JPS60247075A - 真空ポンプ装置 - Google Patents

真空ポンプ装置

Info

Publication number
JPS60247075A
JPS60247075A JP10051084A JP10051084A JPS60247075A JP S60247075 A JPS60247075 A JP S60247075A JP 10051084 A JP10051084 A JP 10051084A JP 10051084 A JP10051084 A JP 10051084A JP S60247075 A JPS60247075 A JP S60247075A
Authority
JP
Japan
Prior art keywords
pump
pump element
rotor
casing
suction port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10051084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0419393B2 (enrdf_load_stackoverflow
Inventor
Mitsuo Yoneyama
米山　光穂
Osami Matsushita
修己 松下
Shinjiro Ueda
上田　新次郎
Nobuo Tsumaki
妻木　伸夫
Hideaki Kanbara
秀明 蒲原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10051084A priority Critical patent/JPS60247075A/ja
Publication of JPS60247075A publication Critical patent/JPS60247075A/ja
Publication of JPH0419393B2 publication Critical patent/JPH0419393B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP10051084A 1984-05-21 1984-05-21 真空ポンプ装置 Granted JPS60247075A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10051084A JPS60247075A (ja) 1984-05-21 1984-05-21 真空ポンプ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10051084A JPS60247075A (ja) 1984-05-21 1984-05-21 真空ポンプ装置

Publications (2)

Publication Number Publication Date
JPS60247075A true JPS60247075A (ja) 1985-12-06
JPH0419393B2 JPH0419393B2 (enrdf_load_stackoverflow) 1992-03-30

Family

ID=14275943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10051084A Granted JPS60247075A (ja) 1984-05-21 1984-05-21 真空ポンプ装置

Country Status (1)

Country Link
JP (1) JPS60247075A (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62291479A (ja) * 1986-06-12 1987-12-18 Hitachi Ltd 真空排気装置
JPH01277698A (ja) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk 複合型真空ポンプ
EP1347176A3 (en) * 2002-03-20 2003-11-05 Kabushiki Kaisha Toyota Jidoshokki Vacuum pump
JP2005147151A (ja) * 2003-11-18 2005-06-09 Varian Spa 振動減衰器を備えた真空ポンプ
EP2644893A3 (en) * 2012-03-30 2017-08-23 Ebara Corporation Vacuum evacuation apparatus
CN107524579A (zh) * 2017-09-26 2017-12-29 安徽万瑞冷电科技有限公司 一种低温泵
EP4130481A4 (en) * 2020-03-31 2024-04-10 Edwards Japan Limited VACUUM PUMP AND PIPING STRUCTURE FOR VACUUM PUMP
US12276283B2 (en) 2015-07-23 2025-04-15 Edwards Japan Limited Integrated connector between first and second vacuum pumps creating a vapor phase region environment

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62291479A (ja) * 1986-06-12 1987-12-18 Hitachi Ltd 真空排気装置
JPH01277698A (ja) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk 複合型真空ポンプ
EP1347176A3 (en) * 2002-03-20 2003-11-05 Kabushiki Kaisha Toyota Jidoshokki Vacuum pump
US7140846B2 (en) 2002-03-20 2006-11-28 Kabushiki Kaisha Toyota Jidoshokki Vacuum pump having main and sub pumps
JP2005147151A (ja) * 2003-11-18 2005-06-09 Varian Spa 振動減衰器を備えた真空ポンプ
EP2644893A3 (en) * 2012-03-30 2017-08-23 Ebara Corporation Vacuum evacuation apparatus
US12276283B2 (en) 2015-07-23 2025-04-15 Edwards Japan Limited Integrated connector between first and second vacuum pumps creating a vapor phase region environment
CN107524579A (zh) * 2017-09-26 2017-12-29 安徽万瑞冷电科技有限公司 一种低温泵
EP4130481A4 (en) * 2020-03-31 2024-04-10 Edwards Japan Limited VACUUM PUMP AND PIPING STRUCTURE FOR VACUUM PUMP

Also Published As

Publication number Publication date
JPH0419393B2 (enrdf_load_stackoverflow) 1992-03-30

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