JPS60247169A - 半導体流速検出器 - Google Patents

半導体流速検出器

Info

Publication number
JPS60247169A
JPS60247169A JP59103028A JP10302884A JPS60247169A JP S60247169 A JPS60247169 A JP S60247169A JP 59103028 A JP59103028 A JP 59103028A JP 10302884 A JP10302884 A JP 10302884A JP S60247169 A JPS60247169 A JP S60247169A
Authority
JP
Japan
Prior art keywords
flow velocity
semiconductor
detection element
temperature
temp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59103028A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0338545B2 (enrdf_load_stackoverflow
Inventor
Masayuki Sekimura
関村　雅之
Shunji Shiromizu
白水　俊次
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP59103028A priority Critical patent/JPS60247169A/ja
Priority to US06/733,796 priority patent/US4637253A/en
Priority to DE19853518409 priority patent/DE3518409A1/de
Publication of JPS60247169A publication Critical patent/JPS60247169A/ja
Publication of JPH0338545B2 publication Critical patent/JPH0338545B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP59103028A 1984-05-22 1984-05-22 半導体流速検出器 Granted JPS60247169A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP59103028A JPS60247169A (ja) 1984-05-22 1984-05-22 半導体流速検出器
US06/733,796 US4637253A (en) 1984-05-22 1985-05-14 Semiconductor flow detector for detecting the flow rate and flowing direction of fluid
DE19853518409 DE3518409A1 (de) 1984-05-22 1985-05-22 Halbleiter-stroemungsmesser zur bestimmung von stroemungsmenge und -richtung eines stroemungsmittels

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59103028A JPS60247169A (ja) 1984-05-22 1984-05-22 半導体流速検出器

Publications (2)

Publication Number Publication Date
JPS60247169A true JPS60247169A (ja) 1985-12-06
JPH0338545B2 JPH0338545B2 (enrdf_load_stackoverflow) 1991-06-11

Family

ID=14343190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59103028A Granted JPS60247169A (ja) 1984-05-22 1984-05-22 半導体流速検出器

Country Status (1)

Country Link
JP (1) JPS60247169A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5717136A (en) * 1994-02-28 1998-02-10 Unisia Jecs Corporation Hot film type air flow quantity detecting apparatus applicable to vehicular internal combustion engine

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5343574A (en) * 1976-10-01 1978-04-19 Rion Co Thermal flow meter
JPS55103466A (en) * 1979-02-01 1980-08-07 Nippon Denso Co Ltd Semiconductor device for flow speed electric conversion
JPS56143915A (en) * 1980-04-11 1981-11-10 Nippon Soken Inc Measuring device for gas flow rate

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5343574A (en) * 1976-10-01 1978-04-19 Rion Co Thermal flow meter
JPS55103466A (en) * 1979-02-01 1980-08-07 Nippon Denso Co Ltd Semiconductor device for flow speed electric conversion
JPS56143915A (en) * 1980-04-11 1981-11-10 Nippon Soken Inc Measuring device for gas flow rate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5717136A (en) * 1994-02-28 1998-02-10 Unisia Jecs Corporation Hot film type air flow quantity detecting apparatus applicable to vehicular internal combustion engine

Also Published As

Publication number Publication date
JPH0338545B2 (enrdf_load_stackoverflow) 1991-06-11

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