JPS60238477A - Ion plating method - Google Patents

Abstract

PURPOSE:To finish all materials to be processed in uniform color tone by isolating each vapor source on specified conditions when the ion plating is finished in ion-plating many circulating and moving materials to be processed from two kinds of vapor sources. CONSTITUTION:Ti ions and Au ions from a Ti vapor source 2 and an Au vapor source 3 are compositely ion-plated on the surface of many works 4 to be processed which are circulated and moved by a moving device 5 in a vacuum vessel 1. Ti ions fly in zones A and B in the vacuum vessel 1, and Au ions fly in zones B and C. When the ion plating is finished, Ti ions contributing scarcely to color tone are isolated with a shutter 8 on the Ti vapor source 2, and Au ions are isolated with a shutter 9 after 1/2-1 cycle of the work 4 by the work moving device 5. Accordingly, the vapor deposition film in uniform color tone can be formed on many works 4.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ion blating method, and more particularly, to a method for ion blating, in which two types of evaporation substances are evaporated simultaneously using two evaporation sources, thereby forming a coating of a desired color on the surface of a workpiece. This invention relates to an ion blating method for binary evaporation to form.

In moxibustion track ion blating, an evaporation source is installed in a vacuum container, a workpiece (hereinafter referred to as a "work") is placed above the evaporation source, and the evaporation source is used to irradiate a material such as gold (A u ) with the evaporation source. This is a method in which a substance is evaporated and ionized, and a film is formed by adhering it to the surface of a workpiece to which a voltage of opposite polarity to the ionization polarity is applied.

Conventionally, such ion blating has been used to form a coating of a desired color on, for example, exterior parts of watches (cases, bands, etc.) to enhance decorativeness.

In that case, if only gold (A u ) is used as the evaporative substance, the desired color tone cannot be obtained.
For example, two types of vaporized substances, gold (A u ) and titanium (Ti), may be used.

In that case, ion blating has been carried out by making an alloy of these two types of metals (for example, Au and Ti) and evaporating them with one evaporation source, but when the evaporation temperatures of the two types of metals are different, This method cannot be used, and separate equipment for making the alloy is required, making it unsuitable for small-scale production.

Therefore, we decided to use two evaporation sources in the same vacuum container.
There is a method of evaporating different types of substances separately and performing ion blating while circulating a large number of workpieces above the evaporation.

In the conventional ion blating method, ion blating is started by simultaneously opening the shirt plates that cover the two evaporation sources, and thin strips of two types of evaporation substances are sequentially formed on the surface of the workpiece to achieve the desired effect. When this color tone was obtained, the two evaporation sources were simultaneously covered with a shutter plate to complete the ion blating.

However, in such conventional ion blating methods, examples include Au and T on the exterior parts of watches, as mentioned above.
In the case where a golden-yellow film is formed by i, the finish is different between the workpiece that was located above the Au evaporation source and the workpiece that was located above the Ti evaporation source just before ion blating was completed. The colors are different, with the former being a somewhat darker gold, and the latter being a lighter gold.

This is because many Au evaporation particles adhere above the Au evaporation source, and many Ti evaporation particles adhere above the Ti evaporation source, or it is Au that contributes to the final color tone of the workpiece. This is because Ti serves to dilute the gold color.

1. This invention was made to solve this problem. Even if ion blating is performed on a large number of workpieces at once using two evaporation sources and two types of evaporation substances, The purpose is to make the finished color tone of all workpieces uniform.

Sentence 11 Therefore, in the ion blating method according to the present invention, when ion blating is finished, of the two evaporation sources, the evaporation source that evaporates the substance with the smaller contribution to the final color tone of the workpiece is selected first. The evaporation source for evaporating the substance having a larger contribution rate to the final color tone of the workpiece is covered with a shirttail plate, and then delayed by 1/2 to 1 period of the circulation movement period of the workpiece.

Embodiments of the present invention will be described with reference to the accompanying drawings.

FIG. 1 shows an ion brating device for carrying out the present invention, in which two evaporation sources 2 and 6 are spaced apart from each other at the bottom of a bell jar 1, which is a vacuum container.
A workpiece moving device 5 is disposed above the workpieces 4 for rotating and circulatingly moving a large number of works 4 on which coatings are to be formed in the direction of the arrow.

The bell jar 1 is equipped with an exhaust port 6 for discharging the internal air to create a vacuum, and a gas introduction lower for introducing inert gas such as argon as necessary. A shutter plate 8.9 is provided near each evaporation source 2.2 as shown in the figure. It is rotatably provided between a position where the upper part of '5 is opened and a position where it is covered.

The shutter plates 8 and 9 are, for example, as shown in FIG.
It is attached substantially horizontally to a rotating shaft 10a of a drive source 10 such as a rotary solenoid or a motor, which extends inside the bell jar 1, and the shaft 10. 90 degrees in the horizontal plane as shown by the arrow.
It is designed to rotate about 1°.

The evaporation sources 2 and 3 are powered by evaporation AC power sources 10 and 11, respectively, and evaporate the evaporation material (for example, Tj, Au, etc.) placed in the crucible by electron beam heating, resistance heating, etc.
evaporate. .

The workpiece 4 is provided with evaporation sources 2 and 3 by a high-voltage DC power supply 12.
A negative high voltage is applied to the workpiece moving device 5 via the workpiece moving device 5.

As a result, the evaporated substance particles evaporated by the evaporation sources 2 and 3 are ionized by the electric field between them and the workpiece 4 or by a separately provided ionization electrode (not shown), and are attracted to the workpiece 4 and spread over the entire surface of the workpiece 4. Adheres evenly to form a film.

In this ion blating device, for example, titanium (Ti) is evaporated by evaporation source 2, and gold (A) is oxidized by evaporation source B.
u) When the shutter plates 8 and 9 are evaporated and rotated from the shielding position shown in broken lines in FIG. 1 to the open position shown in solid lines, ion blating is started.

In Fig. 1, evaporated Ti particles fly in the ranges shown by A and B, and evaporated Au particles fly in the ranges shown by B and C (both Ti and ΔU particles fly in the range shown by B). The evaporated particles fly) and are sequentially attached to the surfaces of a large number of works 4 that are circulated in the direction of the arrow by the workpiece moving device 5 to form a coating.

Therefore, when ion blating is finished, the evaporation source 2. When the upper surface of the filter is covered, a Ti film is finally formed on the workpiece that ends within the range of A, a mixed film of Ti and Au is finally formed on the workpiece that ends within the range of B, and a film of Ti and Au is finally formed on the workpiece that ends within the range of Since the Au film is finally formed on the workpieces completed within the range, each workpiece has a different color tone, and becomes a deep gold color in the order of A, B, and C.

In this case, Au has a large contribution to the final color tone of the workpiece, and Ti has a small contribution to the final color tone (plays the role of making the color lighter).

Therefore, in the ion blating method according to the present invention, when finishing ion blating, the shirt plate 8 is first rotated to the position shown by the broken line to cover the upper surface of the evaporation source 2 for evaporating Ti, and then the workpiece is moved. The shutter Fi is delayed by 1/2 to 1 period (slightly longer than 1/2 period is optimal) of the circulation movement period of the workpiece 4 by the device 5.
S is rotated to the position shown by the broken line so that it covers the upper surface of the evaporation source B for evaporating Au.

In this way, the final coating formed on the surface of each workpiece 4 is all Au, so there is almost no difference in the finished color tone of all the workpieces 4, and a desired color tone can be obtained.

As a combination of evaporative substances suitable for performing ion blating according to the present invention, A and u are used as substances that contribute to the final color tone of the workpiece in a large proportion, and substances for color tone adjustment that contribute in a small proportion to the final color tone are used. In addition to T1, N i I P a +Cυ, Cr, Co, etc. are used as the material.

Further, one of them may be an alloy and the other may be a single substance (for example, an alloy of Au and Ti and Ti), or both may be an alloy.

Next, a specific example of the workpiece moving device 5 and the fixture for attaching the workpiece thereto in the above embodiment will be explained with reference to FIGS. 3 and 4.

FIG. 3 is a perspective view of the main parts of the workpiece moving device and the workpiece fixing device. A notched groove 1 is provided in a boss portion 14a formed on the roller 14, which rotatably supports the roller 14.
A clip 15 using a temporary spring is fixed to 4b.

The support shaft 21 of the fixture 20 is inserted into the clip 15 along the axial direction of the roller 14 so that it rotates integrally with the roller 14, and a plurality of boss portions 22 of the support shaft 2 are arranged at intervals. It is permanently installed.

Then, by means of a locking piece 24 made of a substantially triangular leaf spring fixed to the tip of each lot 23 of this fixture 20,
Each workpiece 4 is supported by point contact.

The chain 13 of the workpiece moving device 5, which rotatably supports a large number of workpiece fixtures 20 in this way, is connected to the evaporation source 2.0 in the bell jar 1 in FIG. As shown in FIG. 4, a pair of sprockets 16 and 17 are rotatably supported by shafts 16a and 17a, respectively.

A kite rail 18.degree. 1B is fixed to the lower side of the three-way running section and the downward running section of the chain 13 over a predetermined area so as to roll the rollers 14 into contact with each other.

Therefore, when the sprockets 16 and 17 are rotated in the direction of arrow A, the three-way running part of the chain 13 runs in the direction of arrow B, the lower running part runs in the direction of arrow C, and each roller 14 moves in the direction of arrow C. While moving in the same direction as the chain 13, the support shaft 21 of each workpiece fixture 20
moves along with the rollers 14 and rotates while circulating.

Note that the voltage from the high voltage DC power supply 12 in FIG.

All metal sprocket 16 or 17. chain 16
．． Roller 14. and is applied via a fixture 20 including a support shaft 21.

Effects As described above with reference to the embodiments, the ion blating method for binary evaporation according to the present invention allows the two evaporation sources to be shielded by temporary shutters at the time of finishing ion blating to be controlled by changing the period of time when the work is circulated. ]72～
Although it takes only one cycle, it is possible to substantially equalize the finished color tone of a large number of works that are subjected to ion blating at once.

Moreover, since no special equipment is required, the process can be easily carried out, making it particularly suitable for high-mix, low-volume production.

[Brief explanation of drawings]

FIG. 1 is a schematic configuration diagram showing an outline of an ion brating device for carrying out the present invention, FIG. 2 is a perspective view showing the attachment 1 of the shirt shirt plate, FIGS. 6 and 4 2 is a perspective view of main parts showing a specific example of the workpiece moving device and the fixture, and a schematic diagram showing an example of arrangement in a bell jar. 1... Belljar (vacuum container) 2, 3... Evaporation source 4
... Workpiece (workpiece) 5. Workpiece moving device 8.
9...Shutter plate 10.11/Evaporation AC power supply 12...High voltage DC power supply Figure 1 Figure 2 Figure 3 Figure 4 Figure 4

Claims (1)

[Claims] 1 In a method in which two evaporation sources that evaporate different substances are arranged at a distance in a vacuum container, and ion blating is performed while circulating a large number of workpieces above them, when ion blating is finished, In the above 2
Of the two evaporation sources, the evaporation source that evaporates the substance that contributes to the final color tone of the workpiece is first covered with a shirt plate, and then the evaporation source that evaporates the material that contributes to the final color tone of the workpiece is covered with a shirt plate, and then
An ion blating method characterized in that an evaporation source for evaporating the evaporation substance that contributes to the final color tone of the workpiece with a larger rate by delaying the period is covered with a shatter plate.