JPS60222167A - 成膜方法及びその装置 - Google Patents

成膜方法及びその装置

Info

Publication number
JPS60222167A
JPS60222167A JP7752984A JP7752984A JPS60222167A JP S60222167 A JPS60222167 A JP S60222167A JP 7752984 A JP7752984 A JP 7752984A JP 7752984 A JP7752984 A JP 7752984A JP S60222167 A JPS60222167 A JP S60222167A
Authority
JP
Japan
Prior art keywords
film
substrate
monomolecular
moving
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7752984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0475065B2 (enExample
Inventor
Toshihiko Miyazaki
俊彦 宮崎
Etsuko Mizota
溝田　悦子
Yoshinori Tomita
富田　桂紀
Hirohide Munakata
博英 棟方
Yukio Nishimura
征生 西村
Takeshi Eguchi
健 江口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP7752984A priority Critical patent/JPS60222167A/ja
Priority to US06/723,923 priority patent/US4674436A/en
Publication of JPS60222167A publication Critical patent/JPS60222167A/ja
Publication of JPH0475065B2 publication Critical patent/JPH0475065B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP7752984A 1984-04-19 1984-04-19 成膜方法及びその装置 Granted JPS60222167A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP7752984A JPS60222167A (ja) 1984-04-19 1984-04-19 成膜方法及びその装置
US06/723,923 US4674436A (en) 1984-04-19 1985-04-16 Film forming apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7752984A JPS60222167A (ja) 1984-04-19 1984-04-19 成膜方法及びその装置

Publications (2)

Publication Number Publication Date
JPS60222167A true JPS60222167A (ja) 1985-11-06
JPH0475065B2 JPH0475065B2 (enExample) 1992-11-27

Family

ID=13636506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7752984A Granted JPS60222167A (ja) 1984-04-19 1984-04-19 成膜方法及びその装置

Country Status (1)

Country Link
JP (1) JPS60222167A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011131185A (ja) * 2009-12-25 2011-07-07 Oji Paper Co Ltd ラングミュア・ブロジェット膜転写用基板ジグ、ラングミュア・ブロジェット膜転写装置およびラングミュア・ブロジェット膜転写方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5977530A (ja) * 1982-09-20 1984-05-04 イ−トン・コ−ポレ−シヨン シフトレバ−装置
JPS59183861A (ja) * 1983-03-04 1984-10-19 コミサリヤ・ア・レネルジ・アトミク 交互形単分子層の形成法及び形成装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5977530A (ja) * 1982-09-20 1984-05-04 イ−トン・コ−ポレ−シヨン シフトレバ−装置
JPS59183861A (ja) * 1983-03-04 1984-10-19 コミサリヤ・ア・レネルジ・アトミク 交互形単分子層の形成法及び形成装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011131185A (ja) * 2009-12-25 2011-07-07 Oji Paper Co Ltd ラングミュア・ブロジェット膜転写用基板ジグ、ラングミュア・ブロジェット膜転写装置およびラングミュア・ブロジェット膜転写方法

Also Published As

Publication number Publication date
JPH0475065B2 (enExample) 1992-11-27

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