JPS60228943A - Inspection of surface state of stainless steel plate - Google Patents

Inspection of surface state of stainless steel plate

Info

Publication number
JPS60228943A
JPS60228943A JP8539584A JP8539584A JPS60228943A JP S60228943 A JPS60228943 A JP S60228943A JP 8539584 A JP8539584 A JP 8539584A JP 8539584 A JP8539584 A JP 8539584A JP S60228943 A JPS60228943 A JP S60228943A
Authority
JP
Japan
Prior art keywords
inspected
steel plate
light
stainless steel
illumination light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8539584A
Other languages
Japanese (ja)
Inventor
Naoya Matsuda
直也 松田
Toru Inouchi
徹 井内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP8539584A priority Critical patent/JPS60228943A/en
Publication of JPS60228943A publication Critical patent/JPS60228943A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901Optical details; Scanning details

Abstract

PURPOSE:To make it possible to easily perform the inspection of the surface state of a stainless steel plate by accurately detecting a partial worn-off flaw, by allowing light to be incident to a surface to be inspected at a large incident angle and observing the surface to be inspected from the direction almost same to the incident direction. CONSTITUTION:An illumination light source 2 is arranged so that illumination light 3 is allowed to obliquely irradiate the surface of a material 1 to be inspected being a stainless steel plate at a large incident angle theta and a light detector 4 is arranged so as to observe the surface of the material 1 to be inspected from the direction almost same to the irradiation direction by the light source 2. As the incident angle theta of the light 3 from the light source 2 to the surface of the material 1 to be inspected is made larger, the light 3 is reflected from the mirror surface of the material 1 to be inspected without receiving the influence by the surface roughness of said material 1 to obtain regularily reflected light 3' but, if there is a revealed partial worn-off flaw, diffused reflected light 7 is generated. Therefore, for example, if a TV camera is used as the light detector 4, the image of the partial worn-off flaw is brightly observed in the relatively dark image of the material 1 being inspected on the picture of a monitor TV receiver 5.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、ステンレス鋼板の表面状態の検査方法詳しく
は該表面に発生する恐れがある微細なヘゲ状の疵の発生
程度を検査する方法に関する。
Detailed Description of the Invention (Industrial Application Field) The present invention relates to a method for inspecting the surface condition of a stainless steel plate. Specifically, a method for inspecting the degree of occurrence of minute scratches that may occur on the surface. Regarding.

(従来技術) 冷間圧延されたステンレス鋼板は表面に数μmから数1
0μmの微細なヘゲ状の疵が発生していることがある。
(Prior art) A cold-rolled stainless steel plate has a thickness ranging from several micrometers to several micrometers on its surface.
Fine bald-like flaws of 0 μm may occur.

ステンレス鋼板の用途の多くが美観を重視するものであ
ることから、またヘゲ伏流は発錆の原因になることから
、こうした疵の発生の顕著な材料は不合格材となる。
Since many uses of stainless steel sheets place emphasis on aesthetics, and because underflow can cause rust, materials with significant occurrence of such flaws are rejected.

この微細なヘゲ状の疵6は第15図+a)に示すように
、通常は鋼板10表面に密着していて光学的に特別な不
連続性はないので、このま\では目視あるいは他の光学
的方法によっての疵検知は不可能である。ところがステ
ンレス鋼板の多くは、搬送、保管、又は機械的加工を行
う際に鋼板同志あるいは工作機械等との接触・衝突・摩
擦などによる表面損傷を防ぐために、仕上圧延された段
階でビニール等の薄膜を貼付されており、最終製品に取
付けられてユーザに渡される段階で該薄膜を剥離すると
いう方式をとるものが多く、その際ヘゲ伏流6が起こさ
れて第15図(b)のように顕在化する。
As shown in Fig. 15+a), these minute sludge-like flaws 6 are usually in close contact with the surface of the steel plate 10 and have no special optical discontinuity, so they cannot be visually observed or It is not possible to detect defects by optical methods. However, many stainless steel sheets are coated with a thin film such as vinyl at the finish rolling stage to prevent surface damage due to contact, collision, friction, etc. with other steel sheets or machine tools during transportation, storage, or mechanical processing. In many products, the thin film is peeled off when it is attached to the final product and handed over to the user, and at this time, underflow 6 is caused, resulting in the problem as shown in Figure 15(b). manifest.

ヘゲ伏流の平面形状は第15図(C)に示す舌片状など
であって、上記薄膜の剥離で該ヘゲ伏流6aの全体が持
ち上るのではなく、その周縁一部(実線で示す)が持ち
上るだけである。しかし、このようになると、著しいも
の即ち起立ヘゲ伏流が多数あるものは一見してまた著し
くないものでも入念に見れば疵のあることが分り (チ
カチカ又はキラキラする)、ユーザーからは疵物と評価
される。
The planar shape of the underflow 6a is in the shape of a tongue as shown in FIG. ) only rises. However, when things like this happen, items that are noticeable, that is, items that have a large number of standing heges, can be seen at first glance to have flaws (flickering or sparkling) even if they are not so obvious. be evaluated.

またこれより錆が進行するので、事実好ましくはない。Also, since rust will progress further than this, this is actually not preferable.

ヘゲ疵発生の原因は定かではないが、鋼板表面の微細な
孔(くぼみ)または粒界に沿う割れが原因であり、それ
が圧延により変形したものと考えられている。塗装すれ
ばこのようなものは埋まってしまって目立たな(なるが
、素肌のま−使うのがステンレス鋼板であり、塗装など
による潜在化はできない。そこでヘゲ疵の検査が行なわ
れており、この検査方法としては従来は検査員による目
視検査に頼っている。即ち検査員は被検査材表面に粘着
テープを貼付した後剥離し、ヘゲ疵を顕在化させて目視
検査し、著しいものから殆んどないもの迄をA−Dラン
クに区分する等の方法をとっている。しかしこの目視検
査は必らずしも容易ではなく (よく見えないものがあ
る)、官能検査であるため定量性に乏しく、個人差があ
るなどの欠点があった。定量性を向上させる方法として
は顕微鏡などを用いて疵発生密度を計数することも可能
であるが、時間がか\す、実用的でない。
Although the cause of the occurrence of sludge defects is not clear, it is thought that the cause is minute holes (indentations) on the surface of the steel sheet or cracks along grain boundaries, which are deformed by rolling. If painted, these scratches would be hidden and would not be noticeable (but since the bare skin is made of stainless steel, it cannot be hidden by painting, etc.) Therefore, inspection for scratches is carried out. Conventionally, this inspection method has relied on visual inspection by inspectors.In other words, inspectors apply adhesive tape to the surface of the material to be inspected, then peel it off, visually inspect it to reveal any sagging defects, and identify significant ones. We use methods such as categorizing items that are almost non-existent into ranks A to D. However, this visual inspection is not always easy (some items cannot be seen clearly), and since it is a sensory test, quantitative analysis is not possible. There were disadvantages such as poor accuracy and individual differences.As a method to improve quantitativeness, it is possible to count the density of flaws using a microscope, but it is time consuming and impractical. .

更に顕微鏡像の画像処理装置による自動化も考えられる
が、対象とする疵を顕微鏡像の中で自動的に選別するこ
とは必ずしも容易ではない。
Furthermore, automation using an image processing device for microscopic images can be considered, but it is not always easy to automatically select target flaws from the microscopic images.

(発明の目的) 本発明はこのような従来法の問題点を解決し、ヘゲ疵を
正確に検出しステンレス鋼板の表面状態の良否検査を容
易に行なえるようにすることを目的とするものである。
(Object of the Invention) The purpose of the present invention is to solve the problems of the conventional method, to accurately detect sagging defects, and to easily inspect the quality of the surface condition of stainless steel sheets. It is.

(発明の構成、作用) 本発明は、ヘゲ伏流を持つ恐れのあるステンレス鋼板の
被検査表面に大きな入射角で照明用光線を照射し、該被
検査表面で反射する反射光のうち照明用光線の入射側へ
戻る反射光を光検出器により受光し、該被検査表面に対
応する該光検出器の出力中の輝点の数によりmf!表面
状態の良否を検査することを特徴とするものである。
(Structure and operation of the invention) The present invention irradiates an illumination light beam at a large angle of incidence onto the surface of a stainless steel plate to be inspected which may have underflow, and out of the reflected light reflected from the surface to be inspected, the illumination light beam is The reflected light returning to the incident side of the light beam is received by a photodetector, and mf! is determined by the number of bright spots in the output of the photodetector corresponding to the surface to be inspected. It is characterized by inspecting the quality of the surface condition.

以下本発明について説明する。第1図は本発明の概要を
示す説明図、第2図〜第4図はその動作説明図である。
The present invention will be explained below. FIG. 1 is an explanatory diagram showing an overview of the present invention, and FIGS. 2 to 4 are explanatory diagrams of its operation.

ステンレス鋼板即ち被検査材1の表面を照明用光線3が
斜めに即ち大なる入射角θで照射するように照明用光源
2を配置し、かつ光検出器4を該光源2による照射方向
とほぼ等しい方向から被検査材1の表面を観察するよう
に配置しである。照明用光源2による照明用光線3の被
検査材1の表面に対する入射角θが大きい程、照明用光
線3は被検査材1の表面粗さの影響を受けずに鏡面反射
して第2図のように正反射光3′となるが、顕在化され
たヘゲ伏流6があると、そこで拡散反射光7を生じる。
The illumination light source 2 is arranged so that the illumination light beam 3 irradiates the surface of the stainless steel plate, that is, the material to be inspected 1 obliquely, that is, at a large incident angle θ, and the photodetector 4 is arranged so that the surface of the stainless steel plate, that is, the material to be inspected 1 is irradiated with the illumination light ray 3 obliquely, that is, at a large incident angle θ. They are arranged so that the surface of the material to be inspected 1 is observed from the same direction. The larger the incident angle θ of the illumination light beam 3 from the illumination light source 2 with respect to the surface of the inspected material 1, the more the illumination light beam 3 is specularly reflected without being affected by the surface roughness of the inspected material 1, as shown in FIG. The reflected light 3' is specularly reflected as shown in FIG.

従って例えば光検出器4としてテレビジョンカメラのよ
うな画像読取器を用いれば第3図のようにモニタ用テレ
ビジョン受像機5の画面8の中の比較的暗い被検査材の
像1′の中にヘゲ伏流の像6′が明るく観測される。
Therefore, for example, if an image reader such as a television camera is used as the photodetector 4, as shown in FIG. Image 6' of the Hege underflow can be observed brightly.

この部分のテレビジョン信号を見れば第4図のように被
検査材を示す信号1“の中にヘゲ伏流の信号6“が検出
される。これは1走査線分を示すが、ヘゲ伏流内の他の
走査線もこれに準する。
If you look at this part of the television signal, as shown in FIG. 4, a signal 6'' of the undercurrent is detected in the signal 1'' indicating the material to be inspected. Although this represents one scanning line, other scanning lines within the Hege underflow also follow this.

ステンレス鋼板の表面は鏡面であり、入射角θは大きい
ので、光源2からの光の殆んどは正反射して、入射点に
立てた法線Nの光源とは反対の側へ飛び去る。従って周
囲を暗くしかつ該飛び去る側に黒体などの光吸収性物質
を置けば、そして鋼板表面は無疵とすれば、テレビジョ
ンカメラ4が受光する光は殆んどなく、モニタ用テレビ
ジョン受像機5の画面はかすかに鋼板表面が認識できる
程度の暗いものになる。鋼板表面にヘゲ伏流があって拡
散反射光7があるとテレビジョンカメラ4はそれを受光
し、モニタ用テレビジョン受像機の画面には上記の暗い
鋼板表面に明る(輝く点としてヘゲ伏流が現示される。
Since the surface of the stainless steel plate is a mirror surface and the angle of incidence θ is large, most of the light from the light source 2 is specularly reflected and flies away to the side opposite to the light source with the normal N set at the point of incidence. Therefore, if the surroundings are darkened and a light-absorbing material such as a black body is placed on the side where the light flies away, and if the surface of the steel plate is free of defects, there will be almost no light received by the television camera 4, and the monitor television will receive almost no light. The screen of the John receiver 5 becomes so dark that the surface of the steel plate can be faintly recognized. When there is an underflow on the surface of the steel plate and there is diffuse reflected light 7, the television camera 4 receives it, and the screen of the monitor television receiver shows the dark underflow as a bright spot on the surface of the steel plate. is displayed.

従ってこの方法による表面検査は非常にやり易く且つ正
確である。検査範囲は従来法に合わせるなら粘着テープ
被着範囲である。これを広(する場合は鋼板を移動させ
ればよい。
Therefore, surface inspection by this method is very easy and accurate. The inspection range is the adhesive tape coverage area according to the conventional method. If you want to widen this, just move the steel plate.

鋼板表面には第15図(C1に示すように圧延により生
じた縞1aもあり、これは圧延方向に走る互いに平行な
線(低い突条又は浅い条痕)である。
As shown in FIG. 15 (C1), there are also stripes 1a on the steel plate surface caused by rolling, which are mutually parallel lines (low protrusions or shallow striations) running in the rolling direction.

光照射方向は、縞1aを拾わないように該縞1aと平行
な方向に選ぶことが考えられるが、ヘゲ疵を画面1′に
よく現示するには光照射方向を縞1aと直角な方向に選
ぶ方がよい(この方が結果がよい)。しかしこの場合は
入射角θが大でないと縞1aが画面1′に現われるから
、これが消えるように(縞1aの周面ばなだらかである
のでθがある程度以上大になると消える)入射角θを選
ぶ。
The light irradiation direction may be selected in a direction parallel to the stripes 1a so as not to pick up the stripes 1a, but in order to clearly show the bald spots on the screen 1', the light irradiation direction may be selected perpendicular to the stripes 1a. It is better to choose in the direction (this gives better results). However, in this case, if the angle of incidence θ is not large, the stripes 1a will appear on the screen 1', so choose the angle of incidence θ so that the stripes 1a disappear (since the circumferential surface of the stripes 1a is gentle, they disappear when θ becomes larger than a certain degree). .

好ましい入射角θは60度以上90度未満の範囲であり
、これは光源2をそのようにセットすれば後は固定でよ
い。
A preferable incident angle θ is in the range of 60 degrees or more and less than 90 degrees, and this can be fixed after setting the light source 2 in this manner.

使用する光源2の種類は特に制約はなく、一般的な白熱
電球、螢光ランプ、水銀ランプ、ハロゲンランプ、クセ
ノンランプ、ナトリウムランプやレーザ光源などのすべ
てが使用可能である。また光検出器4としては光源2の
波長分布に対応してCOD素子、シリコン(St)セル
、ホトマルチプライヤ−その他の可視域、赤外波長域の
各種検出素子を使用することができる。なお本発明の方
法で表面検査するにはヘゲ伏流が顕在化されていること
が必要であり、その顕在化方法としては従来通りの粘着
テープ貼付、同剥離による方法の他、第5図(alに示
すように粘着性表面をもつロール9を被検査材1の表面
に押付けながら転勤させる方法、あるいは第5図(bl
に示すように、磁石10を被検査材表面に吸着させ次い
でこれを引き離す方法等々、任意の方法が適用可能であ
る。。
There are no particular restrictions on the type of light source 2 to be used, and all common incandescent lamps, fluorescent lamps, mercury lamps, halogen lamps, xenon lamps, sodium lamps, and laser light sources can be used. Further, as the photodetector 4, a COD element, a silicon (St) cell, a photomultiplier, and other various detection elements in the visible range and infrared wavelength range can be used depending on the wavelength distribution of the light source 2. In order to inspect the surface using the method of the present invention, it is necessary that the hege underflow be made obvious, and methods for making it obvious include the conventional method of attaching and peeling adhesive tape, as well as the method shown in Fig. 5 ( As shown in FIG. 5 (bl
Any method can be applied, such as a method of attracting the magnet 10 to the surface of the material to be inspected and then separating it, as shown in FIG. .

第6図は本発明の別の実施例で、ビームスプリンタ11
を用いて照明用光線3の入射方向と完全に等しい方向か
ら鋼板表面を観測可能にしたものである。即ち照明用光
源2から照明用光線3はビームスプリッタ11で反射し
て被検査材10表面に入射し、大部分は正反射して反射
光3′になるが、ヘゲ伏流による拡散反射光は入射光路
を戻り、ビームスプリンタ11を透過して光検出器4に
入る。光源2と光検出器4の配置は逆にしても結果は同
じである。入射方向と観測方向は近い程、疵からの拡散
反射光に対する検出感度が高くなるが、入射角が大きい
ことにより庇部以外からの拡散反射が極めて少ないので
、30度程度ずれても十分な検出能が得られる。
FIG. 6 shows another embodiment of the invention, in which the beam splinter 11
This makes it possible to observe the surface of the steel plate from a direction completely equal to the direction of incidence of the illumination light beam 3. That is, the illumination light beam 3 from the illumination light source 2 is reflected by the beam splitter 11 and enters the surface of the inspected material 10, and most of it is specularly reflected and becomes reflected light 3', but the diffusely reflected light due to the underflow is The light returns along the incident optical path, passes through the beam splinter 11, and enters the photodetector 4. Even if the arrangement of the light source 2 and the photodetector 4 is reversed, the result is the same. The closer the incident direction and observation direction are, the higher the detection sensitivity for diffusely reflected light from flaws will be. However, because the incident angle is large, there is extremely little diffusely reflected light from areas other than the eaves, so detection is sufficient even if the direction is shifted by about 30 degrees. ability is obtained.

第7図は本発明の別の実施例で、光ファイバー13〜1
5と光分岐結合器12を用いることによりやはり、入射
方向と観測方向を完全に一致させたものである。
FIG. 7 shows another embodiment of the present invention, in which optical fibers 13-1
5 and the optical branching/coupling device 12, the incident direction and the observation direction can be perfectly matched.

本発明では斜め方向から光を投射し、同じ斜め方向で受
光するので、光検出器にテレビジョンカメラなどのレン
ズを持つ光学装置を用いて比較的広い範囲を同時に観察
する場合、第8図に示すように、被検査材1の表面の点
Pa、PI、P2の像をレンズ16で結像面17上に得
ようとする場合、レンズ16から点Po、PI、P2ま
での距離an、a1.a2が異なることにより、面17
上で必ずしも鮮明な像が得られるtは限らない。
In the present invention, light is projected from an oblique direction and received in the same oblique direction. Therefore, when observing a relatively wide range at the same time using an optical device with a lens such as a television camera as a photodetector, as shown in FIG. As shown, when trying to obtain images of points Pa, PI, and P2 on the surface of the inspected material 1 on the imaging plane 17 using the lens 16, the distances an and a1 from the lens 16 to the points Po, PI, and P2 are .. Due to the difference in a2, surface 17
There is no limit to the t at which a clear image can be obtained.

この問題を解決するためには第9図に示すように、レン
ズ16の焦点距離fとして、 による結像孔@b+、b2に従って、結像面17をレン
ズ16の光軸に対し斜めに配置するか、或いは第10図
に示すように開口径りを持つ絞り18を用いて、被検査
材10表面の点P’+、Pθ。
In order to solve this problem, as shown in FIG. 9, the focal length f of the lens 16 is set so that the imaging plane 17 is arranged obliquely with respect to the optical axis of the lens 16 according to the imaging holes @b+, b2. Alternatively, as shown in FIG. 10, points P'+ and Pθ on the surface of the material to be inspected 10 are measured using a diaphragm 18 having an aperture diameter.

P2のレンズ16による結像位置P+’ 、Po’ 。Image formation positions P+' and Po' by the lens 16 of P2.

P2’の違いによる像のぼけすなわちし?ズ16からb
oの距離にある結像面17における像P1およびP2の
像P1″、P2″のぼけδ1及びδ2が許容誤差以下に
なるようにするとよい。また、第11図のようにレンズ
16によって鮮明な結像の得られる直線に沿ってリニア
アレイ式光検出器4を配置することにより、前述の問題
のない計測も可能である。被検査材1の被検査面に幅を
持たせるにはレンズ16及び光検出器4に対し被検査材
1を相対移動させる。
Is the image blurred due to the difference in P2'? 16 to b
It is preferable that the blurring δ1 and δ2 of the images P1'' and P2'' of the images P1 and P2 on the imaging plane 17 located at a distance of o be less than a permissible error. Further, by arranging the linear array photodetector 4 along a straight line where a clear image can be formed by the lens 16 as shown in FIG. 11, measurement without the above-mentioned problem is also possible. In order to give width to the surface of the material 1 to be inspected, the material 1 to be inspected is moved relative to the lens 16 and the photodetector 4.

次に、上述の光学的手法により得られた信号に基づきス
テンレス鋼板の表面状態を評価する方法を説明する。得
られる信号は基本的に2種類ある。
Next, a method for evaluating the surface condition of a stainless steel plate based on the signal obtained by the above-mentioned optical method will be explained. There are basically two types of signals obtained.

すなわち第12図(a)に示すテレビジョン画面8の如
き画像と、同図(blのような時系列信号である。
That is, an image like the television screen 8 shown in FIG. 12(a) and a time series signal like the one shown in FIG. 12 (bl).

勿論画像も時系列信号で構成されるから、両者に本質的
な差異はない。第12図(a)のような画像に基すき、
微細なヘゲ伏流に対応する輝点の個数を定められた被検
査材表面々積について計数すれば、た\゛ちに鋼板表面
状態に関する定量的な評価値が得られる。更に、第13
図(alに示すように観測される輝点の大きさを測定し
てその大きさ別の個数をめ、或いは輝点の明るさを測定
してその明るさ別の個数を計数すればより細かい定量評
価も可能である。
Of course, since images are also composed of time-series signals, there is no essential difference between the two. Based on the image shown in Figure 12(a),
By counting the number of bright spots corresponding to minute undercurrents over a predetermined surface area of the material to be inspected, a quantitative evaluation value regarding the surface condition of the steel plate can be immediately obtained. Furthermore, the 13th
As shown in Figure (al), it is possible to obtain more detailed information by measuring the size of the observed bright spots and counting the number of each size, or by measuring the brightness of the bright spots and counting the number of each brightness. Quantitative evaluation is also possible.

明るさを測定するには$12図(b)のビデオ信号を利
用できる。た\′し、この場合は第14図に示すような
複数本の走査線82〜S5に亘って検出されるような大
きな輝点の場合、これを1個の輝点であるとして認識す
るための画像処理を行う必要があり、装置構成が複雑化
し、処理時間も長くなる。なお、画像として見れば一点
であっても、数回の画面走査において検出される大きな
輝点6′を検出される度に計数することにすれば、疵個
数との一対一の鋳応は得られないが、輝点が大きい場合
には数回に亘って計数されることにより、大きさの情報
も含んだ形で定量化されることになり、目的によっては
十分使用可能であるし、しかも比較的安価で処理時間も
短かい。
To measure the brightness, the video signal shown in Figure (b) can be used. However, in this case, in the case of a large bright spot detected across multiple scanning lines 82 to S5 as shown in FIG. 14, this is recognized as a single bright spot. It is necessary to perform image processing, which complicates the device configuration and increases processing time. Note that even if it is just one point in the image, if we count the large bright spot 6' detected in several screen scans each time it is detected, it is possible to achieve a one-to-one correspondence with the number of defects. However, if the bright spots are large, they can be counted several times and quantified, including size information, and can be used for some purposes. It is relatively inexpensive and the processing time is short.

いづれの場合においても、被検査材の表面において一定
の面積、例えば2cA×2cInの欠点密度により評価
することが重要である。
In either case, it is important to evaluate the defect density in a fixed area on the surface of the material to be inspected, for example, 2 cA x 2 cIn.

(発明の効果) 以上の説明から明らかなように、本発明によりステンレ
ス鋼板の表面のヘゲ伏流の定量的検査が可能である。本
発明では大きな入射角度で光を入射させ、その方向とほ
ぼ同じ方向から被測定面を観測するので、不必要な反射
光が除去され、疵による散乱光のみを検出する即ちS/
Nの高い検査出力を得ることができ、複雑な信号処理を
不要とすることができる。
(Effects of the Invention) As is clear from the above description, the present invention enables quantitative inspection of underflow on the surface of a stainless steel plate. In the present invention, light is incident at a large angle of incidence and the surface to be measured is observed from approximately the same direction as that direction, so unnecessary reflected light is removed and only scattered light due to flaws is detected.
A high test output of N can be obtained, and complicated signal processing can be made unnecessary.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の概要を示す説明図、第2図〜第4図は
その各部の説明図、第5図はヘゲ状班顕在化方法の説明
図、第6図、第7図及び第11図は本発明の詳細な説明
図、第8図〜第10図は焦点ボケとその対策の説明図、
第12図〜第14図は評価方法の説明図、第15図はヘ
ゲ疵の説明図である。 図面で6はヘゲ伏流、6′はその画像、1はステンレス
鋼板、3は照明用光線、3′はその反射光、2は照明用
光源、4は光検出器である。 出 願−人 新日本M鐵株式会社 代理人弁理士 青 柳 稔 第1図 第2図 第3図 9′ 1′ 第4図 第5図 第6凶 第9図 第11図 第12図 (a) 第14図 一
Fig. 1 is an explanatory diagram showing the outline of the present invention, Figs. 2 to 4 are explanatory diagrams of each part thereof, Fig. 5 is an explanatory diagram of a method for making bald spots visible, Figs. FIG. 11 is a detailed explanatory diagram of the present invention, FIGS. 8 to 10 are explanatory diagrams of out-of-focus and its countermeasures,
FIGS. 12 to 14 are explanatory diagrams of the evaluation method, and FIG. 15 is an explanatory diagram of scab marks. In the drawing, 6 is the underflow, 6' is its image, 1 is a stainless steel plate, 3 is an illumination light beam, 3' is its reflected light, 2 is an illumination light source, and 4 is a photodetector. Applicant Minoru Aoyagi, Patent Attorney for Nippon M-Steel Co., Ltd. Figure 1 Figure 2 Figure 3 Figure 9'1' Figure 4 Figure 5 Figure 6 ) Figure 14-1

Claims (1)

【特許請求の範囲】 (11ヘゲ状疵を持つ恐れのあるステンレス鋼板の被検
査表面に大きな入射角で照明用光線を照射し、該被検査
表面で反射する反射光のうち照明用光線の入射側へ戻る
反射光を光検出器により受光し、該被検査表面に対応す
る該光検出器の出力中の輝点の数により鋼板表面状態の
良否を検査することを特徴とするステンレス鋼板の表面
状態検査方法。 (2)ステンレス鋼板の被検査表面は、照明用光線の照
射前に、微細なヘゲ伏流を顕在化させる処置を施されて
なることを特徴とする特許請求の範囲第1項記載のステ
ンレス鋼板の表面状態検査方法。
[Claims] (11) An illumination light beam is irradiated at a large angle of incidence on the surface of a stainless steel plate to be inspected that may have scalloped flaws, and the illumination light beam is A stainless steel plate characterized in that the reflected light returning to the incident side is received by a photodetector, and the quality of the surface condition of the steel plate is inspected based on the number of bright spots in the output of the photodetector corresponding to the surface to be inspected. Surface condition inspection method. (2) The surface of the stainless steel plate to be inspected is subjected to a treatment to make minute undercurrents apparent before being irradiated with illumination light. A method for inspecting the surface condition of a stainless steel plate as described in .
JP8539584A 1984-04-27 1984-04-27 Inspection of surface state of stainless steel plate Pending JPS60228943A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8539584A JPS60228943A (en) 1984-04-27 1984-04-27 Inspection of surface state of stainless steel plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8539584A JPS60228943A (en) 1984-04-27 1984-04-27 Inspection of surface state of stainless steel plate

Publications (1)

Publication Number Publication Date
JPS60228943A true JPS60228943A (en) 1985-11-14

Family

ID=13857579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8539584A Pending JPS60228943A (en) 1984-04-27 1984-04-27 Inspection of surface state of stainless steel plate

Country Status (1)

Country Link
JP (1) JPS60228943A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62200246A (en) * 1986-02-27 1987-09-03 Hekitoku:Kk Surface inspection and conveyance inspector for roofing tile product
JP2005221391A (en) * 2004-02-06 2005-08-18 Jfe Steel Kk Surface flaw inspection device
US7248366B2 (en) 1999-03-18 2007-07-24 Nkk Corporation Method for marking defect and device therefor
US7286234B2 (en) 2001-12-13 2007-10-23 Kokusai Gijutsu Kaihatsu Co. Ltd. Copper foil inspection device copper foil inspection method defect inspection device and defeat inspection method
JP2010230590A (en) * 2009-03-27 2010-10-14 Nisshin Steel Co Ltd Surface flaw inspection apparatus
WO2022030083A1 (en) * 2020-08-06 2022-02-10 Jfeスチール株式会社 Metal strip surface inspection device, surface inspection method, and manufacturing method

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62200246A (en) * 1986-02-27 1987-09-03 Hekitoku:Kk Surface inspection and conveyance inspector for roofing tile product
US7248366B2 (en) 1999-03-18 2007-07-24 Nkk Corporation Method for marking defect and device therefor
US7423744B2 (en) 1999-03-18 2008-09-09 Nkk Corporation Method for marking defect and device therefor
US7599052B2 (en) 1999-03-18 2009-10-06 Nkk Corporation Method for marking defect and device therefor
US7286234B2 (en) 2001-12-13 2007-10-23 Kokusai Gijutsu Kaihatsu Co. Ltd. Copper foil inspection device copper foil inspection method defect inspection device and defeat inspection method
JP2005221391A (en) * 2004-02-06 2005-08-18 Jfe Steel Kk Surface flaw inspection device
JP2010230590A (en) * 2009-03-27 2010-10-14 Nisshin Steel Co Ltd Surface flaw inspection apparatus
WO2022030083A1 (en) * 2020-08-06 2022-02-10 Jfeスチール株式会社 Metal strip surface inspection device, surface inspection method, and manufacturing method

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