FR2329972A1 - Appareil a reseaux destine a la mesure du deplacement relatif de deux organes - Google Patents

Appareil a reseaux destine a la mesure du deplacement relatif de deux organes

Info

Publication number
FR2329972A1
FR2329972A1 FR7508096A FR7508096A FR2329972A1 FR 2329972 A1 FR2329972 A1 FR 2329972A1 FR 7508096 A FR7508096 A FR 7508096A FR 7508096 A FR7508096 A FR 7508096A FR 2329972 A1 FR2329972 A1 FR 2329972A1
Authority
FR
France
Prior art keywords
diffraction gratings
relationships
inter
optical assembly
electric system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7508096A
Other languages
English (en)
Other versions
FR2329972B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Research Development Corp UK
Original Assignee
National Research Development Corp UK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB11598/74A external-priority patent/GB1504691A/en
Application filed by National Research Development Corp UK filed Critical National Research Development Corp UK
Publication of FR2329972A1 publication Critical patent/FR2329972A1/fr
Application granted granted Critical
Publication of FR2329972B1 publication Critical patent/FR2329972B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/363—Direction discrimination

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
FR7508096A 1974-03-15 1975-03-14 Appareil a reseaux destine a la mesure du deplacement relatif de deux organes Granted FR2329972A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB11598/74A GB1504691A (en) 1974-03-15 1974-03-15 Measurement apparatus
GB4452274 1974-10-14

Publications (2)

Publication Number Publication Date
FR2329972A1 true FR2329972A1 (fr) 1977-05-27
FR2329972B1 FR2329972B1 (fr) 1982-03-26

Family

ID=26248389

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7508096A Granted FR2329972A1 (fr) 1974-03-15 1975-03-14 Appareil a reseaux destine a la mesure du deplacement relatif de deux organes

Country Status (4)

Country Link
JP (1) JPS6023282B2 (fr)
DE (2) DE2511350A1 (fr)
FR (1) FR2329972A1 (fr)
NL (1) NL185178C (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59170214U (ja) * 1983-04-30 1984-11-14 株式会社ベルデックス マイクロスケ−ル
DE3325803C2 (de) * 1983-07-16 1986-11-20 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Inkrementale, lichtelektrische Meßeinrichtung
DE3334398C1 (de) * 1983-09-23 1984-11-22 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Messeinrichtung
GB8615197D0 (en) * 1986-06-21 1986-07-23 Renishaw Plc Opto-electronic scale reading apparatus
GB8729066D0 (en) * 1987-12-12 1988-01-27 Renishaw Plc Opto-electronic scale-reading apparatus
US4943716A (en) * 1988-01-22 1990-07-24 Mitutoyo Corporation Diffraction-type optical encoder with improved detection signal insensitivity to optical grating gap variations
US4979827A (en) * 1988-02-26 1990-12-25 Kabushiki Kaisha Okuma Tekkosho Optical linear encoder
JPH0218680U (fr) * 1988-07-19 1990-02-07
JP3196459B2 (ja) * 1993-10-29 2001-08-06 キヤノン株式会社 ロータリーエンコーダ
JP3513251B2 (ja) * 1994-03-14 2004-03-31 キヤノン株式会社 光学式変位センサ
JP3631551B2 (ja) * 1996-01-23 2005-03-23 株式会社ミツトヨ 光学式エンコーダ
DE19859670A1 (de) 1998-12-23 2000-06-29 Heidenhain Gmbh Dr Johannes Abtastkopf und Verfahren zu dessen Herstellung
DE19859669A1 (de) 1998-12-23 2000-06-29 Heidenhain Gmbh Dr Johannes Integrierter optoelektronischer Sensor und Verfahren zu dessen Herstellung
DE19917950A1 (de) 1999-04-21 2000-10-26 Heidenhain Gmbh Dr Johannes Integrierter optoelektronischer Dünnschichtsensor und Verfahren zu dessen Herstellung
US7186969B2 (en) 2003-02-12 2007-03-06 Mitutoyo Corporation Optical configuration for imaging-type optical encoders
KR20070020133A (ko) * 2004-07-12 2007-02-16 미쓰비시덴키 가부시키가이샤 광학식 인코더

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL166393C (nl) * 1968-03-06 1981-08-17 Holotron Corp Inrichting voor het vervaardigen van een ultrasoon hologram.
US3578979A (en) * 1968-04-23 1971-05-18 Tajima Seisakusho Kk Electrical signal generating apparatus having a scale grid
GB1231029A (fr) * 1968-12-13 1971-05-05
GB1353470A (en) * 1970-10-19 1974-05-15 Post D Position measuring apparatus utilizing moire fringe multiplication
US3768911A (en) * 1971-08-17 1973-10-30 Keuffel & Esser Co Electro-optical incremental motion and position indicator
US3812352A (en) * 1972-08-28 1974-05-21 Itek Corp Encoder readout system

Also Published As

Publication number Publication date
DE7508197U (de) 1976-02-05
FR2329972B1 (fr) 1982-03-26
JPS50136057A (fr) 1975-10-28
DE2511350A1 (de) 1975-10-09
NL7503103A (nl) 1975-09-17
AU7911675A (en) 1976-09-16
NL185178C (nl) 1990-02-01
DE2511350C2 (fr) 1987-06-04
JPS6023282B2 (ja) 1985-06-06
NL185178B (nl) 1989-09-01

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Legal Events

Date Code Title Description
ST Notification of lapse