JPS60229001A - 集積化回折格子の製造方法 - Google Patents

集積化回折格子の製造方法

Info

Publication number
JPS60229001A
JPS60229001A JP8408484A JP8408484A JPS60229001A JP S60229001 A JPS60229001 A JP S60229001A JP 8408484 A JP8408484 A JP 8408484A JP 8408484 A JP8408484 A JP 8408484A JP S60229001 A JPS60229001 A JP S60229001A
Authority
JP
Japan
Prior art keywords
exposure
stripes
substrate
mask
diffraction grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8408484A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6311642B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hideto Furuyama
英人 古山
Hajime Okuda
肇 奥田
Yutaka Uematsu
豊 植松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP8408484A priority Critical patent/JPS60229001A/ja
Publication of JPS60229001A publication Critical patent/JPS60229001A/ja
Publication of JPS6311642B2 publication Critical patent/JPS6311642B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Semiconductor Lasers (AREA)
JP8408484A 1984-04-27 1984-04-27 集積化回折格子の製造方法 Granted JPS60229001A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8408484A JPS60229001A (ja) 1984-04-27 1984-04-27 集積化回折格子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8408484A JPS60229001A (ja) 1984-04-27 1984-04-27 集積化回折格子の製造方法

Publications (2)

Publication Number Publication Date
JPS60229001A true JPS60229001A (ja) 1985-11-14
JPS6311642B2 JPS6311642B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-03-15

Family

ID=13820624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8408484A Granted JPS60229001A (ja) 1984-04-27 1984-04-27 集積化回折格子の製造方法

Country Status (1)

Country Link
JP (1) JPS60229001A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0561397A (ja) * 1991-08-29 1993-03-12 Fujitsu Ltd ホログラム描画装置
JPH0572959A (ja) * 1991-09-17 1993-03-26 Fujitsu Ltd ホログラム描画装置
FR2725527A1 (fr) * 1994-10-10 1996-04-12 Talneau Anne Filtre optique pour plusieurs longueurs d'ondes guidees
WO2005045528A3 (en) * 2003-11-03 2005-09-01 Intel Corp Interference patterning
JP2010272694A (ja) * 2009-05-21 2010-12-02 Sumitomo Electric Ind Ltd 半導体光素子を作製する方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0561397A (ja) * 1991-08-29 1993-03-12 Fujitsu Ltd ホログラム描画装置
JPH0572959A (ja) * 1991-09-17 1993-03-26 Fujitsu Ltd ホログラム描画装置
FR2725527A1 (fr) * 1994-10-10 1996-04-12 Talneau Anne Filtre optique pour plusieurs longueurs d'ondes guidees
WO1996011416A1 (fr) * 1994-10-10 1996-04-18 France Telecom Filtre optique pour plusieurs longueurs d'ondes guidees
WO2005045528A3 (en) * 2003-11-03 2005-09-01 Intel Corp Interference patterning
US7228034B2 (en) 2003-11-03 2007-06-05 Intel Corporation Interference patterning
JP2010272694A (ja) * 2009-05-21 2010-12-02 Sumitomo Electric Ind Ltd 半導体光素子を作製する方法

Also Published As

Publication number Publication date
JPS6311642B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-03-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term