JPS60201228A - 圧力センサ - Google Patents

圧力センサ

Info

Publication number
JPS60201228A
JPS60201228A JP5877084A JP5877084A JPS60201228A JP S60201228 A JPS60201228 A JP S60201228A JP 5877084 A JP5877084 A JP 5877084A JP 5877084 A JP5877084 A JP 5877084A JP S60201228 A JPS60201228 A JP S60201228A
Authority
JP
Japan
Prior art keywords
pressure
receiving diaphragm
pressure receiving
gauge
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5877084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542609B2 (en, 2012
Inventor
Toshio Aga
阿賀　敏夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp filed Critical Yokogawa Hokushin Electric Corp
Priority to JP5877084A priority Critical patent/JPS60201228A/ja
Publication of JPS60201228A publication Critical patent/JPS60201228A/ja
Publication of JPH0542609B2 publication Critical patent/JPH0542609B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP5877084A 1984-03-27 1984-03-27 圧力センサ Granted JPS60201228A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5877084A JPS60201228A (ja) 1984-03-27 1984-03-27 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5877084A JPS60201228A (ja) 1984-03-27 1984-03-27 圧力センサ

Publications (2)

Publication Number Publication Date
JPS60201228A true JPS60201228A (ja) 1985-10-11
JPH0542609B2 JPH0542609B2 (en, 2012) 1993-06-29

Family

ID=13093779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5877084A Granted JPS60201228A (ja) 1984-03-27 1984-03-27 圧力センサ

Country Status (1)

Country Link
JP (1) JPS60201228A (en, 2012)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56145327A (en) * 1980-04-15 1981-11-12 Fuji Electric Co Ltd Pressure transducer
JPS5737235A (en) * 1980-08-19 1982-03-01 Omron Tateisi Electronics Co Semiconductor pressure-sensitive device
JPS5782730A (en) * 1980-11-10 1982-05-24 Mitsubishi Electric Corp Pressure sensor
JPS5826237A (ja) * 1981-08-07 1983-02-16 Mitsubishi Electric Corp 圧力センサ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56145327A (en) * 1980-04-15 1981-11-12 Fuji Electric Co Ltd Pressure transducer
JPS5737235A (en) * 1980-08-19 1982-03-01 Omron Tateisi Electronics Co Semiconductor pressure-sensitive device
JPS5782730A (en) * 1980-11-10 1982-05-24 Mitsubishi Electric Corp Pressure sensor
JPS5826237A (ja) * 1981-08-07 1983-02-16 Mitsubishi Electric Corp 圧力センサ

Also Published As

Publication number Publication date
JPH0542609B2 (en, 2012) 1993-06-29

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