JPS60228910A - 表面欠陥検査装置 - Google Patents

表面欠陥検査装置

Info

Publication number
JPS60228910A
JPS60228910A JP8389084A JP8389084A JPS60228910A JP S60228910 A JPS60228910 A JP S60228910A JP 8389084 A JP8389084 A JP 8389084A JP 8389084 A JP8389084 A JP 8389084A JP S60228910 A JPS60228910 A JP S60228910A
Authority
JP
Japan
Prior art keywords
defect
line sensor
diffusion screen
inspected
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8389084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0312686B2 (enrdf_load_stackoverflow
Inventor
Yoshitada Sekine
関根　慶忠
Fumiki Yokota
横田　文樹
Wataru Kubota
窪田　弥
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP8389084A priority Critical patent/JPS60228910A/ja
Priority to GB08510579A priority patent/GB2159271B/en
Priority to DE19853515194 priority patent/DE3515194A1/de
Priority to US06/727,874 priority patent/US4715709A/en
Publication of JPS60228910A publication Critical patent/JPS60228910A/ja
Publication of JPH0312686B2 publication Critical patent/JPH0312686B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515—Objects of complex shape, e.g. examined with use of a surface follower device

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP8389084A 1984-04-27 1984-04-27 表面欠陥検査装置 Granted JPS60228910A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP8389084A JPS60228910A (ja) 1984-04-27 1984-04-27 表面欠陥検査装置
GB08510579A GB2159271B (en) 1984-04-27 1985-04-25 Surface flaw detecting method and apparatus
DE19853515194 DE3515194A1 (de) 1984-04-27 1985-04-26 Verfahren und vorrichtung zur ermittlung von oberflaechenfehlern
US06/727,874 US4715709A (en) 1984-04-27 1985-04-26 Surface flaw detecting method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8389084A JPS60228910A (ja) 1984-04-27 1984-04-27 表面欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS60228910A true JPS60228910A (ja) 1985-11-14
JPH0312686B2 JPH0312686B2 (enrdf_load_stackoverflow) 1991-02-20

Family

ID=13815236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8389084A Granted JPS60228910A (ja) 1984-04-27 1984-04-27 表面欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS60228910A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01163643A (ja) * 1987-12-21 1989-06-27 Asahi Eng Co Ltd 反射式表面検査器
JP2001272355A (ja) * 2000-01-21 2001-10-05 Horiba Ltd 異物検査装置
WO2004077033A1 (en) * 2003-02-28 2004-09-10 Koninklijke Philips Electronics N.V. A scatterometer and a method for inspecting a surface
JP2008058050A (ja) * 2006-08-30 2008-03-13 Ricoh Co Ltd 表面欠陥検査装置及びその方法
KR100844035B1 (ko) * 2000-11-27 2008-07-04 가부시키가이샤 도요세이키 세이사쿠쇼 레이저 투과광에 의한 입상반점모양의 직접 촬상방법
JP2010133967A (ja) * 1999-02-08 2010-06-17 Jfe Steel Corp 表面検査装置
WO2014207266A1 (es) * 2013-06-28 2014-12-31 Unimetrik, S.A. Sensor láser con mecanismo de giro integrado

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5727965B2 (ja) * 2012-05-02 2015-06-03 住友ゴム工業株式会社 空気入りタイヤ

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01163643A (ja) * 1987-12-21 1989-06-27 Asahi Eng Co Ltd 反射式表面検査器
JP2010133967A (ja) * 1999-02-08 2010-06-17 Jfe Steel Corp 表面検査装置
JP2001272355A (ja) * 2000-01-21 2001-10-05 Horiba Ltd 異物検査装置
KR100844035B1 (ko) * 2000-11-27 2008-07-04 가부시키가이샤 도요세이키 세이사쿠쇼 레이저 투과광에 의한 입상반점모양의 직접 촬상방법
WO2004077033A1 (en) * 2003-02-28 2004-09-10 Koninklijke Philips Electronics N.V. A scatterometer and a method for inspecting a surface
JP2006519380A (ja) * 2003-02-28 2006-08-24 コーニンクレッカ　フィリップス　エレクトロニクス　エヌ　ヴィ 面を検査するスキャタロメータ及び方法
US7248368B2 (en) 2003-02-28 2007-07-24 Koninklijke Philips Electronics, N.V. Scatterometer and a method for inspecting a surface
JP4824541B2 (ja) * 2003-02-28 2011-11-30 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 面を検査するスキャタロメータ及び方法
JP2008058050A (ja) * 2006-08-30 2008-03-13 Ricoh Co Ltd 表面欠陥検査装置及びその方法
WO2014207266A1 (es) * 2013-06-28 2014-12-31 Unimetrik, S.A. Sensor láser con mecanismo de giro integrado

Also Published As

Publication number Publication date
JPH0312686B2 (enrdf_load_stackoverflow) 1991-02-20

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