JPS60239399A - 化合物半導体のアニ−ル法 - Google Patents
化合物半導体のアニ−ル法Info
- Publication number
- JPS60239399A JPS60239399A JP9539084A JP9539084A JPS60239399A JP S60239399 A JPS60239399 A JP S60239399A JP 9539084 A JP9539084 A JP 9539084A JP 9539084 A JP9539084 A JP 9539084A JP S60239399 A JPS60239399 A JP S60239399A
- Authority
- JP
- Japan
- Prior art keywords
- compound semiconductor
- film
- substrate
- implanted
- inorg
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 24
- 150000001875 compounds Chemical class 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000000137 annealing Methods 0.000 title claims description 24
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 150000002500 ions Chemical class 0.000 claims abstract description 4
- 230000001678 irradiating effect Effects 0.000 claims abstract 3
- 238000001228 spectrum Methods 0.000 claims abstract 2
- 150000002484 inorganic compounds Chemical class 0.000 claims description 7
- 229910010272 inorganic material Inorganic materials 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 abstract description 11
- 230000008020 evaporation Effects 0.000 abstract description 5
- 238000001704 evaporation Methods 0.000 abstract description 5
- 239000010453 quartz Substances 0.000 abstract description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 5
- 239000011261 inert gas Substances 0.000 abstract description 3
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 7
- 239000007789 gas Substances 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9539084A JPS60239399A (ja) | 1984-05-11 | 1984-05-11 | 化合物半導体のアニ−ル法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9539084A JPS60239399A (ja) | 1984-05-11 | 1984-05-11 | 化合物半導体のアニ−ル法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60239399A true JPS60239399A (ja) | 1985-11-28 |
| JPH0480879B2 JPH0480879B2 (enrdf_load_stackoverflow) | 1992-12-21 |
Family
ID=14136316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9539084A Granted JPS60239399A (ja) | 1984-05-11 | 1984-05-11 | 化合物半導体のアニ−ル法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60239399A (enrdf_load_stackoverflow) |
-
1984
- 1984-05-11 JP JP9539084A patent/JPS60239399A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0480879B2 (enrdf_load_stackoverflow) | 1992-12-21 |
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