JPS6023282B2 - 相対変位測定装置 - Google Patents

相対変位測定装置

Info

Publication number
JPS6023282B2
JPS6023282B2 JP50031737A JP3173775A JPS6023282B2 JP S6023282 B2 JPS6023282 B2 JP S6023282B2 JP 50031737 A JP50031737 A JP 50031737A JP 3173775 A JP3173775 A JP 3173775A JP S6023282 B2 JPS6023282 B2 JP S6023282B2
Authority
JP
Japan
Prior art keywords
grating
light
frequency
image
movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50031737A
Other languages
English (en)
Japanese (ja)
Other versions
JPS50136057A (enrdf_load_stackoverflow
Inventor
アルフレツド セイス レナド
ロバ−ト・マ−テイン・ペテイグリユ−
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NAT RES DEV
Original Assignee
NAT RES DEV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB11598/74A external-priority patent/GB1504691A/en
Application filed by NAT RES DEV filed Critical NAT RES DEV
Publication of JPS50136057A publication Critical patent/JPS50136057A/ja
Publication of JPS6023282B2 publication Critical patent/JPS6023282B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/363—Direction discrimination

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP50031737A 1974-03-15 1975-03-14 相対変位測定装置 Expired JPS6023282B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GB11598/74 1974-03-15
GB11598/74A GB1504691A (en) 1974-03-15 1974-03-15 Measurement apparatus
GB44522/74 1974-10-14
GB4452274 1974-10-14

Publications (2)

Publication Number Publication Date
JPS50136057A JPS50136057A (enrdf_load_stackoverflow) 1975-10-28
JPS6023282B2 true JPS6023282B2 (ja) 1985-06-06

Family

ID=26248389

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50031737A Expired JPS6023282B2 (ja) 1974-03-15 1975-03-14 相対変位測定装置

Country Status (4)

Country Link
JP (1) JPS6023282B2 (enrdf_load_stackoverflow)
DE (2) DE7508197U (enrdf_load_stackoverflow)
FR (1) FR2329972A1 (enrdf_load_stackoverflow)
NL (1) NL185178C (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0218680U (enrdf_load_stackoverflow) * 1988-07-19 1990-02-07
US7186969B2 (en) 2003-02-12 2007-03-06 Mitutoyo Corporation Optical configuration for imaging-type optical encoders
DE19701941B4 (de) * 1996-01-23 2016-01-14 Mitutoyo Corp. Optischer Codierer

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59170214U (ja) * 1983-04-30 1984-11-14 株式会社ベルデックス マイクロスケ−ル
DE3325803C2 (de) * 1983-07-16 1986-11-20 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Inkrementale, lichtelektrische Meßeinrichtung
DE3334398C1 (de) * 1983-09-23 1984-11-22 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Messeinrichtung
GB8615197D0 (en) * 1986-06-21 1986-07-23 Renishaw Plc Opto-electronic scale reading apparatus
GB8729066D0 (en) * 1987-12-12 1988-01-27 Renishaw Plc Opto-electronic scale-reading apparatus
US4943716A (en) * 1988-01-22 1990-07-24 Mitutoyo Corporation Diffraction-type optical encoder with improved detection signal insensitivity to optical grating gap variations
GB2216257B (en) * 1988-02-26 1992-06-24 Okuma Machinery Works Ltd Optical linear encoder
JP3196459B2 (ja) * 1993-10-29 2001-08-06 キヤノン株式会社 ロータリーエンコーダ
JP3513251B2 (ja) * 1994-03-14 2004-03-31 キヤノン株式会社 光学式変位センサ
DE19859670A1 (de) * 1998-12-23 2000-06-29 Heidenhain Gmbh Dr Johannes Abtastkopf und Verfahren zu dessen Herstellung
DE19859669A1 (de) * 1998-12-23 2000-06-29 Heidenhain Gmbh Dr Johannes Integrierter optoelektronischer Sensor und Verfahren zu dessen Herstellung
DE19917950A1 (de) 1999-04-21 2000-10-26 Heidenhain Gmbh Dr Johannes Integrierter optoelektronischer Dünnschichtsensor und Verfahren zu dessen Herstellung
CN100523739C (zh) * 2004-07-12 2009-08-05 三菱电机株式会社 光学式编码器

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1911231A1 (de) * 1968-03-06 1970-02-12 Holotron Corp Ultraschall-Mammograph
US3578979A (en) * 1968-04-23 1971-05-18 Tajima Seisakusho Kk Electrical signal generating apparatus having a scale grid
GB1231029A (enrdf_load_stackoverflow) * 1968-12-13 1971-05-05
GB1353470A (en) * 1970-10-19 1974-05-15 Post D Position measuring apparatus utilizing moire fringe multiplication
US3768911A (en) * 1971-08-17 1973-10-30 Keuffel & Esser Co Electro-optical incremental motion and position indicator
US3812352A (en) * 1972-08-28 1974-05-21 Itek Corp Encoder readout system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0218680U (enrdf_load_stackoverflow) * 1988-07-19 1990-02-07
DE19701941B4 (de) * 1996-01-23 2016-01-14 Mitutoyo Corp. Optischer Codierer
US7186969B2 (en) 2003-02-12 2007-03-06 Mitutoyo Corporation Optical configuration for imaging-type optical encoders
US7435945B2 (en) 2003-02-12 2008-10-14 Mitutoyo Corporation Optical configuration for imaging-type optical encoders
US7570433B2 (en) 2004-02-11 2009-08-04 Mitutoyo Corporation Photoelectric encoder

Also Published As

Publication number Publication date
DE2511350C2 (enrdf_load_stackoverflow) 1987-06-04
NL185178B (nl) 1989-09-01
NL185178C (nl) 1990-02-01
DE7508197U (de) 1976-02-05
FR2329972A1 (fr) 1977-05-27
NL7503103A (nl) 1975-09-17
AU7911675A (en) 1976-09-16
JPS50136057A (enrdf_load_stackoverflow) 1975-10-28
DE2511350A1 (de) 1975-10-09
FR2329972B1 (enrdf_load_stackoverflow) 1982-03-26

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