JPS60227105A - 面振れ測定装置 - Google Patents

面振れ測定装置

Info

Publication number
JPS60227105A
JPS60227105A JP7091085A JP7091085A JPS60227105A JP S60227105 A JPS60227105 A JP S60227105A JP 7091085 A JP7091085 A JP 7091085A JP 7091085 A JP7091085 A JP 7091085A JP S60227105 A JPS60227105 A JP S60227105A
Authority
JP
Japan
Prior art keywords
circuit
spot position
light spot
measured
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7091085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6149604B2 (enrdf_load_stackoverflow
Inventor
Kazuo Shigematsu
和男 重松
Hirobumi Nakamura
博文 中村
Toshimasa Kamisada
利昌 神定
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7091085A priority Critical patent/JPS60227105A/ja
Publication of JPS60227105A publication Critical patent/JPS60227105A/ja
Publication of JPS6149604B2 publication Critical patent/JPS6149604B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Recording Or Reproduction (AREA)
JP7091085A 1985-04-05 1985-04-05 面振れ測定装置 Granted JPS60227105A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7091085A JPS60227105A (ja) 1985-04-05 1985-04-05 面振れ測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7091085A JPS60227105A (ja) 1985-04-05 1985-04-05 面振れ測定装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP791086A Division JPS61228306A (ja) 1986-01-20 1986-01-20 面振れ測定装置

Publications (2)

Publication Number Publication Date
JPS60227105A true JPS60227105A (ja) 1985-11-12
JPS6149604B2 JPS6149604B2 (enrdf_load_stackoverflow) 1986-10-30

Family

ID=13445139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7091085A Granted JPS60227105A (ja) 1985-04-05 1985-04-05 面振れ測定装置

Country Status (1)

Country Link
JP (1) JPS60227105A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6149604B2 (enrdf_load_stackoverflow) 1986-10-30

Similar Documents

Publication Publication Date Title
US5517307A (en) Probe measurement apparatus using a curved grating displacement interferometer
US4897536A (en) Optical axis displacement sensor with cylindrical lens means
EP0165722A2 (en) Film thickness measuring apparatus
US4484069A (en) Apparatus and method for sensing distance
JPH0652170B2 (ja) 光結像式非接触位置測定装置
US4600301A (en) Spinning disk calibration method and apparatus for laser Doppler velocimeter
KR900003208B1 (ko) 막(膜)두께의 측정장치
JPS60227105A (ja) 面振れ測定装置
JPS61228306A (ja) 面振れ測定装置
US7460249B2 (en) Measuring instrument of polygon-mirror motor
US4814624A (en) Method and apparatus for measuring the position of an object boundary
JPH0438049B2 (enrdf_load_stackoverflow)
JP3023771B2 (ja) 振動センサ校正装置
US5349183A (en) Diffraction grating rotary speed sensor having a circumferentially variable pitch diffraction grating
JPS58160804A (ja) 透明円板の厚みムラ測定装置
JPS60243583A (ja) レ−ザドツプラ速度計
JPS5856094B2 (ja) 微小振動測定装置
RU2010236C1 (ru) Устройство для градуировки средств измерений угловых параметров движения
JPH0955051A (ja) 磁気ヘッドの浮上特性計測方法およびその装置
JPH04220586A (ja) レーザドップラ方式による被測定物の速度、長さ等の測定における被測定物の傾き、位置ずれ検出方法
JP3526724B2 (ja) 形状測定装置における誤差補正方法
JPH0422254Y2 (enrdf_load_stackoverflow)
JPH0560557A (ja) 光学式微小変位測定方法及び装置
JPS62255807A (ja) 膜厚測定装置
JPS61184438A (ja) プリズム検査装置