JPH06294749A - Flaw inspection method for plat glass - Google Patents
Flaw inspection method for plat glassInfo
- Publication number
- JPH06294749A JPH06294749A JP8289193A JP8289193A JPH06294749A JP H06294749 A JPH06294749 A JP H06294749A JP 8289193 A JP8289193 A JP 8289193A JP 8289193 A JP8289193 A JP 8289193A JP H06294749 A JPH06294749 A JP H06294749A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- defect
- optical system
- plate glass
- brightness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、板ガラスの欠点、特
に、板ガラスの内部に存在する泡や異物等による欠点を
検査する方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for inspecting defects of plate glass, particularly defects due to bubbles and foreign substances existing inside the plate glass.
【０００２】[0002]
【従来の技術】板ガラスの欠点には、泡や異物等の内部
欠点と、キズ、凹凸、ダスト等の付着といった外部欠点
とがあり、これらの欠点のうち、外部欠点については、
洗浄や研磨などを行なうことにより良品として再生させ
ることができる。しかし、内部欠点については、再生が
不可能な場合が多い。そこで、内部欠点か外部欠点かを
区別して検査する必要がある。2. Description of the Related Art Defects of sheet glass include internal defects such as bubbles and foreign substances, and external defects such as scratches, irregularities, and adhesion of dust. Of these defects, the external defects are:
By cleaning and polishing, it can be regenerated as a good product. However, with respect to internal defects, reproduction is often impossible. Therefore, it is necessary to distinguish between internal defects and external defects for inspection.
【０００３】従来提供されている板ガラスの欠点検査装
置としては、例えば、特開昭５１−１１８４号公報に記
載のように、板ガラスの表面から法線に対して所定の入
射角でレーザビームを投射させて表面を走査させ、一方
の面側に反射光用受光器を設置し、他方の面側に透過光
用受光器を設置して、反射光または透過光を検出するこ
とにより板ガラスの欠点を自動的に検査する方式のもの
が多い。An example of a defect inspection device for a plate glass conventionally provided is to project a laser beam from a surface of the plate glass at a predetermined incident angle with respect to a normal line as described in Japanese Patent Application Laid-Open No. 51-1184. Then, the surface is scanned and the light receiver for reflected light is installed on one surface side, and the light receiver for transmitted light is installed on the other surface side. There are many automatic inspection methods.
【０００４】[0004]
【発明が解決しようとする課題】上記の如く反射光また
は透過光を検出する方式は、板ガラスの内部欠点のみな
らず表面に付着しているダスト等の外部欠点をも検出す
ることになり、これらを区別することができないという
問題点があった。The method of detecting reflected light or transmitted light as described above detects not only internal defects of the plate glass but also external defects such as dust adhering to the surface. There was a problem that they could not be distinguished.
【０００５】本発明は、従来技術の上記問題点に鑑みて
提案されたもので、その目的とするところは、板ガラス
の内部欠点と外部欠点とを区別して、特に内部欠点を効
率よく迅速に検査することができる板ガラスの欠点検査
方法を提供することにある。The present invention has been proposed in view of the above problems of the prior art, and its object is to discriminate between internal defects and external defects of a sheet glass, and in particular, inspect internal defects efficiently and promptly. It is an object of the present invention to provide a method of inspecting a glass sheet for defects.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するた
め、本願の第１発明は、板ガラスの側端面からガラス内
部に照明を当て、当該板ガラスの表面側から当該板ガラ
スを撮像光学系により撮像して一定面積当たりの画像の
明るさを検出して欠点を判定するようにしたものであ
る。In order to achieve the above object, the first invention of the present application is to illuminate the inside of the glass from the side end surface of the glass sheet, and to image the glass sheet from the surface side of the glass sheet by an imaging optical system. The defect of the image is determined by detecting the brightness of the image per certain area.
【０００７】また、本願の第２発明は、板ガラスの側端
面からガラス内部に照明を当て、当該板ガラスの表面側
から当該板ガラスを撮像光学系により撮像して一定面積
当たりの画像の明るさを検出し、これとは別に、当該板
ガラスの表面に照明を当て、この状態での当該板ガラス
を撮像光学系により撮像して一定面積当たりの画像の明
るさを検出し、両者の検出値の比によって欠点を判定す
るようにしたものである。In the second invention of the present application, the inside of the glass is illuminated from the side end surface of the glass sheet, and the glass sheet is imaged from the front surface side of the glass sheet by an image pickup optical system to detect the brightness of an image per fixed area. However, separately from this, the surface of the plate glass is illuminated, and the plate glass in this state is imaged by the imaging optical system to detect the brightness of the image per certain area, and the defect of the detected value of both is detected. Is determined.
【０００８】さらに、本願の第３発明は、板ガラスの側
端面からガラス内部に照明を当て、当該板ガラスの表面
側から当該板ガラスを撮像光学系により撮像して一定面
積当たりの画像の明るさから欠点部分の位置を検出し、
当該検出位置を上記撮像光学系よりも倍率の大きい撮像
光学系により撮像して欠点を判定するようにしたもので
ある。Further, according to the third invention of the present application, illumination is applied to the inside of the glass from the side end surface of the glass sheet, and the glass sheet is imaged from the front surface side of the glass sheet by an image pickup optical system. Detects the position of the part,
The detection position is imaged by an imaging optical system having a magnification higher than that of the imaging optical system to determine a defect.
【０００９】本願の第４発明は、板ガラスの側端面から
ガラス内部に照明を当て、当該板ガラスの表面側から当
該板ガラスを撮像光学系により撮像して一定面積当たり
の画像の明るさを検出し、これとは別に、当該板ガラス
の表面に照明を当て、この状態での当該板ガラスを撮像
光学系により撮像して一定面積当たりの画像の明るさを
検出し、両者の検出値の比によって欠点部分の位置を検
出し、当該検出位置を上記撮像光学系よりも倍率の大き
い撮像光学系により撮像して欠点を判定するようにした
ものである。According to a fourth aspect of the present invention, illumination is applied to the inside of the glass from the side end surface of the glass sheet, and the glass sheet is imaged from the surface side of the glass sheet by an image pickup optical system to detect the brightness of an image per fixed area, Separately from this, the surface of the plate glass is illuminated, and the plate glass in this state is imaged by an imaging optical system to detect the brightness of the image per certain area, and the defect portion of the defect is determined by the ratio of the detection values of the two. The position is detected, and the detected position is imaged by an imaging optical system having a magnification higher than that of the imaging optical system to determine a defect.
【００１０】本願の第５発明は、板ガラスの表面に照明
を当て、その透過光画像を撮像光学系により撮像して、
一定面積当たりの画像の明るさから欠点の有無を検出
し、欠点の存在により、当該板ガラスの側端面からガラ
ス内部に照明を当て、当該板ガラスの表面側から当該板
ガラスを撮像光学系により撮像して一定面積当たりの画
像の明るさから欠点を判定するようにしたものである。According to a fifth aspect of the present invention, the surface of the plate glass is illuminated and a transmitted light image thereof is picked up by an image pickup optical system,
The presence or absence of defects is detected from the brightness of the image per fixed area, and the presence of the defects illuminates the inside of the glass from the side end surface of the plate glass, and the plate glass is imaged by the imaging optical system from the surface side of the plate glass. The defect is determined based on the brightness of the image per fixed area.
【００１１】本願の第６発明は、板ガラスの表面に照明
を当て、その透過光画像を撮像光学系により撮像して、
一定面積当たりの画像の明るさから欠点の有無を検出
し、欠点の存在により、当該板ガラスの側端面からガラ
ス内部に照明を当て、当該板ガラスの表面側から当該板
ガラスを撮像光学系により撮像して一定面積当たりの画
像の明るさを検出し、これとは別に、当該板ガラスの表
面に照明を当て、この状態での当該板ガラスを撮像光学
系により撮像して一定面積当たりの画像の明るさを検出
し、両者の検出値の比によって欠点を判定するようにし
たものである。According to a sixth aspect of the present invention, illumination is applied to the surface of the plate glass and a transmitted light image thereof is picked up by an image pickup optical system,
The presence or absence of defects is detected from the brightness of the image per fixed area, and the presence of the defects illuminates the inside of the glass from the side end surface of the plate glass, and the plate glass is imaged by the imaging optical system from the surface side of the plate glass. The brightness of the image per fixed area is detected, and separately from this, the surface of the plate glass is illuminated, and the plate glass in this state is imaged by the imaging optical system to detect the brightness of the image per fixed area. However, the defect is determined based on the ratio of the detected values of both.
【００１２】本願の第７発明は、板ガラスの表面をレー
ザービームで走査し、欠点からの散乱光を光検出器で検
出して、欠点の有無を検出し、欠点の存在により、当該
板ガラスの側端面からガラス内部に照明を当て、当該板
ガラスの表面側から当該板ガラスを撮像光学系により撮
像して一定面積当たりの画像の明るさを検出して欠点を
判定するようにしたものである。According to a seventh aspect of the present invention, the surface of the glass sheet is scanned with a laser beam, the scattered light from the defect is detected by a photodetector to detect the presence or absence of the defect, and the presence of the defect causes the glass sheet side to move. Illumination is applied from the end face to the inside of the glass, and the plate glass is imaged from the surface side of the plate glass by an image pickup optical system to detect the brightness of the image per certain area and to judge the defect.
【００１３】本願の第８発明は、板ガラスの表面をレー
ザービームで走査し、欠点からの散乱光を光検出器で検
出して、欠点の有無を検出し、欠点の存在により、当該
板ガラスの側端面からガラス内部に照明を当て、当該板
ガラスの表面側から当該板ガラスを撮像光学系により撮
像して一定面積当たりの画像の明るさを検出し、これと
は別に、当該板ガラスの表面に照明を当て、この状態で
の当該板ガラスを撮像光学系により撮像して一定面積当
たりの画像の明るさを検出し、両者の検出値の比によっ
て欠点を判定するようにしたものである。The eighth invention of the present application is to detect the presence or absence of a defect by scanning the surface of the plate glass with a laser beam and detecting scattered light from the defect with a photodetector. Illuminate the inside of the glass from the end face, detect the brightness of the image per certain area by imaging the plate glass from the surface side of the plate glass with an imaging optical system, and separately illuminate the surface of the plate glass. In this state, the plate glass is imaged by the imaging optical system to detect the brightness of the image per certain area, and the defect is determined by the ratio of the detected values of the two.
【００１４】[0014]
【作用】板ガラスの側端面からガラス内部に照明を当て
ると、光は板ガラス内外の媒質差によりその境界面とな
る上下面で略全反射しながら他端に向けて伝播し、途中
に泡や異物等の内部欠点があると、そこで光が乱反射す
るため、これを板ガラスの表面側から観測すると、明る
く輝いて見える。板ガラスの表面に外部欠点（ダスト、
キズ、凹凸等）が存在する場合、板ガラスの側端面から
の照明が漏洩光となり外部欠点も光って見えるが、明る
さを比較する一定面積以下の範囲内では内部欠点の明る
さに比べて暗く見える。When the inside of the plate glass is illuminated with light from the side end face of the plate glass, the light propagates toward the other end while being almost totally reflected by the upper and lower surfaces that are the boundary surfaces of the plate glass due to the medium difference between the inside and the outside of the plate glass, and bubbles and foreign substances are included in the middle. If there is an internal defect such as light, light is diffusely reflected there, and when it is observed from the surface side of the plate glass, it looks bright. External defects (dust,
If there are scratches, unevenness, etc.), the illumination from the side edge surface of the plate glass will be leaked light and external defects will also appear to be shining, but the brightness will be darker than the internal defects within a certain area when comparing the brightness. appear.
【００１５】そこで、第１発明は、板ガラスを側端面か
ら照射して一定面積当たりの明るさを検知して欠点判定
を行なうものである。Therefore, the first aspect of the present invention illuminates the plate glass from the side end face to detect the brightness per a certain area and makes a defect determination.
【００１６】第２発明は、同一欠点を側端面からの照明
で撮像した撮像画像の明るさと、表面を直接照明したと
きの撮像画像の明るさとの比を比べると、外部欠点の場
合は非常に小さく、内部欠点の場合は大きい。この比の
大きさが一定値以上あるかどうかで内部欠点か外部欠点
かの判定を行なうものである。According to the second aspect of the present invention, comparing the brightness of the picked-up image picked up with the illumination from the side end face with the same defect, and the brightness of the picked-up image when the surface is directly illuminated, in the case of an external defect, it is extremely high. Small, large for internal defects. Whether the internal defect or the external defect is determined based on whether or not the magnitude of this ratio exceeds a certain value.
【００１７】第３発明は、始めに側端面から照明を当
て、板ガラスの表面側から撮像光学系により撮像して、
一定面積当たりの画像の明るさが一定値をこえる部分を
精査する欠点として検出して、その検出位置を拡大光学
系により撮像して、欠点の大きさや形状等についての精
確な検査を行なうものである。According to a third aspect of the invention, first, illumination is applied from the side end face, and an image is picked up from the front side of the plate glass by an image pickup optical system,
It detects a portion where the brightness of the image per certain area exceeds a certain value as a defect to be closely examined, and images the detected position with a magnifying optical system to perform an accurate inspection on the size and shape of the defect. is there.
【００１８】第４発明は、第２発明の方法で欠点部分の
位置を検出し、その検出位置を拡大光学系により撮像し
て、欠点の寸法や形状等についての精確な検査を行なう
ものである。According to a fourth aspect of the invention, the position of the defect portion is detected by the method of the second invention, and the detected position is imaged by a magnifying optical system to perform an accurate inspection of the size and shape of the defect. .
【００１９】第５発明は、板ガラスの表面に照明を当
て、その透過光画像を撮像光学系により撮像して一定面
積当たりの画像の明るさから欠点の有無を先ず検出し、
欠点の存在により第１発明の方法で欠点判定を行なうも
のである。According to a fifth aspect of the invention, the surface of the plate glass is illuminated, the transmitted light image thereof is picked up by an image pickup optical system, and the presence or absence of a defect is first detected from the brightness of the image per fixed area,
Due to the existence of defects, the method of the first aspect of the invention determines the defects.
【００２０】第６発明は、板ガラスの表面から照明を当
て、その透過光画像を撮像光学系により撮像して一定面
積当たりの画像の明るさから欠点の有無を先ず検出し、
欠点の存在により第２発明の方法で欠点判定を行なうも
のである。According to a sixth aspect of the present invention, illumination is applied from the surface of a plate glass, a transmitted light image thereof is picked up by an image pickup optical system, and the presence or absence of a defect is first detected from the brightness of the image per a fixed area,
Due to the existence of defects, the method of the second invention determines the defects.
【００２１】第７発明は、板ガラスの表面をレーザービ
ームで走査し、欠点からの散乱光を光検出器で検出し
て、欠点の有無を検出し、欠点の存在により、第１発明
の方法で欠点判定を行なうものである。In the seventh invention, the surface of the glass plate is scanned with a laser beam, the scattered light from the defects is detected by a photodetector, and the presence or absence of the defects is detected. The defect is determined.
【００２２】第８発明は、板ガラスの表面をレーザービ
ームで走査し、欠点からの散乱光を光検出器で検出し
て、欠点の有無を検出し、欠点の存在により、第２発明
の方法で欠点判定を行なうものである。In the eighth invention, the surface of the plate glass is scanned with a laser beam, the scattered light from the defects is detected by a photodetector, and the presence or absence of the defects is detected. The defect is determined.
【００２３】[0023]
【実施例】図１は本願の第１発明の検査方法説明図、図
２は本願の第２発明の検査方法説明図、図３は本願の第
３発明の検査方法説明図、図４は本願の第４発明の検査
方法説明図、図５は本願の第５発明の検査方法説明図、
図６は本願の第６発明の検査方法説明図、図７は本願の
第７発明の検査方法説明図、図８は本願の第８発明の検
査方法説明図、図９は内部欠点の検査原理説明図、図１
０は一定面積当たりの内部欠点と外部欠点であるダスト
との明るさの比較説明用グラフである。DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is an explanatory diagram of an inspection method of the first invention of the present application, FIG. 2 is an explanatory diagram of an inspection method of the second invention of the present application, FIG. 3 is an explanatory diagram of the inspection method of the third invention of the present application, and FIG. FIG. 5 is an explanatory view of the inspection method of the fourth invention, FIG. 5 is an explanatory view of the inspection method of the fifth invention of the present application,
6 is an explanatory view of the inspection method of the sixth invention of the present application, FIG. 7 is an explanatory view of the inspection method of the seventh invention of the present application, FIG. 8 is an explanatory view of the inspection method of the eighth invention of the present application, and FIG. 9 is an internal defect inspection principle. Explanatory drawing, Figure 1
0 is a graph for comparing the brightness of dust, which is an internal defect and an external defect, per fixed area.
【００２４】先ず、本願の第１発明は、図１に示すよう
に、板ガラス（１）の側端面からガラス内部に照射光源
（２）によって照明を当て、板ガラス（１）の表面側か
ら板ガラス（１）の表面を撮像光学系（３）により撮像
してその画像信号を処理し、一定面積当たり例えば、３
００μｍ四角以下の明るさを比較する一定面積当たりの
欠点部分の明るさが、ある一定値以上であるかどうかで
欠点判定を行なうようにしたものである。照射光源
（２）は、図９に示すように、例えば、ハロゲンランプ
（２ａ）が使用され、板ガラス（１）の側端面以外への
光の漏洩を防止するため遮光スリットまたは遮光カバー
（２ｂ）が設置されている。このように板ガラス（１）
の側端面から照明を当てると、光（ａ）は、板ガラス
（１）の内外の媒質差によりその境界面となる上下面で
略全反射しながら他端に向けて伝播する。しかし、途中
に泡や異物等の内部欠点（ｂ）があると、そこで光
（ａ）が乱反射するため、この乱反射光の一部が板ガラ
ス（１）の上下面から外部に出る。これを撮像光学系
（３）により撮像する。この撮像光学系（３）は、３０
０μｍ四角以下の解像限界を持つ撮像系例えば、ＣＣＤ
カメラを使用する。この画像信号を処理し、３００μｍ
四角以下の明るさを比較する一定面積当たりの明るさが
一定値以上の部分があるか否かを検出させ、無ければ良
品とし、有れば不良品と判定する。上記３００μｍ四角
以下の一定面積当たりの明るさで判定する理由は次の通
りである。即ち、側端面からの照明の場合でも、板ガラ
ス（１）の表面上の外部欠点であるダストもガラス内外
の洩れた光のためにある程度は光る。特に、ダストの面
積が大きい場合はダストにより乱反射する散乱光総量は
内部欠点からの散乱光総量を上回ることもある。First, according to the first invention of the present application, as shown in FIG. 1, illumination is applied from the side end surface of the plate glass (1) to the inside of the glass by an irradiation light source (2), and the plate glass (1) is irradiated from the front side of the plate glass (1). The surface of 1) is imaged by the imaging optical system (3), the image signal is processed, and, for example, 3
The defect determination is performed based on whether or not the brightness of a defect portion per certain area for comparing the brightness of a square of 00 μm or less is equal to or more than a certain constant value. As the irradiation light source (2), for example, a halogen lamp (2a) is used as shown in FIG. 9, and a light-shielding slit or a light-shielding cover (2b) is provided to prevent light from leaking to other than the side end surface of the plate glass (1). Is installed. In this way flat glass (1)
When the light is applied from the side end surface of the plate, the light (a) propagates toward the other end while being substantially totally reflected by the upper and lower surfaces that are the boundary surfaces of the plate glass (1) due to the medium difference between the inside and the outside. However, if there is an internal defect (b) such as a bubble or a foreign substance on the way, the light (a) is diffusely reflected there, and a part of this diffusely reflected light goes out from the upper and lower surfaces of the plate glass (1) to the outside. This is imaged by the imaging optical system (3). This imaging optical system (3) is
Imaging system with resolution limit of 0 μm square or less, eg CCD
Use a camera. This image signal is processed to 300 μm
It is detected whether or not there is a portion where the brightness per constant area is equal to or higher than a constant value, which compares the brightness below the square, and if there is not, it is determined as a good product, and if there is, it is determined as a defective product. The reason for making the determination based on the brightness per fixed area of the 300 μm square or less is as follows. That is, even in the case of illumination from the side end face, dust, which is an external defect on the surface of the plate glass (1), also shines to some extent due to leaked light inside and outside the glass. Especially when the area of dust is large, the total amount of scattered light diffusely reflected by the dust may exceed the total amount of scattered light from internal defects.
【００２５】しかし、このようなダストも例えば、３０
０μｍ四角以下の面積に分けて一定面積当たりの明るさ
で比較すると、内部欠点（ｂ）よりも暗くなる。この明
るさを比較する一定面積の大きさを測定対象としている
内部欠点（ｂ）の光っている部分の大きさにまで小さく
してやると、図１０に示すように、明るさのもっとも大
きな差が得られ判別が容易となる。しかし、この明るさ
比較のための一定面積を小さくすることは、撮像光学系
（３）の倍率を高くする、即ち、光学系の視野を狭くす
ることとなり、多数の撮像光学系（３）を並べる必要が
出てくる。このことはコストを高くするため、必要以上
に比較面積を小さくすることは望ましくない。However, such dust is, for example, 30
When divided into areas of 0 μm square or smaller and compared in terms of brightness per certain area, the brightness becomes darker than the internal defect (b). If the size of a certain area for comparing the brightness is reduced to the size of the illuminated part of the internal defect (b) to be measured, the largest difference in brightness is obtained as shown in FIG. Therefore, the discrimination becomes easy. However, reducing the certain area for this brightness comparison increases the magnification of the image pickup optical system (3), that is, narrows the field of view of the optical system, and thus a large number of image pickup optical systems (3) are used. You need to line them up. Since this increases the cost, it is not desirable to reduce the comparison area more than necessary.
【００２６】従って、明るさを比較する一定面積をいく
らにするかは、欠点判定すべき対象により選ぶべきであ
る。例えば、 対象欠点 明るさ比較の一定面積 １００μｍ以上の欠点 ２００〜３００μｍ四角 ５０μｍ以上の欠点 １００〜２００μｍ四角 対象欠点がさらに小さくなれば、明るさ比較のための一
定面積はさらに小さくしなければならない。Therefore, how much the constant area for comparing the brightness should be made should be selected according to the object to be subjected to the defect judgment. For example, target defect: constant area for brightness comparison 100 μm or more defect 200-300 μm square 50 μm or more defect 100-200 μm square If the target defect becomes smaller, the constant area for brightness comparison must be smaller.
【００２７】以上が本願の第１発明である。The above is the first invention of the present application.
【００２８】上述のように、判定すべき欠点対象が小さ
くなると明るさ比較のための一定面積が小さくなりすぎ
て、撮像光学系（３）の配置等に困難を生じる。As described above, when the defect target to be judged becomes small, the fixed area for brightness comparison becomes too small, which makes it difficult to arrange the image pickup optical system (3).
【００２９】このようなとき、側端面からの照明による
撮像画像の明るさと、表面に照明を当てることによる反
射画像の明るさとの比を欠点判定に用いると、撮像光学
系（３）の分解能を上げずに済む。In such a case, if the ratio of the brightness of the picked-up image by the illumination from the side end face to the brightness of the reflected image by illuminating the surface is used for the defect determination, the resolution of the pick-up optical system (3) is determined. You don't have to raise it.
【００３０】第２発明では、図２に示すように、板ガラ
ス（１）の側端面から照明して板ガラス（１）内部に光
（ａ）を導入する照明系、即ち、照射光源（２）と、板
ガラス（１）の表面を直接照明する照明系（４）と、ま
た、板ガラス（１）の表面を撮像する光学系（３）を用
意する。そして、側端面照明のみによる撮像画像の一定
面積当たりの像の明るさと、側端面照明をせずに板ガラ
ス（１）の表面を直接照射して同一または同様の撮像光
学系（３）にて撮像した反射光画像の一定面積当たりの
像の明るさとの比が一定値以上あるかどうかで欠点判定
を行なう方法である。In the second invention, as shown in FIG. 2, an illumination system for illuminating the side end surface of the plate glass (1) to introduce the light (a) into the plate glass (1), that is, an irradiation light source (2). An illumination system (4) for directly illuminating the surface of the plate glass (1) and an optical system (3) for imaging the surface of the plate glass (1) are prepared. Then, the brightness of the image per fixed area of the picked-up image only by the side end face illumination and the surface of the plate glass (1) without directing the side end face illumination and the same or similar image pickup optical system (3) picks up the image. In this method, the defect determination is performed based on whether the ratio of the reflected light image to the brightness of the image per certain area is a certain value or more.
【００３１】即ち、表面上のダストの場合、側端面から
板ガラス（１）の内部を照明したときに得られる撮像画
像の明るさは、洩れ光に基づくものであるので、板ガラ
ス（１）の表面を直接照明したときに得られる撮像画像
に比べると極めて暗い。一方、板ガラス（１）内部の欠
点の場合、側端面から板ガラス（１）の内部を照明した
ときに得られる撮像画像の明るさは、板ガラス（１）の
表面を直接照明したときに得られる撮像画像の明るさと
比べてもあまり変わらない。That is, in the case of dust on the surface, the brightness of the captured image obtained when the inside of the plate glass (1) is illuminated from the side end surface is based on the leaked light, so the surface of the plate glass (1) is Is much darker than the captured image obtained when the object is directly illuminated. On the other hand, in the case of a defect inside the plate glass (1), the brightness of the captured image obtained when the inside of the plate glass (1) is illuminated from the side end surface is the image obtained when the surface of the plate glass (1) is directly illuminated. It doesn't change much compared to the brightness of the image.
【００３２】従って、同一欠点を側端面からの照明で撮
像した撮像画像の明るさと、表面を直接照明したときの
撮像画像の明るさとの比を比べると、外部欠点であるダ
ストの場合は非常に小さく、内部欠点（ｂ）の場合は大
きい。この比の大きさが一定値以上あるかどうかで内部
欠点か外部欠点かを判定することができる。Therefore, comparing the brightness of the picked-up image obtained by picking up the same defect with illumination from the side end face and the brightness of the picked-up image when the surface is directly illuminated, the dust which is an external defect is extremely high. Small, large in case of internal defect (b). An internal defect or an external defect can be determined by whether or not the magnitude of this ratio exceeds a certain value.
【００３３】この方法の場合は、第１発明と異なり感度
さえあれば、明るさを比較する面積の大きさにはあまり
依存しない。従って、撮像光学系（３）に要求される分
解能は、第１発明に比べると粗い物でよい。但し、照明
系は２ついるが、撮像光学系（３）の数は少なくて済
む。In the case of this method, unlike the first invention, as long as it has sensitivity, it does not much depend on the size of the area for comparing brightness. Therefore, the resolution required for the imaging optical system (3) may be coarser than that of the first invention. However, although there are two illumination systems, the number of imaging optical systems (3) can be small.
【００３４】次に、欠点の検査の場合には、欠点の種類
とともにその大きさや形状を検査する必要がある場合が
ある。例えば、泡、異物等は、その大きさで良否の判定
が異なる。こうした欠点の大きさや形状を精確に検査す
るには、その大きさに対応した拡大光学系（顕微鏡系）
が必要であるが、大きな板ガラス（１）の全面をこの拡
大光学系で走査することは多くの時間を必要とする。Next, in the case of defect inspection, it may be necessary to inspect the size and shape of the defect as well as its type. For example, a bubble, a foreign substance, and the like have different quality judgments depending on their sizes. To accurately inspect the size and shape of such defects, a magnifying optical system (microscope system) corresponding to the size
However, scanning the entire surface of the large plate glass (1) with this magnifying optical system requires a lot of time.
【００３５】そこで、第３発明では、図３に示すよう
に、第１段階で始めに板ガラス（１）の側端面から照明
を当て、表面側から撮像光学系（３）により撮像して、
その画像の一定面積当たりの明るさが一定値をこえる部
分を精査する欠点として検出して、次に第２段階でその
検出位置を拡大光学系（５）により撮像して精確な検査
を行なう。この場合、板ガラス（１）の反対側に照射光
源（６）を設置し、透過光に基づく画像を処理すること
により検出させるものである。また、上記第１段階での
撮像光学系（３）の撮像画像を処理して精査する必要の
ある欠点部分の位置を検出し、この位置へ第２段階の拡
大光学系（５）と板ガラス（１）の何れかをサーボモー
タ等により２次元的に制御移動させるものである。第１
段階の撮像光学系（３）の倍率は、例えば、１／１０と
され、第２段階の拡大光学系（５）の倍率は、例えば、
５倍とされる。Therefore, in the third invention, as shown in FIG. 3, in the first step, first, the side end face of the plate glass (1) is illuminated, and the image is picked up from the front side by the image pickup optical system (3).
A portion in which the brightness per constant area of the image exceeds a constant value is detected as a defect to be inspected. Then, in the second step, the detection position is imaged by the magnifying optical system (5) to perform an accurate inspection. In this case, the irradiation light source (6) is installed on the opposite side of the plate glass (1) and the image based on the transmitted light is processed for detection. In addition, the position of the defective portion that needs to be processed and examined by processing the imaged image of the imaging optical system (3) in the first stage is detected, and the magnifying optical system (5) in the second stage and plate glass ( Any one of 1) is two-dimensionally controlled and moved by a servomotor or the like. First
The magnification of the imaging optical system (3) at the stage is, for example, 1/10, and the magnification of the magnifying optical system (5) at the second stage is, for example,
It is supposed to be 5 times.
【００３６】また、第４発明は、図４に示すように、板
ガラス（１）の側端面からガラス内部に照明を当て、当
該板ガラス（１）の表面側から当該板ガラス（１）を撮
像光学系（３）により撮像して一定面積当たりの画像の
明るさを検出し、これとは別に、当該板ガラス（１）の
表面に照明を当て、この状態での当該板ガラス（１）を
撮像光学系（３）により撮像して一定面積当たりの画像
の明るさを検出し、両者の検出値の比によって精査すべ
き欠点部分の位置を検出し、当該検出位置を上記撮像光
学系（３）よりも倍率の大きい拡大光学系（５）により
撮像して欠点の大きさや形状についての精確な検査をし
て欠点判定を行なうものである。As shown in FIG. 4, the fourth invention illuminates the inside of the glass from the side end surface of the glass sheet (1) and picks up the glass sheet (1) from the surface side of the glass sheet (1). (3) is used to detect the brightness of the image per fixed area, and separately from this, the surface of the plate glass (1) is illuminated, and the plate glass (1) in this state is imaged by an optical system ( The brightness of the image per fixed area is detected by 3), the position of the defect portion to be examined closely is detected by the ratio of the detection values of the two, and the detection position is magnified more than the imaging optical system (3). The image is picked up by the magnifying optical system (5) having a large size, and the size and shape of the defect are accurately inspected to determine the defect.
【００３７】こうした拡大光学系（５）による精確な検
査を行なう必要のある欠点場所は、１枚の板ガラス
（１）当たり、多くて数箇所であり、もちろん欠点場所
のない板ガラス（１）も多い。即ち、第３発明、第４発
明は、高速で、かつ、精確な欠点検査方法を提供してい
る。There are at most a few defective spots for one sheet of glass (1) that need to be accurately inspected by the magnifying optical system (5), and of course, there are many sheet glasses (1) having no defective spot. . That is, the third invention and the fourth invention provide a high-speed and accurate defect inspection method.
【００３８】また、板ガラス（１）の欠点の中でキズ
は、許容大きさが極めて小さく、かつ、光の散乱能力が
弱いため、キズを検査する場合は、できる限り検出感度
を高める方法が用いられる。Among the drawbacks of the plate glass (1), scratches have an extremely small allowable size and weak light scattering ability. Therefore, when inspecting scratches, a method of increasing detection sensitivity as much as possible is used. To be
【００３９】例えば、照明系にも数万ルクスから数十万
ルクスのハロゲンランプ光源や、レーザービーム光源を
表面から照射して用いる必要があり、第１発明又は第２
発明の側端面からの照明による撮像検査では広い板ガラ
ス（１）の中からの検出は困難である。For example, it is necessary to irradiate the illumination system with a halogen lamp light source of tens of thousands to hundreds of thousands of lux or a laser beam light source from the surface, and use the first or second invention.
It is difficult to detect from the wide plate glass (1) by the imaging inspection by illumination from the side end surface of the invention.
【００４０】またこれらのキズを対象とした一般の検出
方法では、キズの大きさの検査も、他の板ガラス（１）
の内部欠点（ｂ）との区別も散乱光の強さと、散乱光の
角度から判定するため精確さが不十分である。In addition, in the general detection method for these scratches, the size of the scratches can be inspected with another plate glass (1).
The internal defect (b) is distinguished from the internal defect (b) based on the intensity of scattered light and the angle of scattered light, so that the accuracy is insufficient.
【００４１】そこで、第５発明では、図５に示すよう
に、板ガラス（１）の表面に照射光源（６）により照明
を当て、その透過光画像を撮像光学系（３）により撮像
して、一定面積当たりの画像の明るさから欠点の有無を
検出し、欠点の存在により、後は第１発明の方法で欠点
の判定を行なうものである。Therefore, in the fifth invention, as shown in FIG. 5, the surface of the plate glass (1) is illuminated by the irradiation light source (6), and the transmitted light image is taken by the imaging optical system (3), The presence / absence of a defect is detected from the brightness of an image per fixed area, and the presence of the defect is followed by the determination of the defect by the method of the first invention.
【００４２】また、第６発明は、図６に示すように、第
１段階を第５発明の第１段階と同様に板ガラス（１）の
表面に照射光源（６）により照明を当て、その透過光画
像を撮像光学系（３）により撮像して、一定面積当たり
の画像の明るさから欠点の有無を検出し、欠点の存在に
より、後は第２発明の方法で欠点判定を行なうものであ
る。Further, in the sixth invention, as shown in FIG. 6, in the same manner as the first step of the fifth invention, the surface of the plate glass (1) is illuminated by the irradiation light source (6) and transmitted through the first step. An optical image is picked up by the image pickup optical system (3), the presence or absence of a defect is detected from the brightness of the image per certain area, and the defect is determined by the method of the second invention because of the existence of the defect. .
【００４３】上記欠点の判定は、その欠点場所を拡大光
学系（５）により撮像し、板ガラス（１）の側端面より
照明し、欠点部分に光を導入し、拡大光学系（５）にて
撮像した撮像画像の一定面積当たりの明るさの比較によ
り内部欠点か外部欠点かを判定するようにしてもよい。In the determination of the above-mentioned defect, the defect location is imaged by the magnifying optical system (5), illuminated from the side end surface of the plate glass (1), light is introduced into the defect portion, and the magnifying optical system (5) is used. The internal defect or the external defect may be determined by comparing the brightness of a captured image per fixed area.
【００４４】第７発明では、図７に示すように、板ガラ
ス（１）の表面をレーザー走査装置（７）のレーザービ
ームで走査し、欠点からの散乱光（反射光）を光検出器
（８）で検出して、欠点の有無を検出し、欠点の存在に
より、後は、第１発明の方法で欠点判定を行なわせたも
のである。上記レーザー走査装置（７）は、例えば、レ
ーザー発生装置（７ａ）が発生するレーザービームを振
動型のスキャナミラー（７ｂ）と一定方向に回転するポ
リゴンミラー（７ｃ）とで反射させて板ガラス（１）の
表面全域を走査させるものである。In the seventh invention, as shown in FIG. 7, the surface of the plate glass (1) is scanned by a laser beam of a laser scanning device (7), and scattered light (reflected light) from a defect is detected by a photodetector (8). ), The presence / absence of a defect is detected, and if there is a defect, then the defect determination is performed by the method of the first invention. In the laser scanning device (7), for example, a laser beam generated by a laser generator (7a) is reflected by a vibrating scanner mirror (7b) and a polygon mirror (7c) that rotates in a certain direction, and a plate glass (1 ) Is to scan the entire surface.
【００４５】第８発明は、図８に示すように、板ガラス
（１）の表面を上記図７と同様なレーザー走査装置
（７）のレーザービームで走査し、欠点からの散乱光を
光検出器（８）で検出して、欠点の有無を検出し、欠点
の存在により、後は、第２発明の方法で欠点判定を行な
わせたものである。In the eighth invention, as shown in FIG. 8, the surface of the plate glass (1) is scanned with a laser beam of a laser scanning device (7) similar to that shown in FIG. 7, and scattered light from defects is detected by a photodetector. By detecting in (8), the presence or absence of a defect is detected, and if there is a defect, the defect is subsequently judged by the method of the second invention.
【００４６】さらに、板ガラス（１）の表面をレーザー
走査装置（７）のレーザービームで走査し、欠点からの
散乱光を光検出器（８）で検出して、欠点の有無を検出
し、この後、必要に応じて表面を照明して拡大光学系
（５）にて撮像し、その像の一定面積当たりの像の明る
さと、前記側端面から照明したときの像の一定面積当た
りの明るさとの比より、内部欠点か、外部欠点かを判定
するようにしてもよい。この場合は、拡大光学系（５）
を用いているため、像の明るさ比較のための面積が極め
て小さく、小さな内部欠点に対しても精確な判定ができ
る。またさらに、同じ拡大光学系（５）を用いて、欠点
の精確な大きさ測定も可能である。Further, the surface of the plate glass (1) is scanned by the laser beam of the laser scanning device (7), the scattered light from the defect is detected by the photodetector (8), and the presence or absence of the defect is detected. Then, if necessary, the surface is illuminated and an image is taken by the magnifying optical system (5), and the brightness of the image per fixed area of the image and the brightness per fixed area of the image when illuminated from the side end face. The internal defect or the external defect may be determined based on the ratio. In this case, the magnifying optical system (5)
Since the area for comparing the brightness of images is extremely small, it is possible to accurately determine even a small internal defect. Furthermore, the same magnifying optical system (5) can be used to accurately measure the size of a defect.
【００４７】上記各発明において、外部欠点と区別して
内部欠点（ｂ）を検出させ、一定値以上の大きさの欠点
が無ければ良品とし、有れば不良品としてカレット化さ
れる。そして、外部欠点の場合では洗浄工程或いは研磨
工程へ送って再生処理させるものである。In each of the above inventions, the internal defect (b) is detected in distinction from the external defect, and if there is no defect of a certain value or more, it is a good product, and if there is, it is culled as a defective product. In the case of an external defect, it is sent to a cleaning process or a polishing process to be regenerated.
【００４８】[0048]
【発明の効果】本発明によれば、板ガラスの内部欠点を
外部欠点と区別して効率よく簡単迅速に検査することが
できる。According to the present invention, it is possible to efficiently and simply inspect a glass sheet by distinguishing internal defects from external defects.
【図１】本願の第１発明の検査方法説明図。FIG. 1 is an explanatory diagram of an inspection method according to a first invention of the present application.
【図２】本願の第２発明の検査方法説明図。FIG. 2 is an explanatory diagram of an inspection method of a second invention of the present application.
【図３】本願の第３発明の検査方法説明図。FIG. 3 is an explanatory diagram of an inspection method of a third invention of the present application.
【図４】本願の第４発明の検査方法説明図。FIG. 4 is an explanatory diagram of an inspection method of a fourth invention of the present application.
【図５】本願の第５発明の検査方法説明図。FIG. 5 is an explanatory diagram of an inspection method of a fifth invention of the present application.
【図６】本願の第６発明の検査方法説明図。FIG. 6 is an explanatory diagram of an inspection method of a sixth invention of the present application.
【図７】本願の第７発明の検査方法説明図。FIG. 7 is an explanatory diagram of an inspection method of a seventh invention of the present application.
【図８】本願の第８発明の検査方法説明図。FIG. 8 is an explanatory diagram of an inspection method of an eighth invention of the present application.
【図９】内部欠点の検査原理説明図。FIG. 9 is an explanatory diagram of an inspection principle of an internal defect.
【図１０】一定面積当たりの内部欠点と外部欠点である
ダストとの明るさの比較説明用グラフ。FIG. 10 is a graph for explaining the brightness comparison between the internal defect per unit area and the dust which is an external defect.
１ 板ガラス ２、４、６ 照射光源 ３、５ 撮像光学系 ａ 光 ｂ 内部欠点 1 plate glass 2, 4, 6 irradiation light source 3, 5 imaging optical system a light b internal defect
Claims (8)
を当て、当該板ガラスの表面側から当該板ガラスを撮像
光学系により撮像して一定面積当たりの画像の明るさを
検出して欠点を判定することを特徴とする板ガラスの欠
点検査方法。1. A defect is determined by illuminating the inside of the glass from a side end surface of the glass plate, capturing the glass plate from the surface side of the glass plate with an imaging optical system, and detecting the brightness of the image per certain area. A method for inspecting a glass sheet for defects.
を当て、当該板ガラスの表面側から当該板ガラスを撮像
光学系により撮像して一定面積当たりの画像の明るさを
検出し、これとは別に、当該板ガラスの表面に照明を当
て、この状態での当該板ガラスを撮像光学系により撮像
して一定面積当たりの画像の明るさを検出し、両者の検
出値の比によって欠点を判定することを特徴とする板ガ
ラスの欠点検査方法。2. Illuminating the inside of the glass from the side end surface of the glass sheet, the image of the glass sheet is picked up from the surface side of the glass sheet by an image pickup optical system to detect the brightness of an image per certain area, and separately from this. Illuminating the surface of the plate glass, the plate glass in this state is imaged by an imaging optical system to detect the brightness of the image per fixed area, and the defect is determined by the ratio of the detection values of the two. Inspection method for sheet glass defects.
を当て、当該板ガラスの表面側から当該板ガラスを撮像
光学系により撮像して一定面積当たりの画像の明るさか
ら欠点部分の位置を検出し、当該検出位置を上記撮像光
学系よりも倍率の大きい撮像光学系により撮像して欠点
を判定することを特徴とする板ガラスの欠点検査方法。3. Illuminating the inside of the glass from the side end surface of the glass sheet, picking up the glass sheet from the surface side of the glass sheet with an imaging optical system, and detecting the position of the defect portion from the brightness of the image per certain area, A defect inspection method for plate glass, which is characterized in that the detection position is imaged by an imaging optical system having a magnification higher than that of the imaging optical system to determine a defect.
を当て、当該板ガラスの表面側から当該板ガラスを撮像
光学系により撮像して一定面積当たりの画像の明るさを
検出し、これとは別に、当該板ガラスの表面に照明を当
て、この状態での当該板ガラスを撮像光学系により撮像
して一定面積当たりの画像の明るさを検出し、両者の検
出値の比によって欠点部分の位置を検出し、当該検出位
置を上記撮像光学系よりも倍率の大きい撮像光学系によ
り撮像して欠点を判定することを特徴とする板ガラスの
欠点検査方法。4. Illuminating the inside of the glass from the side end face of the plate glass, the plate glass is imaged from the surface side of the plate glass by an image pickup optical system to detect the brightness of an image per certain area, and separately from this. Illuminate the surface of the plate glass, detect the brightness of the image per fixed area by imaging the plate glass in this state by the imaging optical system, and detect the position of the defect portion by the ratio of the detection values of both, A defect inspection method for plate glass, which is characterized in that the detection position is imaged by an imaging optical system having a magnification higher than that of the imaging optical system to determine a defect.
光画像を撮像光学系により撮像して、一定面積当たりの
画像の明るさから欠点の有無を検出し、欠点の存在によ
り、当該板ガラスの側端面からガラス内部に照明を当
て、当該板ガラスの表面側から当該板ガラスを撮像光学
系により撮像して一定面積当たりの画像の明るさから欠
点を判定することを特徴とする板ガラスの欠点検査方
法。5. The surface of the plate glass is illuminated, and a transmitted light image thereof is picked up by an image pickup optical system to detect the presence or absence of a defect from the brightness of the image per certain area. A defect inspection method for a plate glass, which comprises illuminating the inside of the glass from a side end face, imaging the plate glass from the front surface side of the plate glass by an imaging optical system, and determining a defect from the brightness of an image per certain area.
光画像を撮像光学系により撮像して、一定面積当たりの
画像の明るさから欠点の有無を検出し、欠点の存在によ
り、当該板ガラスの側端面からガラス内部に照明を当
て、当該板ガラスの表面側から当該板ガラスを撮像光学
系により撮像して一定面積当たりの画像の明るさを検出
し、これとは別に、当該板ガラスの表面に照明を当て、
この状態での当該板ガラスを撮像光学系により撮像して
一定面積当たりの画像の明るさを検出し、両者の検出値
の比によって欠点を判定することを特徴とする板ガラス
の欠点検査方法。6. The surface of the plate glass is illuminated, a transmitted light image thereof is picked up by an image pickup optical system, and the presence or absence of a defect is detected from the brightness of the image per certain area. Illuminate the inside of the glass from the side end face, detect the brightness of the image per certain area by imaging the plate glass from the surface side of the plate glass with an imaging optical system, and separately from this, illuminate the surface of the plate glass. Guess
A defect inspection method for a plate glass, characterized in that the plate glass in this state is imaged by an imaging optical system to detect the brightness of an image per a certain area, and the defect is determined by the ratio of the detection values of the two.
し、欠点からの散乱光を光検出器で検出して、欠点の有
無を検出し、欠点の存在により、当該板ガラスの側端面
からガラス内部に照明を当て、当該板ガラスの表面側か
ら当該板ガラスを撮像光学系により撮像して一定面積当
たりの画像の明るさを検出して欠点を判定することを特
徴とする板ガラスの欠点検査方法。7. The surface of the glass sheet is scanned with a laser beam, the scattered light from the defect is detected by a photodetector to detect the presence or absence of the defect, and the presence of the defect causes the side edge surface of the glass sheet to move to the inside of the glass. A defect inspection method for a sheet glass, which comprises illuminating and imaging the sheet glass from the front surface side of the sheet glass by an imaging optical system to detect the brightness of an image per fixed area to determine a defect.
し、欠点からの散乱光を光検出器で検出して、欠点の有
無を検出し、欠点の存在により、当該板ガラスの側端面
からガラス内部に照明を当て、当該板ガラスの表面側か
ら当該板ガラスを撮像光学系により撮像して一定面積当
たりの画像の明るさを検出し、これとは別に、当該板ガ
ラスの表面に照明を当て、この状態での当該板ガラスを
撮像光学系により撮像して一定面積当たりの画像の明る
さを検出し、両者の検出値の比によって欠点を判定する
ことを特徴とする板ガラスの欠点検査方法。8. The surface of the glass sheet is scanned with a laser beam, the scattered light from the defect is detected by a photodetector to detect the presence or absence of the defect, and the presence of the defect causes the side end surface of the glass sheet to move to the inside of the glass. Apply illumination, detect the brightness of the image per fixed area by imaging the plate glass from the surface side of the plate glass with an imaging optical system, and separately from this, illuminate the surface of the plate glass in this state. A method of inspecting a glass sheet, wherein the glass sheet is imaged by an imaging optical system to detect the brightness of an image per fixed area, and the defect is determined by the ratio of the detected values of the two.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8289193A JPH06294749A (en) | 1993-04-09 | 1993-04-09 | Flaw inspection method for plat glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8289193A JPH06294749A (en) | 1993-04-09 | 1993-04-09 | Flaw inspection method for plat glass |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06294749A true JPH06294749A (en) | 1994-10-21 |
Family
ID=13786903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8289193A Pending JPH06294749A (en) | 1993-04-09 | 1993-04-09 | Flaw inspection method for plat glass |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06294749A (en) |
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