JPS60239027A - アツシング方法 - Google Patents

アツシング方法

Info

Publication number
JPS60239027A
JPS60239027A JP9281184A JP9281184A JPS60239027A JP S60239027 A JPS60239027 A JP S60239027A JP 9281184 A JP9281184 A JP 9281184A JP 9281184 A JP9281184 A JP 9281184A JP S60239027 A JPS60239027 A JP S60239027A
Authority
JP
Japan
Prior art keywords
gas
photoresist
reaction chamber
ashing
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9281184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0518252B2 (enrdf_load_stackoverflow
Inventor
Takashi Fujii
敬 藤井
Masaharu Saikai
西海　正治
Atsushi Kohama
小浜　敦
Hitoaki Sato
佐藤　仁昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9281184A priority Critical patent/JPS60239027A/ja
Publication of JPS60239027A publication Critical patent/JPS60239027A/ja
Publication of JPH0518252B2 publication Critical patent/JPH0518252B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP9281184A 1984-05-11 1984-05-11 アツシング方法 Granted JPS60239027A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9281184A JPS60239027A (ja) 1984-05-11 1984-05-11 アツシング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9281184A JPS60239027A (ja) 1984-05-11 1984-05-11 アツシング方法

Publications (2)

Publication Number Publication Date
JPS60239027A true JPS60239027A (ja) 1985-11-27
JPH0518252B2 JPH0518252B2 (enrdf_load_stackoverflow) 1993-03-11

Family

ID=14064793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9281184A Granted JPS60239027A (ja) 1984-05-11 1984-05-11 アツシング方法

Country Status (1)

Country Link
JP (1) JPS60239027A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63202918A (ja) * 1987-02-18 1988-08-22 Tokyo Electron Ltd オゾン分解器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4999558A (enrdf_load_stackoverflow) * 1973-01-25 1974-09-20
JPS5110798A (enrdf_load_stackoverflow) * 1974-07-17 1976-01-28 Citizen Watch Co Ltd
JPS5941835A (ja) * 1982-08-31 1984-03-08 Fujitsu Ltd レジスト剥離方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4999558A (enrdf_load_stackoverflow) * 1973-01-25 1974-09-20
JPS5110798A (enrdf_load_stackoverflow) * 1974-07-17 1976-01-28 Citizen Watch Co Ltd
JPS5941835A (ja) * 1982-08-31 1984-03-08 Fujitsu Ltd レジスト剥離方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63202918A (ja) * 1987-02-18 1988-08-22 Tokyo Electron Ltd オゾン分解器

Also Published As

Publication number Publication date
JPH0518252B2 (enrdf_load_stackoverflow) 1993-03-11

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