JPS60208829A - 位置検出装置 - Google Patents

位置検出装置

Info

Publication number
JPS60208829A
JPS60208829A JP59063173A JP6317384A JPS60208829A JP S60208829 A JPS60208829 A JP S60208829A JP 59063173 A JP59063173 A JP 59063173A JP 6317384 A JP6317384 A JP 6317384A JP S60208829 A JPS60208829 A JP S60208829A
Authority
JP
Japan
Prior art keywords
mask
wafer
position detection
electron beam
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59063173A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0582731B2 (enExample
Inventor
Takuo Kariya
刈谷　卓夫
Susumu Goto
進 後藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP59063173A priority Critical patent/JPS60208829A/ja
Publication of JPS60208829A publication Critical patent/JPS60208829A/ja
Publication of JPH0582731B2 publication Critical patent/JPH0582731B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP59063173A 1984-04-02 1984-04-02 位置検出装置 Granted JPS60208829A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59063173A JPS60208829A (ja) 1984-04-02 1984-04-02 位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59063173A JPS60208829A (ja) 1984-04-02 1984-04-02 位置検出装置

Publications (2)

Publication Number Publication Date
JPS60208829A true JPS60208829A (ja) 1985-10-21
JPH0582731B2 JPH0582731B2 (enExample) 1993-11-22

Family

ID=13221601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59063173A Granted JPS60208829A (ja) 1984-04-02 1984-04-02 位置検出装置

Country Status (1)

Country Link
JP (1) JPS60208829A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6420619A (en) * 1987-07-15 1989-01-24 Toshiba Corp Electron beam aligner
JP2013140844A (ja) * 2011-12-28 2013-07-18 Canon Inc 描画装置及び物品の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5271985A (en) * 1975-12-08 1977-06-15 Siemens Ag Apparatus for making iluminating pattern for specimen

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5271985A (en) * 1975-12-08 1977-06-15 Siemens Ag Apparatus for making iluminating pattern for specimen

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6420619A (en) * 1987-07-15 1989-01-24 Toshiba Corp Electron beam aligner
JP2013140844A (ja) * 2011-12-28 2013-07-18 Canon Inc 描画装置及び物品の製造方法

Also Published As

Publication number Publication date
JPH0582731B2 (enExample) 1993-11-22

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