JPS60219972A - 積層型圧電素子を利用した微動装置 - Google Patents
積層型圧電素子を利用した微動装置Info
- Publication number
- JPS60219972A JPS60219972A JP59076784A JP7678484A JPS60219972A JP S60219972 A JPS60219972 A JP S60219972A JP 59076784 A JP59076784 A JP 59076784A JP 7678484 A JP7678484 A JP 7678484A JP S60219972 A JPS60219972 A JP S60219972A
- Authority
- JP
- Japan
- Prior art keywords
- laminated piezoelectric
- voltage
- shaft
- fine movement
- movement device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims abstract description 5
- 230000008878 coupling Effects 0.000 claims description 10
- 238000010168 coupling process Methods 0.000 claims description 10
- 238000005859 coupling reaction Methods 0.000 claims description 10
- 230000005684 electric field Effects 0.000 claims description 9
- 239000000919 ceramic Substances 0.000 description 14
- 230000000694 effects Effects 0.000 description 11
- 230000008602 contraction Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000000452 restraining effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003985 ceramic capacitor Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000002500 effect on skin Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical group [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/023—Inchworm motors
Landscapes
- Machine Tool Units (AREA)
- Control Of Position Or Direction (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59076784A JPS60219972A (ja) | 1984-04-17 | 1984-04-17 | 積層型圧電素子を利用した微動装置 |
| US06/662,881 US4570096A (en) | 1983-10-27 | 1984-10-19 | Electromechanical translation device comprising an electrostrictive driver of a stacked ceramic capacitor type |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59076784A JPS60219972A (ja) | 1984-04-17 | 1984-04-17 | 積層型圧電素子を利用した微動装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60219972A true JPS60219972A (ja) | 1985-11-02 |
| JPH0522473B2 JPH0522473B2 (enrdf_load_html_response) | 1993-03-29 |
Family
ID=13615225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59076784A Granted JPS60219972A (ja) | 1983-10-27 | 1984-04-17 | 積層型圧電素子を利用した微動装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60219972A (enrdf_load_html_response) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5017820A (en) * | 1990-04-23 | 1991-05-21 | Rockwell International Corporation | Piezoelectric rotary union system |
| US5068566A (en) * | 1990-06-04 | 1991-11-26 | Rockwell International Corporation | Electric traction motor |
| US5136201A (en) * | 1990-04-27 | 1992-08-04 | Rockwell International Corporation | Piezoelectric robotic articulation |
-
1984
- 1984-04-17 JP JP59076784A patent/JPS60219972A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5017820A (en) * | 1990-04-23 | 1991-05-21 | Rockwell International Corporation | Piezoelectric rotary union system |
| US5136201A (en) * | 1990-04-27 | 1992-08-04 | Rockwell International Corporation | Piezoelectric robotic articulation |
| US5068566A (en) * | 1990-06-04 | 1991-11-26 | Rockwell International Corporation | Electric traction motor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0522473B2 (enrdf_load_html_response) | 1993-03-29 |
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