JPS60206479A - 超純水製造装置 - Google Patents

超純水製造装置

Info

Publication number
JPS60206479A
JPS60206479A JP6499284A JP6499284A JPS60206479A JP S60206479 A JPS60206479 A JP S60206479A JP 6499284 A JP6499284 A JP 6499284A JP 6499284 A JP6499284 A JP 6499284A JP S60206479 A JPS60206479 A JP S60206479A
Authority
JP
Japan
Prior art keywords
section
water
ultrapure water
steam supply
supply section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6499284A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6314672B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Yozo Morita
洋造 森田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP6499284A priority Critical patent/JPS60206479A/ja
Publication of JPS60206479A publication Critical patent/JPS60206479A/ja
Publication of JPS6314672B2 publication Critical patent/JPS6314672B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Heat Treatment Of Water, Waste Water Or Sewage (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)
JP6499284A 1984-03-30 1984-03-30 超純水製造装置 Granted JPS60206479A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6499284A JPS60206479A (ja) 1984-03-30 1984-03-30 超純水製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6499284A JPS60206479A (ja) 1984-03-30 1984-03-30 超純水製造装置

Publications (2)

Publication Number Publication Date
JPS60206479A true JPS60206479A (ja) 1985-10-18
JPS6314672B2 JPS6314672B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-03-31

Family

ID=13274061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6499284A Granted JPS60206479A (ja) 1984-03-30 1984-03-30 超純水製造装置

Country Status (1)

Country Link
JP (1) JPS60206479A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6268368A (ja) * 1985-09-20 1987-03-28 Hitachi Seiko Ltd 画像前処理装置
JPS62191092A (ja) * 1986-02-17 1987-08-21 Hitachi Ltd 超純水製造方法
JPS63236333A (ja) * 1987-03-25 1988-10-03 Hitachi Ltd 基板の洗浄乾燥方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6268368A (ja) * 1985-09-20 1987-03-28 Hitachi Seiko Ltd 画像前処理装置
JPS62191092A (ja) * 1986-02-17 1987-08-21 Hitachi Ltd 超純水製造方法
JPS63236333A (ja) * 1987-03-25 1988-10-03 Hitachi Ltd 基板の洗浄乾燥方法

Also Published As

Publication number Publication date
JPS6314672B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-03-31

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