JPS6020917B2 - Electrode inspection device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electrode inspection device for a large number of parallel electrode groups printed wiring on a substrate, and in particular for X and Y inspection of a flat panel display panel.
The present invention relates to an electrode inspection device that is effective for inspecting disconnections in electrode groups.

For this type of electrode disconnection test, it is common for a worker to test the continuity of each electrode one by one using a simple tester on a small scale production scale.

However, as the number of panels to be inspected increases and/or panel wiring electrode groups become denser and thinner,
This primitive method by the operator would make the inspection work extremely troublesome and unmanageable. On the other hand, computer-aided electrode inspection methods have now been developed, but these are expensive and are only economically viable for large-scale production, and are therefore not practical for medium-scale production.
SUMMARY OF THE INVENTION An object of the present invention is to provide an electrode inspection device that has functions and economy suitable for medium-scale production.

The feature of the present invention is that a pair of Y-axis orbits and an The bag track is equipped with a Y-axis driver and an X-axis driver that can move on each track. The Y-axis driver and the X-axis driver are connected together to a Y-axis controller that issues control commands to both drivers, The measuring stylus and the mark recorder detect information on electrode conduction from the measuring stylus, and issue a mark activation command to the recorder in the event of electrode breakage. When a broken electrode is detected by the Y-axis scanning of the contact point, the scanning of the contact point is switched from Y-mall scanning to X-axis scanning along the broken electrode, and immediately after passing the broken point, the recorder detects the broken wire. A mark is imprinted near the point.
You can tell where the electrode is broken just by looking at the electrode board after inspection.

The present invention will be explained below with reference to Examples.

FIG. 1 is an explanatory plan view of the apparatus of the present invention, and FIG. 2 is an explanatory block diagram showing the configuration of this apparatus.

In the figure, 1 is a measuring table of the apparatus, on which a sample 2 such as a panel to be inspected having a group of parallel electrodes printed and wired is placed.

Near the green on both sides of the measurement platform 1, there are Y-axis orbits 3 arranged in parallel,
4 is provided. An X-axis track 5 having wheels at both ends is constructed between both Y-axis tracks, and this X-axis track 5 is movable along the Y-axis track. The wheels on the x-axis track riding on one Y-axis track 3 are one component of the Y-axis agitator 6, and are rotated by an electric motor of a driver. The X hoe track 5 is equipped with an The arm drive unit 6 travels on a pair of Y-axis tracks 3 and 4. The X-axis drive unit 7 is provided with a measuring element and a recording element.

Details of this are shown in FIG. 8 is the measuring head,
9 is the recorder.

The recorder 9 is configured to emit ink from a tank to a recording surface through a nozzle by vertical movement of a magnetic valve 9a. The device of the present invention includes an X/Y axis controller 10 and a detector 1 1
It detects the information from the probe 8, sends a signal to the X/Y axis controller 10, and in response to this signal, the controller
Drive control of the axis driver 7 and Y-axis driver 6 is performed.

The detector issues a command signal to operate the magnetic valve 9a based on predetermined information from the probe, thereby operating the recorder. 40 is a power source for X/Y scanning.

According to the device of the present invention having the above configuration, the measuring stylus 8 can be moved to any point on the XY coordinates by the mutual movement of the Y-axis driver 6 and the x-width driver 7, but in the inspection operation. , the probe first scans one end E of the parallel electrode group starting from the first electrode 21 of the sample 2.

In this case, the terminals of the parallel electrode group on the sample are connected by the common conductor 20, and this conductor 20 and the probe 8 are connected to one power loop, so there is no disconnection in each electrode to be tested. If not, there is continuity between the two through the electrodes.While scanning the electrode group with continuity in this way, the detector meter continues to send signals for driving the Y-axis to the Y-axis controller. However, if there is a disconnection point A, such as the electrode 28, for example, ``When the probe 8 comes to the end E of this electrode, ``continuity is not established, so the disconnection information is sent to the x8Y controller.'' Given by the detector, “×Y” is determined by the controller.
The Y-axis driver 6 and the X-axis driver 7 are drive-controlled so that the X-axis drive is started at the same time as the Wisteria drive is stopped. Therefore, if there is a break in the electrode, the scanning of the probe is switched from scanning on the Y-axis to scanning on the X-axis with respect to the electrode.When the probe passes the broken point A by scanning on the Continuity is established between the electrode 20 and the probe 8, but when this continuity information enters the detector 11, the detector issues an operation command to the recorder 9, which causes ink to be recorded at the position on the common electrode side of the disconnection point. A mark is marked. Also, based on the continuity information, a signal is given from the detector 11 to the Moving on to part E, the drive is controlled to continue scanning on the Y-axis again.In short, according to the device of the present invention, one end of the probe is connected to a common conductor and wired in parallel parallel to the x-axis. The free end of the electrode group is scanned along the Y-axis, and when a broken electrode is detected, the scanning of the probe is switched from Y-axis scanning to x-mari scanning along the broken electrode, and then the probe passes through the broken point. Immediately after the conduction of the electrode is detected, a mark is marked near the disconnection point on the electrode substrate by a recorder that moves together with the probe, and then the probe is scanned over the following electrode groups to be inspected as described above. Therefore, when using the device of the present invention, these pongee wire electrodes can be used for panels such as gas discharge display panels (PDP) in which X and Y electrode groups are printed. Since the broken wires in the group are automatically marked, it is easy to see where the broken wires should be repaired, which is very effective when converting defective panels into good ones later.

In the above embodiments, one end of the electrodes is connected in common in advance, and only the other end is scanned by a probe, but it is also possible to simultaneously scan both ends with a pair of probes.

[Brief explanation of the drawing]

FIG. 1 is an explanatory plan view of an electrode inspection device according to the present invention, and FIG.
1 is an explanatory block diagram of the apparatus shown in FIG. 1, and FIG. 3 is an explanatory diagram showing a recorder and a measuring element of the apparatus shown in FIG. In the figure, 1 is the measurement stage, 2 is the sample electrode substrate, 3, 4
is a pair of Y-axis orbits, 5 is × wisteria orbit, 6 is Y-axis driver, 7
is the x-axis driver, 8 is the measuring head, 9 is the mark recorder, 10
'Ma x Y axis controller, 11 is the detector, 21 to 32 are parallel electrode groups parallel to the x axis, 2 rivers are common electrodes, E is the free electrode, A is the disconnection point, 40 is the power supply show. Figure 1 Figure 2 Figure 3

Claims (1)

[Scope of Claims] 1. A measuring stand on which an electrode substrate to be inspected having a large number of electrode groups wired in parallel is placed; a pair of Y-axis tracks arranged on the measuring stand; on the Y-axis tracks; a Y-axis driver that is movable on an X-axis trajectory; an X-axis driver that is movable on an X-axis trajectory;
A power supply circuit is constructed via a common electrode at one end of the electrode group and each electrode. A measuring element supported by the X-axis driver; a mark recorder arranged near the measuring element and supported by the X-axis driver; controlled by the Y-axis driver and the X-axis driver. An X/Y axis controller that issues commands; and detects information regarding electrode conduction from the probe;
In the case of an electrode breakage, the sensor instructs the recorder to perform a marking operation and also provides the information to the controller. death,
As soon as a broken electrode is detected, the scanning of the contact point is switched from Y-axis scanning to X-axis scanning along the broken electrode, and immediately after passing the broken point, continuity of the electrode is detected. A mark is marked in the vicinity of the broken line on the substrate by the recorder, which moves together with the probe, and then the scanning of the probe returns to the Y-axis scanning for subsequent electrode groups to be inspected. Electrode inspection equipment.