JPS60215515A - 合成石英素塊の製造法及びその装置 - Google Patents

合成石英素塊の製造法及びその装置

Info

Publication number
JPS60215515A
JPS60215515A JP7160184A JP7160184A JPS60215515A JP S60215515 A JPS60215515 A JP S60215515A JP 7160184 A JP7160184 A JP 7160184A JP 7160184 A JP7160184 A JP 7160184A JP S60215515 A JPS60215515 A JP S60215515A
Authority
JP
Japan
Prior art keywords
oxygen gas
burner
gas
synthetic quartz
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7160184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH025694B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Masahiro Ikeda
政弘 池田
Kenichi Hiroshima
広嶋　健一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON SILICON KK
Mitsubishi Metal Corp
Original Assignee
NIPPON SILICON KK
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON SILICON KK, Mitsubishi Metal Corp filed Critical NIPPON SILICON KK
Priority to JP7160184A priority Critical patent/JPS60215515A/ja
Publication of JPS60215515A publication Critical patent/JPS60215515A/ja
Publication of JPH025694B2 publication Critical patent/JPH025694B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C03B19/1423—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/06—Concentric circular ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/08—Recessed or protruding ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/12—Nozzle or orifice plates
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/14—Tapered or flared nozzles or ports angled to central burner axis
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
    • C03B2207/22—Inert gas details
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Silicon Compounds (AREA)
JP7160184A 1984-04-10 1984-04-10 合成石英素塊の製造法及びその装置 Granted JPS60215515A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7160184A JPS60215515A (ja) 1984-04-10 1984-04-10 合成石英素塊の製造法及びその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7160184A JPS60215515A (ja) 1984-04-10 1984-04-10 合成石英素塊の製造法及びその装置

Publications (2)

Publication Number Publication Date
JPS60215515A true JPS60215515A (ja) 1985-10-28
JPH025694B2 JPH025694B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-02-05

Family

ID=13465336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7160184A Granted JPS60215515A (ja) 1984-04-10 1984-04-10 合成石英素塊の製造法及びその装置

Country Status (1)

Country Link
JP (1) JPS60215515A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10120429A (ja) * 1996-10-17 1998-05-12 Shin Etsu Chem Co Ltd ガラス微粒子生成用バーナー
EP1140715A4 (en) * 1998-09-22 2005-10-05 Corning Inc BURNER FOR THE PRODUCTION OF BALLS OF MELTED SILICATED GLASS
JP2008239479A (ja) * 1998-08-24 2008-10-09 Asahi Glass Co Ltd 合成石英ガラス光学部材とその製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3567574B2 (ja) * 1995-12-26 2004-09-22 住友電気工業株式会社 多孔質ガラス母材合成用バーナ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10120429A (ja) * 1996-10-17 1998-05-12 Shin Etsu Chem Co Ltd ガラス微粒子生成用バーナー
JP2008239479A (ja) * 1998-08-24 2008-10-09 Asahi Glass Co Ltd 合成石英ガラス光学部材とその製造方法
EP1140715A4 (en) * 1998-09-22 2005-10-05 Corning Inc BURNER FOR THE PRODUCTION OF BALLS OF MELTED SILICATED GLASS

Also Published As

Publication number Publication date
JPH025694B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-02-05

Similar Documents

Publication Publication Date Title
EP1094039B1 (en) Method for manufacturing quartz glass crucible
JP2004203736A (ja) 高純度溶融シリカの製造方法
JPH01148782A (ja) 単結晶引き上げ用石英ルツボ
KR100731835B1 (ko) 실리콘 단결정 인상에 사용되는 석영유리 도가니 제조방법및 그 방법으로 제조된 석영유리 도가니
CN115353277A (zh) 一种合成石英的沉积窑炉及制备方法
JP2003165737A (ja) 光ファイバ用母材の製造方法
JPS62171939A (ja) 多孔質光フアイバ母材の製造装置
JP4803784B2 (ja) シリコン単結晶引上げ用石英ガラスルツボの製造方法
JPS60215515A (ja) 合成石英素塊の製造法及びその装置
JPH02283015A (ja) 半導体製造装置若しくは治具用石英ガラス及びその製造方法
JPS61178495A (ja) 単結晶の成長方法
US20190112216A1 (en) Fabrication apparatus and fabrication method for porous glass base material
US2936216A (en) Method of making monocrystalline calcium titanate
JP3188517B2 (ja) 石英ガラスの製造方法
JP3295444B2 (ja) シリカ多孔質母材の製造方法
JPH0222137A (ja) 合成石英母材の製造方法
JP2022032071A (ja) 合成シリカガラス製造装置および当該製造装置を用いた合成シリカガラスの製造方法
JPS6272537A (ja) 高純度石英ガラスの製造方法
JP4470581B2 (ja) 石英ガラス製造炉及び石英ガラスの製造方法
JPS62153130A (ja) 光フアイバ−用ガラス母材の製造方法
JPS6272536A (ja) 高純度石英ガラスの製造方法
JPH0288441A (ja) 石英管製造装置
JPS62162646A (ja) ガラス微粒子堆積体の製造方法
KR20070104396A (ko) 다공질 석영 유리 모재의 제조 방법 및 장치
JPH05155630A (ja) シリカ多孔質母材の製造法