JPS60210720A - クリ−ンル−ムの検査装置 - Google Patents
クリ−ンル−ムの検査装置Info
- Publication number
- JPS60210720A JPS60210720A JP59066647A JP6664784A JPS60210720A JP S60210720 A JPS60210720 A JP S60210720A JP 59066647 A JP59066647 A JP 59066647A JP 6664784 A JP6664784 A JP 6664784A JP S60210720 A JPS60210720 A JP S60210720A
- Authority
- JP
- Japan
- Prior art keywords
- vehicle
- probe
- computer
- clean room
- inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012806 monitoring device Methods 0.000 title 1
- 230000007246 mechanism Effects 0.000 claims abstract description 39
- 239000000523 sample Substances 0.000 claims abstract description 29
- 239000000428 dust Substances 0.000 claims abstract description 12
- 238000005070 sampling Methods 0.000 claims abstract description 7
- 238000006073 displacement reaction Methods 0.000 claims abstract description 5
- 238000007689 inspection Methods 0.000 claims description 27
- 238000012544 monitoring process Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 9
- 230000005856 abnormality Effects 0.000 description 7
- 230000003028 elevating effect Effects 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 230000003749 cleanliness Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 2
- JSMYHXFFKXKZRN-SBMIAAHKSA-N (2s,3s,4s)-3-(carboxymethyl)-4-(2-hydroxyphenyl)pyrrolidine-2-carboxylic acid Chemical compound OC(=O)C[C@@H]1[C@@H](C(O)=O)NC[C@@H]1C1=CC=CC=C1O JSMYHXFFKXKZRN-SBMIAAHKSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 235000001916 dieting Nutrition 0.000 description 1
- 230000037228 dieting effect Effects 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000004092 self-diagnosis Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Landscapes
- Testing Or Calibration Of Command Recording Devices (AREA)
- Navigation (AREA)
- Sampling And Sample Adjustment (AREA)
- Ventilation (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59066647A JPS60210720A (ja) | 1984-04-05 | 1984-04-05 | クリ−ンル−ムの検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59066647A JPS60210720A (ja) | 1984-04-05 | 1984-04-05 | クリ−ンル−ムの検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60210720A true JPS60210720A (ja) | 1985-10-23 |
| JPH0510605B2 JPH0510605B2 (enrdf_load_stackoverflow) | 1993-02-10 |
Family
ID=13321894
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59066647A Granted JPS60210720A (ja) | 1984-04-05 | 1984-04-05 | クリ−ンル−ムの検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60210720A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63158618A (ja) * | 1986-09-29 | 1988-07-01 | Daifuku Co Ltd | クリ−ンル−ム用の移動車誘導設備 |
| JPH01128540A (ja) * | 1987-11-13 | 1989-05-22 | Nec Corp | ウェハー搬送車 |
| JPH062199U (ja) * | 1992-06-08 | 1994-01-14 | 新日本空調株式会社 | クリーンルームにおける天井の漏洩検知装置 |
| US7669490B2 (en) | 2004-08-27 | 2010-03-02 | Taikisha Ltd. | Apparatus and method for testing filters in a clean room |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58142499A (ja) * | 1982-02-18 | 1983-08-24 | 株式会社東芝 | 移動式点検監視システム |
| JPS58186889U (ja) * | 1982-06-08 | 1983-12-12 | 三菱電機株式会社 | エア−シヤワ−室 |
-
1984
- 1984-04-05 JP JP59066647A patent/JPS60210720A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58142499A (ja) * | 1982-02-18 | 1983-08-24 | 株式会社東芝 | 移動式点検監視システム |
| JPS58186889U (ja) * | 1982-06-08 | 1983-12-12 | 三菱電機株式会社 | エア−シヤワ−室 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63158618A (ja) * | 1986-09-29 | 1988-07-01 | Daifuku Co Ltd | クリ−ンル−ム用の移動車誘導設備 |
| JPH01128540A (ja) * | 1987-11-13 | 1989-05-22 | Nec Corp | ウェハー搬送車 |
| JPH062199U (ja) * | 1992-06-08 | 1994-01-14 | 新日本空調株式会社 | クリーンルームにおける天井の漏洩検知装置 |
| US7669490B2 (en) | 2004-08-27 | 2010-03-02 | Taikisha Ltd. | Apparatus and method for testing filters in a clean room |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0510605B2 (enrdf_load_stackoverflow) | 1993-02-10 |
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