JPS60242304A - 大口径平面鏡の表面形状測定用ホログラム干渉計 - Google Patents

大口径平面鏡の表面形状測定用ホログラム干渉計

Info

Publication number
JPS60242304A
JPS60242304A JP9931484A JP9931484A JPS60242304A JP S60242304 A JPS60242304 A JP S60242304A JP 9931484 A JP9931484 A JP 9931484A JP 9931484 A JP9931484 A JP 9931484A JP S60242304 A JPS60242304 A JP S60242304A
Authority
JP
Japan
Prior art keywords
hologram
light
optical system
illumination light
plane mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9931484A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0223802B2 (enrdf_load_stackoverflow
Inventor
Kouji Tenjinbayashi
天神林　孝二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP9931484A priority Critical patent/JPS60242304A/ja
Publication of JPS60242304A publication Critical patent/JPS60242304A/ja
Publication of JPH0223802B2 publication Critical patent/JPH0223802B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP9931484A 1984-05-17 1984-05-17 大口径平面鏡の表面形状測定用ホログラム干渉計 Granted JPS60242304A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9931484A JPS60242304A (ja) 1984-05-17 1984-05-17 大口径平面鏡の表面形状測定用ホログラム干渉計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9931484A JPS60242304A (ja) 1984-05-17 1984-05-17 大口径平面鏡の表面形状測定用ホログラム干渉計

Publications (2)

Publication Number Publication Date
JPS60242304A true JPS60242304A (ja) 1985-12-02
JPH0223802B2 JPH0223802B2 (enrdf_load_stackoverflow) 1990-05-25

Family

ID=14244175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9931484A Granted JPS60242304A (ja) 1984-05-17 1984-05-17 大口径平面鏡の表面形状測定用ホログラム干渉計

Country Status (1)

Country Link
JP (1) JPS60242304A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105300312A (zh) * 2015-11-30 2016-02-03 北京航空航天大学 一种基于数字全息的高数值孔径半球面形检测系统
CN106123793A (zh) * 2016-06-29 2016-11-16 北京航天控制仪器研究所 一种便携式光学干涉法球径球度快速检测仪
CN112525071A (zh) * 2020-11-27 2021-03-19 南京理工大学 一种抑制大口径干涉仪中光学材料非均匀性影响的方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105300312A (zh) * 2015-11-30 2016-02-03 北京航空航天大学 一种基于数字全息的高数值孔径半球面形检测系统
CN106123793A (zh) * 2016-06-29 2016-11-16 北京航天控制仪器研究所 一种便携式光学干涉法球径球度快速检测仪
CN112525071A (zh) * 2020-11-27 2021-03-19 南京理工大学 一种抑制大口径干涉仪中光学材料非均匀性影响的方法

Also Published As

Publication number Publication date
JPH0223802B2 (enrdf_load_stackoverflow) 1990-05-25

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term