probe according to the present invention. In the figure, (1) is an ultrasonic transducer, (2) is an acoustic radiation surface, (
3) is an insulating film, (4) is a lead wire, (5) is a knocking material, (6) is an acoustic impedance transformation layer, and (7) is an electric load. In FIG. 2, the same or corresponding parts are designated by the same reference numerals. Agent Makoto Kuzuno

Claims (1)

【特許請求の範囲】[Claims] 複数個の超音波振動子を、上記各超音波振動子の音響放
射面を対向させ積重ねて配列(〜、上記各超音波振動子
に印加される電界方向を不規則にするとともに、上記超
音波振動子に直列に電気負荷を設けてなることを特徴と
する超音波探触子。
A plurality of ultrasonic transducers are stacked and arranged with the acoustic radiation surfaces of each ultrasonic transducer facing each other (~, the direction of the electric field applied to each of the ultrasonic transducers is irregular, and the ultrasonic An ultrasonic probe characterized by having an electric load installed in series with a vibrator.
JP57202650A 1982-11-18 1982-11-18 Ultrasonic wave probe Granted JPS5991796A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57202650A JPS5991796A (en) 1982-11-18 1982-11-18 Ultrasonic wave probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57202650A JPS5991796A (en) 1982-11-18 1982-11-18 Ultrasonic wave probe

Publications (2)

Publication Number Publication Date
JPS5991796A true JPS5991796A (en) 1984-05-26
JPH0129355B2 JPH0129355B2 (en) 1989-06-09

Family

ID=16460855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57202650A Granted JPS5991796A (en) 1982-11-18 1982-11-18 Ultrasonic wave probe

Country Status (1)

Country Link
JP (1) JPS5991796A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5728500A (en) * 1980-07-29 1982-02-16 Kureha Chem Ind Co Ltd Ultrasonic wave transducer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5728500A (en) * 1980-07-29 1982-02-16 Kureha Chem Ind Co Ltd Ultrasonic wave transducer

Also Published As

Publication number Publication date
JPH0129355B2 (en) 1989-06-09

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